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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Epitaxial silicon wafer and production method thereof
Patent number
9,190,267
Issue date
Nov 17, 2015
SUMCO Corporation
Takayuki Kihara
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer polishing method
Patent number
8,900,033
Issue date
Dec 2, 2014
Sumco Corporation
Kazushige Takaishi
B24 - GRINDING POLISHING
Information
Patent Grant
Method for manufacturing epitaxial wafer
Patent number
8,759,229
Issue date
Jun 24, 2014
Sumco Corporation
Sakae Koyata
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method for producing epitaxial silicon wafer
Patent number
8,728,942
Issue date
May 20, 2014
Sumico Corporation
Shinichi Ogata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching single wafer
Patent number
8,466,071
Issue date
Jun 18, 2013
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of polishing silicon wafer
Patent number
8,147,295
Issue date
Apr 3, 2012
Sumco Corporation
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Epitaxial silicon wafer and production method thereof
Patent number
8,080,106
Issue date
Dec 20, 2011
SUMCO Corporation
Takayuki Kihara
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for etching wafer by single-wafer process and single wafe...
Patent number
8,066,896
Issue date
Nov 29, 2011
Sumco Corporation
Sakae Koyata
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for manufacturing epitaxial wafer
Patent number
7,998,867
Issue date
Aug 16, 2011
Sumco Corporation
Kazushige Takaishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for smoothing wafer surface and apparatus used therefor
Patent number
7,955,982
Issue date
Jun 7, 2011
Sumco Corporation
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning silicon wafer and apparatus for cleaning the si...
Patent number
7,955,440
Issue date
Jun 7, 2011
Sumco Corporation
Shigeru Okuuchi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Single wafer etching method
Patent number
7,906,438
Issue date
Mar 15, 2011
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alkaline etchant for controlling surface roughness of semiconductor...
Patent number
7,851,375
Issue date
Dec 14, 2010
Sumco Corporation
Sakae Koyata
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Wafer polishing apparatus and method for polishing wafers
Patent number
7,717,768
Issue date
May 18, 2010
Sumco Corporation
Tomohiro Hashii
B24 - GRINDING POLISHING
Information
Patent Grant
Process for producing silicon wafer
Patent number
7,648,890
Issue date
Jan 19, 2010
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of silicon wafer
Patent number
7,645,702
Issue date
Jan 12, 2010
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing silicon wafer
Patent number
7,601,642
Issue date
Oct 13, 2009
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing silicon wafers
Patent number
7,601,644
Issue date
Oct 13, 2009
Sumco Corporation
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for etching wafer by single-wafer process
Patent number
7,488,400
Issue date
Feb 10, 2009
Sumco Corporation
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a silicon wafer
Patent number
7,456,106
Issue date
Nov 25, 2008
Sumitomo Mitsubishi Silicon Corporation
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Grant
Method for manufacturing single-side mirror surface wafer
Patent number
7,338,904
Issue date
Mar 4, 2008
Sumco Corporation
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Grant
Method for producing a silicon wafer
Patent number
7,226,864
Issue date
Jun 5, 2007
Sumitomo Mitsubishi Silicon Corporation
Sakae Koyata
B24 - GRINDING POLISHING
Information
Patent Grant
Washing solution of semiconductor substrate and washing method usin...
Patent number
6,296,714
Issue date
Oct 2, 2001
Mitsubishi Materials Silicon Corporation
Chizuko Matsuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment method for semiconductor substrates
Patent number
6,146,467
Issue date
Nov 14, 2000
Mitsubishi Materials Silicon Corporation
Kazushige Takaishi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF DOUBLE-SIDE POLISHING WORK, METHOD OF PRODUCING WORK, AND...
Publication number
20230201993
Publication date
Jun 29, 2023
SUMCO CORPORATION
Kazushige TAKAISHI
B24 - GRINDING POLISHING
Information
Patent Application
WAFER POLISHING METHOD
Publication number
20130017763
Publication date
Jan 17, 2013
Kazushige Takaishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING EPITAXIAL SILICON WAFER
Publication number
20120156878
Publication date
Jun 21, 2012
SUMCO CORPORATION
Shinichi Ogata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EPITAXIAL SILICON WAFER AND PRODUCTION METHOD THEREOF
Publication number
20120056307
Publication date
Mar 8, 2012
SUMCO CORPORATION
Takayuki Kihara
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR MANUFACTURING EPITAXIAL WAFER
Publication number
20100261341
Publication date
Oct 14, 2010
SUMCO CORPORATION
Kazushige Takaishi
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD FOR CLEANING SILICON WAFER AND APPARATUS FOR CLEANING THE SI...
Publication number
20100252070
Publication date
Oct 7, 2010
SUMCO CORPORATION
Shigeru Okuuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EPITAXIAL WAFER
Publication number
20100237470
Publication date
Sep 23, 2010
SUMCO CORPORATION
Kazushige Takaishi
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD FOR SMOOTHING WAFER SURFACE AND APPARATUS USED THEREFOR
Publication number
20100151597
Publication date
Jun 17, 2010
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EPITAXIAL SILICON WAFER AND PRODUCTION METHOD THEREOF
Publication number
20100032806
Publication date
Feb 11, 2010
Sumco Corporation
Takayuki Kihara
B24 - GRINDING POLISHING
Information
Patent Application
WAFER MANUFACTURING METHOD AND WAFER OBTAINED THROUGH THE METHOD
Publication number
20100021688
Publication date
Jan 28, 2010
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PRODUCING SEMICONDUCTOR WAFER
Publication number
20100006982
Publication date
Jan 14, 2010
SUMCO CORPORATION
Tomohiro Hashii
B24 - GRINDING POLISHING
Information
Patent Application
SEMICONDUCTOR WAFER AND PRODUCTION METHOD THEREOF
Publication number
20100009155
Publication date
Jan 14, 2010
SUMCO CORPORATION
Tomohiro Hashii
B24 - GRINDING POLISHING
Information
Patent Application
SEMICONDUCTOR WAFER
Publication number
20090311460
Publication date
Dec 17, 2009
SUMCO CORPORATION
Tomohiro HASHII
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD FOR HOLDING SILICON WAFER
Publication number
20090304490
Publication date
Dec 10, 2009
Takayuki Kihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EPITAXIAL SILICON WAFER AND METHOD FOR PRODUCING THE SAME
Publication number
20090304975
Publication date
Dec 10, 2009
SUMCO CORPORATION
Seiji SUGIMOTO
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD OF GRINDING SEMICONDUCTOR WAFERS AND DEVICE FOR GRINDING BOT...
Publication number
20090298397
Publication date
Dec 3, 2009
SUMCO CORPORATION
Yasunori YAMADA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF POLISHING SILICON WAFER
Publication number
20090298394
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON WAFER
Publication number
20090294910
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo KATOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR THIN FILM-ATTACHED SUBSTRATE AND PRODUCTION METHOD TH...
Publication number
20090297867
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo KATOH
B32 - LAYERED PRODUCTS
Information
Patent Application
SEMICONDUCTOR WAFER
Publication number
20090294918
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo KATOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON WAFER
Publication number
20090297426
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo KATOH
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER
Publication number
20090293919
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY FOR WIRE SAW
Publication number
20090211167
Publication date
Aug 27, 2009
SUMCO CORPORATION
Satoshi MATAGAWA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SINGLE WAFER ETCHING APPARATUS
Publication number
20090186488
Publication date
Jul 23, 2009
KATOH Takeo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single-Wafer Etching Method for Wafer and Etching Apparatus Thereof
Publication number
20090181546
Publication date
Jul 16, 2009
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching Method of Single Wafer
Publication number
20090117749
Publication date
May 7, 2009
SUMCO CORPORATION
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Epitaxial Wafer
Publication number
20090053894
Publication date
Feb 26, 2009
Sakae Koyata
C30 - CRYSTAL GROWTH
Information
Patent Application
ETCHANT FOR SILICON WAFER SURFACE SHAPE CONTROL AND METHOD FOR MANU...
Publication number
20090042390
Publication date
Feb 12, 2009
Sakae Koyata
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Method for Etching Single Wafer
Publication number
20090004876
Publication date
Jan 1, 2009
Sakae Koyata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SILICON WAFER
Publication number
20080214094
Publication date
Sep 4, 2008
Takeo KATOH
B24 - GRINDING POLISHING