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Takanori Mimura

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Patents Grantslast 30 patents

  • Information Patent Grant

    Processing method
    • Patent number 10,665,431
    • Issue date May 26, 2020
    • Tokyo Electron Limited
    • Kazuyuki Tezuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Chamber cleaning method
    • Patent number 8,999,068
    • Issue date Apr 7, 2015
    • Tokyo Electron Limited
    • Masanobu Honda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etching method and computer-readable storage medium
    • Patent number 7,405,162
    • Issue date Jul 29, 2008
    • Tokyo Electron Limited
    • Koji Maruyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method
    • Patent number 7,344,652
    • Issue date Mar 18, 2008
    • Tokyo Electron Limited
    • Kazuya Nagaseki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching method
    • Patent number 7,141,178
    • Issue date Nov 28, 2006
    • Tokyo Electron Limited
    • Kazuya Nagaseki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Silicon etching method
    • Patent number 7,109,123
    • Issue date Sep 19, 2006
    • Tokyo Electron Limited
    • Takanori Mimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    High speed silicon etching method
    • Patent number 7,022,616
    • Issue date Apr 4, 2006
    • Tokyo Electron Limited
    • Takanori Mimura
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PROCESSING METHOD
    • Publication number 20180294145
    • Publication date Oct 11, 2018
    • TOKYO ELECTRON LIMITED
    • Kazuyuki Tezuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING APPARATUS
    • Publication number 20120132367
    • Publication date May 31, 2012
    • TOKYO ELECTRON LIMITED
    • Kazuyuki Tezuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD THEREOF AND STORAGE...
    • Publication number 20110114113
    • Publication date May 19, 2011
    • TOKYO ELECTRON LIMITED
    • Masanobu Honda
    • B08 - CLEANING
  • Information Patent Application

    CHAMBER CLEANING METHOD
    • Publication number 20110048453
    • Publication date Mar 3, 2011
    • TOKYO ELECTRON LIMITED
    • Masanobu Honda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma etching method
    • Publication number 20060255447
    • Publication date Nov 16, 2006
    • TOKYO ELECTRON LIMITED
    • Kazuya Nagaseki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching method and computer-readable storage medium
    • Publication number 20060063385
    • Publication date Mar 23, 2006
    • TOKYO ELECTRON LIMITED
    • Koji Maruyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma etching method
    • Publication number 20050082255
    • Publication date Apr 21, 2005
    • Kazuya Nagaseki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    High speed silicon etching method
    • Publication number 20040097079
    • Publication date May 20, 2004
    • Takanori Mimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Silicon etching method
    • Publication number 20040097090
    • Publication date May 20, 2004
    • Takanori Mimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film forming method
    • Publication number 20030205192
    • Publication date Nov 6, 2003
    • TOKYO ELECTRON LIMITED
    • Yasushi Aiba
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...