Takashi SAMESHIMA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Tungsten film-forming method, film-forming system and storage medium
- Patent number 11,802,334
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Takashi Sameshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming system
- Patent number 11,401,609
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Koji Maekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and substrate processing system
- Patent number 11,171,004
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Takashi Sameshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming film
- Patent number 11,028,479
- Issue date Jun 8, 2021
- Tokyo Electron Limited
- Katsumasa Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten film-forming method, film-forming system and storage medium
- Patent number 10,954,593
- Issue date Mar 23, 2021
- Tokyo Electron Limited
- Takashi Sameshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming tungsten film
- Patent number 10,886,170
- Issue date Jan 5, 2021
- Tokyo Electron Limited
- Koji Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tungsten film forming method, film forming system and film forming...
- Patent number 10,784,110
- Issue date Sep 22, 2020
- Tokyo Electron Limited
- Takashi Sameshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a tungsten film having a low resistance
- Patent number 10,612,139
- Issue date Apr 7, 2020
- Tokyo Electron Limited
- Koji Maekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
- Publication number 20240003002
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
- Publication number 20210164095
- Publication date Jun 3, 2021
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS
- Publication number 20210115560
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20200095683
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method and Substrate Processing System
- Publication number 20200098573
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING SYSTEM
- Publication number 20200071829
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Koji MAEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
- Publication number 20190256972
- Publication date Aug 22, 2019
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN FILM FORMING METHOD, FILM FORMING SYSTEM AND FILM FORMING...
- Publication number 20190221434
- Publication date Jul 18, 2019
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FILM AND METHOD OF CALCULATING FILM FORMATION CON...
- Publication number 20190161862
- Publication date May 30, 2019
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING TUNGSTEN FILM
- Publication number 20180315649
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Koji Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNGSTEN FILM FORMING METHOD
- Publication number 20180312972
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Koji MAEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takashi SAMESHIMA

Person

Patents Grantslast 30 patents

Tungsten film-forming method, film-forming system and storage medium

Film forming method and film forming system

Film forming method and substrate processing system

Method of forming film

Tungsten film-forming method, film-forming system and storage medium

Method of forming tungsten film

Tungsten film forming method, film forming system and film forming...

Method of forming a tungsten film having a low resistance

Patents Applicationslast 30 patents

Tungsten Film-Forming Method, Film-Forming System and Storage Medium

Tungsten Film-Forming Method, Film-Forming System and Storage Medium

FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

Film Forming Method and Substrate Processing System

FILM FORMING METHOD AND FILM FORMING SYSTEM

Tungsten Film-Forming Method, Film-Forming System and Storage Medium

TUNGSTEN FILM FORMING METHOD, FILM FORMING SYSTEM AND FILM FORMING...

METHOD OF FORMING FILM AND METHOD OF CALCULATING FILM FORMATION CON...

METHOD OF FORMING TUNGSTEN FILM

TUNGSTEN FILM FORMING METHOD