Takao Kumihashi

Person

Mitaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for dry etching
- Patent number 7,071,114
- Issue date Jul 4, 2006
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 6,599,830
- Issue date Jul 29, 2003
- Hitachi, Ltd.
- Takeshi Furusawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dry etching
- Patent number 6,562,722
- Issue date May 13, 2003
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for manufacturing semiconductor integrated circuit device
- Patent number 6,497,992
- Issue date Dec 24, 2002
- Hitachi, Ltd.
- Takashi Yunogami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 6,479,380
- Issue date Nov 12, 2002
- Hitachi, Ltd.
- Takeshi Furusawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dry etching
- Patent number 6,333,273
- Issue date Dec 25, 2001
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dry etching
- Patent number 6,136,721
- Issue date Oct 24, 2000
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for manufacturing semiconductor integrated circuit device
- Patent number 6,057,081
- Issue date May 2, 2000
- Hitachi, Ltd.
- Takashi Yunogami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dry etching
- Patent number 6,008,133
- Issue date Dec 28, 1999
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dry etching
- Patent number 5,795,832
- Issue date Aug 18, 1998
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for dry etching
- Patent number 5,650,038
- Issue date Jul 22, 1997
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dry etching
- Patent number 5,474,650
- Issue date Dec 12, 1995
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry-etching method and apparatus
- Patent number 5,409,562
- Issue date Apr 25, 1995
- Hitachi, Ltd.
- Takao Kumihashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dry etching apparatus and method
- Patent number 5,368,685
- Issue date Nov 29, 1994
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for dry etching
- Patent number 5,354,418
- Issue date Oct 11, 1994
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dry etching
- Patent number 5,318,667
- Issue date Jun 7, 1994
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 5,242,539
- Issue date Sep 7, 1993
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for dry etching
- Publication number 20050074977
- Publication date Apr 7, 2005
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and manufacturing method thereof
- Publication number 20020164865
- Publication date Nov 7, 2002
- Hitachi, Ltd.
- Takeshi Furusawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for dry etching
- Publication number 20020098708
- Publication date Jul 25, 2002
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and manufacturing method thereof
- Publication number 20010046783
- Publication date Nov 29, 2001
- Takeshi Furusawa
- H01 - BASIC ELECTRIC ELEMENTS

Takao Kumihashi

Person

Patents Grantslast 30 patents

Method and apparatus for dry etching

Semiconductor device and manufacturing method thereof

Method and apparatus for dry etching

Process for manufacturing semiconductor integrated circuit device

Semiconductor device and manufacturing method thereof

Method and apparatus for dry etching

Method and apparatus for dry etching

Process for manufacturing semiconductor integrated circuit device

Method and apparatus for dry etching

Method and apparatus for dry etching

Method for dry etching

Method and apparatus for dry etching

Dry-etching method and apparatus

Dry etching apparatus and method

Method for dry etching

Method and apparatus for dry etching

Plasma treatment method and apparatus

Patents Applicationslast 30 patents

Method and apparatus for dry etching

Semiconductor device and manufacturing method thereof

Method and apparatus for dry etching

Semiconductor device and manufacturing method thereof