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Takahito Mukawa
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Nirasaki, JP
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last 30 patents
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Patent Grant
Etching method and etching apparatus
Patent number
8,283,254
Issue date
Oct 9, 2012
Tokyo Electron Limited
Takahito Mukawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF FORMING MASK PATTERN AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20130023120
Publication date
Jan 24, 2013
TOKYO ELECTRON LIMITED
Hidetami Yaegashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20110159697
Publication date
Jun 30, 2011
TOKYO ELECTRON LIMITED
Takahito Mukawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS AND COMPUTER-READAB...
Publication number
20100224587
Publication date
Sep 9, 2010
TOKYO ELECTRON LIMITED
Takahito Mukawa
H01 - BASIC ELECTRIC ELEMENTS