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Takamitsu Takayama
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of cleaning stage in plasma processing apparatus, and the pl...
Patent number
12,090,529
Issue date
Sep 17, 2024
Tokyo Electron Limited
Takamitsu Takayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning stage in plasma processing apparatus, and the pl...
Patent number
11,865,591
Issue date
Jan 9, 2024
Tokyo Electron Limited
Takamitsu Takayama
B08 - CLEANING
Information
Patent Grant
Plasma processing method
Patent number
10,192,719
Issue date
Jan 29, 2019
Tokyo Electron Limited
Takamitsu Takayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
9,330,891
Issue date
May 3, 2016
Tokyo Electron Limited
Ryo Nonaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ti-based film forming method and storage medium
Patent number
8,263,181
Issue date
Sep 11, 2012
Tokyo Electron Limited
Kensaku Narushima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240347325
Publication date
Oct 17, 2024
TOKYO ELECTRON LIMITED
Yuki ONODERA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD AND PLASMA PROCESSING METHOD
Publication number
20240087858
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Junichi SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CLEANING STAGE IN PLASMA PROCESSING APPARATUS, AND THE PL...
Publication number
20230173558
Publication date
Jun 8, 2023
TOKYO ELECTRON LIMITED
Takamitsu TAKAYAMA
B08 - CLEANING
Information
Patent Application
METHOD OF CLEANING STAGE IN PLASMA PROCESSING APPARATUS, AND THE PL...
Publication number
20210162468
Publication date
Jun 3, 2021
TOKYO ELECTRON LIMITED
Takamitsu TAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20170004984
Publication date
Jan 5, 2017
TOKYO ELECTRON LIMITED
Hiroshi NAGAIKE
B08 - CLEANING
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20160196957
Publication date
Jul 7, 2016
TOKYO ELECTRON LIMITED
Takamitsu TAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20150114930
Publication date
Apr 30, 2015
TOKYO ELECTRON LIMITED
Ryo NONAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Ti-BASED FILM FORMING METHOD AND STORAGE MEDIUM
Publication number
20090208650
Publication date
Aug 20, 2009
TOKYO ELECTRON LIMITED
Kensaku NARUSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...