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RESIST COMPOSITION AND PATTERN FORMING PROCESS
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Shin-Etsu Chemical Co., Ltd.
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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RESIST COMPOSITION AND PATTERN FORMING PROCESS
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Publication number 20240337938
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Publication date Oct 10, 2024
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Shin-Etsu Chemical Co., Ltd.
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Jun Hatakeyama
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RESIST COMPOSITION AND PATTERN FORMING PROCESS
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Publication number 20240192591
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Publication date Jun 13, 2024
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Shin-Etsu Chemical Co., Ltd.
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Jun Hatakeyama
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RESIST COMPOSITION AND PATTERN FORMING PROCESS
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Publication number 20210232048
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Publication date Jul 29, 2021
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Shin-Etsu Chemical Co., Ltd.
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Jun Hatakeyama
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RESIST COMPOSITION AND PATTERNING PROCESS
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Publication number 20210200083
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Publication date Jul 1, 2021
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Shin-Etsu Chemical Co., Ltd.
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Teppei ADACHI
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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RESIST COMPOSITION AND PATTERNING PROCESS
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Publication number 20210149300
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Publication date May 20, 2021
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Shin-Etsu Chemical Co., Ltd.
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Jun Hatakeyama
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RESIST COMPOSITION AND PATTERNING PROCESS
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Publication number 20210033970
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Publication date Feb 4, 2021
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Shin-Etsu Chemical Co., Ltd.
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Jun Hatakeyama
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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RESIST COMPOSITION AND PATTERNING PROCESS
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Publication number 20200301275
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Publication date Sep 24, 2020
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Shin-Etsu Chemical Co., Ltd.
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Ryosuke TANIGUCHI
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