Takashi Inujima

Person

  • Hase, Atsugi-Shi, Kanagawa-Ken, 243, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Microwave enhanced CVD method and apparatus

    • Publication number 20050196549
    • Publication date Sep 8, 2005
    • Semiconductor Energy Laboratory Co., Ltd.
    • Takashi Inujima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus and method

    • Publication number 20050106331
    • Publication date May 19, 2005
    • Semiconductor Energy Laboratory Co., Ltd.
    • Naoki Hirose
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus and method

    • Publication number 20030021910
    • Publication date Jan 30, 2003
    • Semiconductor Energy Laboratory Co., Ltd.
    • Naoki Hirose
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...