Takami SATOH

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus
- Patent number 10,714,365
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Tetsurou Iriyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,573,539
- Issue date Feb 25, 2020
- Tokyo Electron Limited
- Hiroshi Komiya
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,483,137
- Issue date Nov 19, 2019
- Tokyo Electron Limited
- Hiroyuki Masutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow-rate regulator device, diluted chemical-liquid supply device,...
- Patent number 10,276,408
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Michitaka Amiya
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and liquid mixing method
- Patent number 10,067,514
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,887,092
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 9,881,799
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Hideaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution processing apparatus, solution processing method, and non-...
- Patent number 9,631,963
- Issue date Apr 25, 2017
- Tokyo Electron Limited
- Ryoji Ando
- G01 - MEASURING TESTING
Information Patent Grant
Solution processing apparatus, solution processing method, and non-...
- Patent number 9,109,934
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Ryoji Ando
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Plug-in unit including a breaker and an electric device
- Patent number 8,054,612
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Kenji Ichinomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,887,604
- Issue date Mar 30, 1999
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Method for washing objects
- Patent number 5,782,990
- Issue date Jul 21, 1998
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Hydrophobic treatment method involving delivery of a liquid process...
- Patent number 5,681,614
- Issue date Oct 28, 1997
- Tokyo Electron Limited
- Tsutae Omori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,671,764
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Method for scrubbing and cleaning substrate
- Patent number 5,518,552
- Issue date May 21, 1996
- Tokyo Electron Limited
- Kouichi Tanoue
- G02 - OPTICS
Information Patent Grant
Heat treatment device
- Patent number 5,514,852
- Issue date May 7, 1996
- Tokyo Electron Limited
- Hideyuki Takamori
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Hydrophobic processing apparatus including a liquid delivery system
- Patent number 5,505,781
- Issue date Apr 9, 1996
- Tokyo Electron Limited
- Tsutae Omori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,488,964
- Issue date Feb 6, 1996
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Device and method for scrubbing and cleaning substrate
- Patent number 5,345,639
- Issue date Sep 13, 1994
- Tokyo Electron Limited
- Kouichi Tanoue
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SOLUTION SUPPLY APPARATUS AND SOLUTION SUPPLY METHOD
- Publication number 20200290080
- Publication date Sep 17, 2020
- Tokyo Electron Limited
- Ryouichirou NAITOU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180358240
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Hiroshi Komiya
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20180330974
- Publication date Nov 15, 2018
- Tokyo Electron Limited
- Tetsurou Iriyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20180025927
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Hiroyuki Masutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160233106
- Publication date Aug 11, 2016
- TOKYO ELECTRON LIMITED
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20160225683
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Hideaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW-RATE REGULATOR DEVICE, DILUTED CHEMICAL-LIQUID SUPPLY DEVICE,...
- Publication number 20150380280
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Michitaka AMIYA
- B08 - CLEANING
Information Patent Application
SOLUTION PROCESSING APPARATUS, SOLUTION PROCESSING METHOD, AND NON-...
- Publication number 20150300853
- Publication date Oct 22, 2015
- TOKYO ELECTRON LIMITED
- Ryoji ANDO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD
- Publication number 20150146498
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESS LIQUID FLOWMETER
- Publication number 20130345996
- Publication date Dec 26, 2013
- HORIBA ADVANCED TECHNO, CO., LTD.
- Takami Satoh
- G01 - MEASURING TESTING
Information Patent Application
SOLUTION PROCESSING APPARATUS, SOLUTION PROCESSING METHOD, AND NON-...
- Publication number 20130283929
- Publication date Oct 31, 2013
- TOKYO ELECTRON LIMITED
- Ryoji ANDO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLUG-IN UNIT
- Publication number 20100128417
- Publication date May 27, 2010
- TOKYO ELECTRON LIMITED
- Kenji Ichinomiya
- H01 - BASIC ELECTRIC ELEMENTS

Takami SATOH

Person

Patents Grantslast 30 patents

Liquid processing apparatus

Substrate liquid processing apparatus

Substrate liquid processing apparatus, substrate liquid processing...

Flow-rate regulator device, diluted chemical-liquid supply device,...

Substrate processing apparatus and liquid mixing method

Etching method, etching apparatus, and storage medium

Substrate liquid processing apparatus, substrate liquid processing...

Solution processing apparatus, solution processing method, and non-...

Solution processing apparatus, solution processing method, and non-...

Plug-in unit including a breaker and an electric device

Washing apparatus, and washing method

Method for washing objects

Hydrophobic treatment method involving delivery of a liquid process...

Washing apparatus, and washing method

Method for scrubbing and cleaning substrate

Heat treatment device

Hydrophobic processing apparatus including a liquid delivery system

Washing apparatus, and washing method

Device and method for scrubbing and cleaning substrate

Patents Applicationslast 30 patents

SOLUTION SUPPLY APPARATUS AND SOLUTION SUPPLY METHOD

SUBSTRATE LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

FLOW-RATE REGULATOR DEVICE, DILUTED CHEMICAL-LIQUID SUPPLY DEVICE,...

SOLUTION PROCESSING APPARATUS, SOLUTION PROCESSING METHOD, AND NON-...

SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD

PROCESS LIQUID FLOWMETER

SOLUTION PROCESSING APPARATUS, SOLUTION PROCESSING METHOD, AND NON-...

PLUG-IN UNIT