Takayuki Tomoeda

Person

Kumamoto-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus and processing method
- Patent number 5,965,200
- Issue date Oct 12, 1999
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,887,604
- Issue date Mar 30, 1999
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Processing apparatus and processing method
- Patent number 5,871,584
- Issue date Feb 16, 1999
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for washing objects
- Patent number 5,782,990
- Issue date Jul 21, 1998
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Resist processing method and apparatus
- Patent number 5,779,796
- Issue date Jul 14, 1998
- Tokyo Electron Limited
- Takayuki Tomoeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing method and apparatus
- Patent number 5,759,614
- Issue date Jun 2, 1998
- Tokyo Electron Limited
- Takayuki Tomoeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,671,764
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Resist processing method and apparatus
- Patent number 5,626,913
- Issue date May 6, 1997
- Tokyo Electron Limited
- Takayuki Tomoeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for scrubbing and cleaning substrate
- Patent number 5,518,552
- Issue date May 21, 1996
- Tokyo Electron Limited
- Kouichi Tanoue
- G02 - OPTICS
Information Patent Grant
Washing apparatus, and washing method
- Patent number 5,488,964
- Issue date Feb 6, 1996
- Tokyo Electron Limited
- Shinya Murakami
- B08 - CLEANING
Information Patent Grant
Device and method for scrubbing and cleaning substrate
- Patent number 5,345,639
- Issue date Sep 13, 1994
- Tokyo Electron Limited
- Kouichi Tanoue
- G02 - OPTICS

Takayuki Tomoeda

Person

Patents Grantslast 30 patents

Processing apparatus and processing method

Washing apparatus, and washing method

Processing apparatus and processing method

Method for washing objects

Resist processing method and apparatus

Resist processing method and apparatus

Washing apparatus, and washing method

Resist processing method and apparatus

Method for scrubbing and cleaning substrate

Washing apparatus, and washing method

Device and method for scrubbing and cleaning substrate