Takayuki Toshima

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,551,931
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning composition, cleaning method, and method for manufacturing...
- Patent number 11,441,101
- Issue date Sep 13, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Isao Hirano
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Washing method, washing device, storage medium, and washing composi...
- Patent number 11,355,362
- Issue date Jun 7, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Isao Hirano
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,347,482
- Issue date Jul 9, 2019
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-pressure container, substrate processing apparatus, and method...
- Patent number 10,207,349
- Issue date Feb 19, 2019
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 10,199,240
- Issue date Feb 5, 2019
- TOSHIBA MEMORY CORPORATION
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Separation and regeneration apparatus and substrate processing appa...
- Patent number 10,115,609
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and storage medium
- Patent number 10,096,462
- Issue date Oct 9, 2018
- TOSHIBA MEMORY CORPORATION
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, fluid...
- Patent number 10,046,370
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 9,881,784
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating apparatus, plating method and storage medium having plating...
- Patent number 9,731,322
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method, fluid...
- Patent number 9,662,685
- Issue date May 30, 2017
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING
Information Patent Grant
Supercritical drying method for semiconductor substrate and supercr...
- Patent number 9,583,330
- Issue date Feb 28, 2017
- Tokyo Electron Limited
- Linan Ji
- F26 - DRYING
Information Patent Grant
Plating apparatus, plating method and storage medium
- Patent number 9,421,569
- Issue date Aug 23, 2016
- Tokyo Electron Limited
- Takashi Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 9,236,280
- Issue date Jan 12, 2016
- Tokyo Electron Limited
- Takayuki Toshima
- B08 - CLEANING
Information Patent Grant
Supercritical processing apparatus, substrate processing system and...
- Patent number 9,076,643
- Issue date Jul 7, 2015
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supercritical drying method for semiconductor substrate and supercr...
- Patent number 8,771,429
- Issue date Jul 8, 2014
- Kabushiki Kaisha Toshiba
- Linan Ji
- F26 - DRYING
Information Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
- Patent number 8,770,138
- Issue date Jul 8, 2014
- Tokyo Electron Limited
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid heater, manufacturing method thereof, substrate processing ap...
- Patent number 8,701,308
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Liquid treatment method and storage system
- Patent number 8,652,344
- Issue date Feb 18, 2014
- Tokyo Electron Limited
- Kotaro Tsurusaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,617,656
- Issue date Dec 31, 2013
- Tokyo Electron Limited
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supercritical processing apparatus and supercritical processing method
- Patent number 8,465,596
- Issue date Jun 18, 2013
- Tokyo Electron Limited
- Takayuki Toshima
- B08 - CLEANING
Information Patent Grant
Substrate carrying apparatus having circumferential sidewall and su...
- Patent number 8,434,423
- Issue date May 7, 2013
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supercritical drying method and apparatus for semiconductor substrates
- Patent number 8,372,212
- Issue date Feb 12, 2013
- Kabushiki Kaisha Toshiba
- Yohei Sato
- F26 - DRYING
Information Patent Grant
Substrate processing method and non-transitory storage medium for c...
- Patent number 8,303,724
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,235,061
- Issue date Aug 7, 2012
- Tokyo Electron Limited
- Takayuki Toshima
- B08 - CLEANING
Information Patent Grant
Cap metal forming method
- Patent number 8,206,785
- Issue date Jun 26, 2012
- Tokyo Electron Limited
- Takayuki Toshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including a drying mechanism using a...
- Patent number 8,015,984
- Issue date Sep 13, 2011
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
- Patent number 8,003,509
- Issue date Aug 23, 2011
- Tokyo Electron Limited
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 7,998,306
- Issue date Aug 16, 2011
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING COMPOSITION, CLEANING METHOD, AND METHOD FOR MANUFACTURING...
- Publication number 20210284930
- Publication date Sep 16, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Isao HIRANO
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20210217620
- Publication date Jul 15, 2021
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WASHING METHOD, WASHING DEVICE, STORAGE MEDIUM, AND WASHING COMPOSI...
- Publication number 20200098593
- Publication date Mar 26, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Isao HIRANO
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20190279861
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180040468
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Takayuki Toshima
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...
- Publication number 20170320107
- Publication date Nov 9, 2017
- TOKYO ELECTRON LIMITED
- Gentaro GOSHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20160118242
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- B08 - CLEANING
Information Patent Application
SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...
- Publication number 20150258466
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...
- Publication number 20150258465
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...
- Publication number 20150258584
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND TEMPLATE
- Publication number 20140311530
- Publication date Oct 23, 2014
- TOKYO ELECTRON LIMITED
- Haruo Iwatsu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM HAVING PLATING...
- Publication number 20140302242
- Publication date Oct 9, 2014
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...
- Publication number 20140250714
- Publication date Sep 11, 2014
- Kabushiki Kaisha Toshiba
- Linan JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-PRESSURE CONTAINER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...
- Publication number 20140145390
- Publication date May 29, 2014
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...
- Publication number 20140020721
- Publication date Jan 23, 2014
- Hidekazu HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...
- Publication number 20130333726
- Publication date Dec 19, 2013
- Gentaro GOSHI
- B08 - CLEANING
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM
- Publication number 20130302525
- Publication date Nov 14, 2013
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...
- Publication number 20130019905
- Publication date Jan 24, 2013
- Linan JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20120304485
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20120247516
- Publication date Oct 4, 2012
- Yohei SATO
- F26 - DRYING
Information Patent Application
Substrate Liquid Processing Apparatus, Substrate Liquid Processing...
- Publication number 20120164339
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Mitsunori NAKAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, and St...
- Publication number 20120132230
- Publication date May 31, 2012
- TOKYO ELECTRON LIMITED
- Takayuki Toshima
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR C...
- Publication number 20110290280
- Publication date Dec 1, 2011
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...
- Publication number 20110265718
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPERCRITICAL PROCESSING APPARATUS AND SUPERCRITICAL PROCESSING METHOD
- Publication number 20110214694
- Publication date Sep 8, 2011
- TOKYO ELECTRON LIMITED
- Takayuki TOSHIMA
- B08 - CLEANING
Information Patent Application
FLUID HEATER, MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING AP...
- Publication number 20110099838
- Publication date May 5, 2011
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, RECORDING...
- Publication number 20110011425
- Publication date Jan 20, 2011
- TOKYO ELECTRON LIMITED
- Takayuki TOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110000512
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Takayuki TOSHIMA
- B08 - CLEANING
Information Patent Application
SUPERCRITICAL PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND...
- Publication number 20110000507
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Takayuki TOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20100330283
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Mitsunori NAKAMORI
- H01 - BASIC ELECTRIC ELEMENTS

Takayuki Toshima

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing method, and st...

Cleaning composition, cleaning method, and method for manufacturing...

Washing method, washing device, storage medium, and washing composi...

Substrate processing apparatus, substrate processing method, and st...

High-pressure container, substrate processing apparatus, and method...

Substrate processing method, substrate processing apparatus, and st...

Separation and regeneration apparatus and substrate processing appa...

Substrate processing method and storage medium

Substrate processing apparatus, substrate processing method, fluid...

Substrate processing method, substrate processing apparatus, and st...

Plating apparatus, plating method and storage medium having plating...

Substrate processing apparatus, substrate processing method, fluid...

Supercritical drying method for semiconductor substrate and supercr...

Plating apparatus, plating method and storage medium

Substrate processing apparatus, substrate processing method, and st...

Supercritical processing apparatus, substrate processing system and...

Supercritical drying method for semiconductor substrate and supercr...

Semiconductor manufacturing apparatus and semiconductor manufacturi...

Fluid heater, manufacturing method thereof, substrate processing ap...

Liquid treatment method and storage system

Liquid processing apparatus, liquid processing method, and storage...

Supercritical processing apparatus and supercritical processing method

Substrate carrying apparatus having circumferential sidewall and su...

Supercritical drying method and apparatus for semiconductor substrates

Substrate processing method and non-transitory storage medium for c...

Substrate processing apparatus and substrate processing method

Cap metal forming method

Substrate processing apparatus including a drying mechanism using a...

Semiconductor manufacturing apparatus and semiconductor manufacturi...

Substrate processing apparatus

Patents Applicationslast 30 patents

CLEANING COMPOSITION, CLEANING METHOD, AND METHOD FOR MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

WASHING METHOD, WASHING DEVICE, STORAGE MEDIUM, AND WASHING COMPOSI...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...

SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...

SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...

SUBSTRATE PROCESSING METHOD AND TEMPLATE

PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM HAVING PLATING...

SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...

HIGH-PRESSURE CONTAINER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...

PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM

SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES

Substrate Liquid Processing Apparatus, Substrate Liquid Processing...

Substrate Processing Apparatus, Substrate Processing Method, and St...

SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR C...

SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...

SUPERCRITICAL PROCESSING APPARATUS AND SUPERCRITICAL PROCESSING METHOD

FLUID HEATER, MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING AP...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, RECORDING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUPERCRITICAL PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...