Takashi Hayakawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing a contact pad, method for manufacturing a...
- Patent number 11,171,050
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Koichi Yatsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Information processing apparatus, control method, and program
- Patent number 11,113,562
- Issue date Sep 7, 2021
- NEC SOLUTION INNOVATORS, LTD.
- Hideo Iiduka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of fabricating semiconductor device, vacuum processing appar...
- Patent number 11,056,349
- Issue date Jul 6, 2021
- Tokyo Electron Limited
- Koichi Yatsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device, vacuum processing appar...
- Patent number 10,593,556
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Koichi Yatsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,325,780
- Issue date Jun 18, 2019
- Tokyo Electron Limited
- Koichi Yatsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,449,844
- Issue date Sep 20, 2016
- Tokyo Electron Limited
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,951,908
- Issue date Feb 10, 2015
- Tokyo Electron Limited
- Kenichi Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method, semiconductor device manufacturing method a...
- Patent number 8,283,253
- Issue date Oct 9, 2012
- Tokyo Electron Limited
- Hidetami Yaegashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photosensitive resin composition and photosensitive film
- Patent number 8,187,788
- Issue date May 29, 2012
- Asahi Kasei Kabushiki Kaisha
- Kuon Miyazaki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of letting a sufficient quantity of light pass through each...
- Patent number 7,542,107
- Issue date Jun 2, 2009
- Miyakawa Corporation
- Takashi Hayakawa
- G02 - OPTICS
Information Patent Grant
Optical element with light extracting dots and display device using...
- Patent number 7,108,415
- Issue date Sep 19, 2006
- Miyakawa Corporation
- Takashi Hayakawa
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD
- Publication number 20240087916
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFAC...
- Publication number 20230223251
- Publication date Jul 13, 2023
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD
- Publication number 20220403509
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFORMATION PROCESSING APPARATUS, CONTROL METHOD, AND PROGRAM
- Publication number 20200257928
- Publication date Aug 13, 2020
- NEC Solution Innovators, Ltd.
- Hideo IIDUKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of Fabricating Semiconductor Device, Vacuum Processing Appar...
- Publication number 20200152475
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Koichi YATSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A CONTACT PAD, METHOD FOR MANUFACTURING A...
- Publication number 20200035553
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Koichi YATSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180158693
- Publication date Jun 7, 2018
- TOKYO ELECTRON LIMITED
- Koichi Yatsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE, VACUUM PROCESSING APPAR...
- Publication number 20180025917
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Koichi YATSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150194441
- Publication date Jul 9, 2015
- TOKYO ELECTRON LIMITED
- Koichi YATSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140206187
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Kenichi HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130217225
- Publication date Aug 22, 2013
- TOKYO ELECTRON LIMITED
- Takashi Hayakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20130203260
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20130075248
- Publication date Mar 28, 2013
- Hyogo Prefecture
- Kenichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
- Publication number 20120305183
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Hidetami Yaegashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD A...
- Publication number 20090209105
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Hidetami Yaegashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Photosensitive Resin Composition and Photosensitive Film
- Publication number 20090191385
- Publication date Jul 30, 2009
- ASAHI KASEI KABUSHIKI KAISHA
- Kuon Miyazaki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method of letting a sufficient quantity of light pass through each...
- Publication number 20070013830
- Publication date Jan 18, 2007
- MIYAKAWA CORPORATION
- Takashi Hayakawa
- G02 - OPTICS
Information Patent Application
Optical element with light extracting dots and display device using...
- Publication number 20050190575
- Publication date Sep 1, 2005
- MIYAKAWA CORPORATION
- Takashi Hayakawa
- G02 - OPTICS
Information Patent Application
Light emitting panel assemblies
- Publication number 20050185421
- Publication date Aug 25, 2005
- MIYAKAWA CORPORATION
- Takashi Hayakawa
- G02 - OPTICS
Information Patent Application
Plasma processing system
- Publication number 20020038691
- Publication date Apr 4, 2002
- TOKYO ELECTRON LIMITED
- Takashi Hayakawa
- H01 - BASIC ELECTRIC ELEMENTS

Takashi Hayakawa

Person

Patents Grantslast 30 patents

Method for manufacturing a contact pad, method for manufacturing a...

Information processing apparatus, control method, and program

Method of fabricating semiconductor device, vacuum processing appar...

Method of fabricating semiconductor device, vacuum processing appar...

Method of manufacturing semiconductor device

Etching method, etching apparatus, and storage medium

Method for manufacturing semiconductor device

Pattern forming method, semiconductor device manufacturing method a...

Photosensitive resin composition and photosensitive film

Method of letting a sufficient quantity of light pass through each...

Optical element with light extracting dots and display device using...

Patents Applicationslast 30 patents

VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFAC...

VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD

INFORMATION PROCESSING APPARATUS, CONTROL METHOD, AND PROGRAM

Method of Fabricating Semiconductor Device, Vacuum Processing Appar...

METHOD FOR MANUFACTURING A CONTACT PAD, METHOD FOR MANUFACTURING A...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF FABRICATING SEMICONDUCTOR DEVICE, VACUUM PROCESSING APPAR...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM

SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS

PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD A...

Photosensitive Resin Composition and Photosensitive Film

Method of letting a sufficient quantity of light pass through each...

Optical element with light extracting dots and display device using...

Light emitting panel assemblies

Plasma processing system