Takaya Matsushita

Person

Yokkaichi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device producing method
- Patent number 8,513,134
- Issue date Aug 20, 2013
- Kabushiki Kaisha Toshiba
- Mitsuhiro Omura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the semiconductor...
- Patent number 7,943,459
- Issue date May 17, 2011
- Kabushiki Kaisha Toshiba
- Kazutaka Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 7,232,763
- Issue date Jun 19, 2007
- Kabushiki Kaisha Toshiba
- Mitsuhiro Omura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 6,627,557
- Issue date Sep 30, 2003
- Kabushiki Kaisha Toshiba
- Shoji Seta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucking device
- Patent number 5,851,641
- Issue date Dec 22, 1998
- Tomoegawa Paper Co., Ltd.
- Tadao Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucking device
- Patent number 5,645,921
- Issue date Jul 8, 1997
- Tomoegawa Paper Co., Ltd.
- Tadao Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method
- Patent number 5,595,627
- Issue date Jan 21, 1997
- Tokyo Electron Limited
- Koichiro Inazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,356,515
- Issue date Oct 18, 1994
- Tokyo Electron Limited
- Yoshifumi Tahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,310,454
- Issue date May 10, 1994
- Kabushiki Kaisha Toshiba
- Tokuhisa Ohiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 5,271,788
- Issue date Dec 21, 1993
- Tokyo Electron Limited
- Makoto Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WORDLINE SIDEWALL CONTACTS IN 3D NAND STRUCTURES
- Publication number 20240046966
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Hsiang Yu Lee
- G11 - INFORMATION STORAGE
Information Patent Application
SEMICONDUCTOR DEVICE PRODUCING METHOD
- Publication number 20120021605
- Publication date Jan 26, 2012
- Mitsuhiro OMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20110168205
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Shigeru TAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUCT...
- Publication number 20110147942
- Publication date Jun 23, 2011
- Kabushiki Kaisha Toshiba
- Katsunori YAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of manufacturing the semiconductor...
- Publication number 20080054395
- Publication date Mar 6, 2008
- Kazutaka Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20050106866
- Publication date May 19, 2005
- Mitsuhiro Omura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method for manufacturing the same
- Publication number 20010029105
- Publication date Oct 11, 2001
- Kabushiki Kaisha Toshiba
- Shoji Seta
- H01 - BASIC ELECTRIC ELEMENTS

Takaya Matsushita

Person

Patents Grantslast 30 patents

Semiconductor device producing method

Semiconductor device and method of manufacturing the semiconductor...

Method of manufacturing semiconductor device

Semiconductor device and method for manufacturing the same

Electrostatic chucking device

Electrostatic chucking device

Plasma etching method

Dry etching method

Dry etching method

Plasma processing apparatus

Patents Applicationslast 30 patents

WORDLINE SIDEWALL CONTACTS IN 3D NAND STRUCTURES

SEMICONDUCTOR DEVICE PRODUCING METHOD

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUCT...

Semiconductor device and method of manufacturing the semiconductor...

Method of manufacturing semiconductor device

Semiconductor device and method for manufacturing the same