Takashi Yamazaki

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Katsuta, JP

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Patents Grantslast 30 patents

Information Patent Grant
Transfer apparatus
- Patent number 5,658,115
- Issue date Aug 19, 1997
- Hitachi, Ltd.
- Takashi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing machine for electron beam lithography system
- Patent number D352910
- Issue date Nov 29, 1994
- Hitachi, Ltd.
- Takashi Yamamoto
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Charged particle beam lithography system and method therefor
- Patent number 5,311,026
- Issue date May 10, 1994
- Hitachi, Ltd.
- Norio Saitou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus for transporting a wafer and a carrier used for the same
- Patent number 5,092,729
- Issue date Mar 3, 1992
- Hitachi, Ltd.
- Takashi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS