Takayuki Yamagishi

Person

Kashiwazaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing module and processing method
- Patent number 12,183,603
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coupled processing containers, substrate processing system, and sub...
- Patent number 11,996,306
- Issue date May 28, 2024
- Tokyo Electron Limited
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus, vacuum processing system and vacuum pr...
- Patent number 10,867,819
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Takayuki Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-throughput semiconductor-processing apparatus equipped with mu...
- Patent number 10,707,106
- Issue date Jul 7, 2020
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual section module having shared and unshared mass flow controllers
- Patent number 10,364,496
- Issue date Jul 30, 2019
- ASM IP Holding B.V.
- Takayuki Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 9,885,112
- Issue date Feb 6, 2018
- ASM IP Holdings B.V.
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for positioning wafers in multiple wafer transport
- Patent number 9,793,148
- Issue date Oct 17, 2017
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-slip end-effector for transporting workpiece
- Patent number 9,370,863
- Issue date Jun 21, 2016
- ASM IP Holding B.V.
- Naoto Tsuji
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
High-throughput semiconductor-processing apparatus equipped with mu...
- Patent number 9,312,155
- Issue date Apr 12, 2016
- ASM Japan K.K.
- Yukihiro Mori
- G05 - CONTROLLING REGULATING
Information Patent Grant
Top plate
- Patent number D753269
- Issue date Apr 5, 2016
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Seal ring
- Patent number D743513
- Issue date Nov 17, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Shower plate
- Patent number D735836
- Issue date Aug 4, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Shower plate
- Patent number D733843
- Issue date Jul 7, 2015
- ASM IP Holding, B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Top plate
- Patent number D733261
- Issue date Jun 30, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Top plate
- Patent number D732644
- Issue date Jun 23, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Shower plate
- Patent number D732145
- Issue date Jun 16, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Heater block
- Patent number D726884
- Issue date Apr 14, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Heater block
- Patent number D725168
- Issue date Mar 24, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D15 - Machines not elsewhere specified
Information Patent Grant
Shower plate
- Patent number D724701
- Issue date Mar 17, 2015
- ASM IP Holding, B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Shower plate
- Patent number D720838
- Issue date Jan 6, 2015
- ASM IP Holding B.V.
- Takayuki Yamagishi
- D23 - Environmental heating and cooling
Information Patent Grant
Substrate-processing apparatus with buffer mechanism and substrate-...
- Patent number 7,690,881
- Issue date Apr 6, 2010
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus with lift pin structure
- Patent number 7,638,003
- Issue date Dec 29, 2009
- ASM Japan K.K.
- Kiyoshi Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment apparatus
- Patent number 7,520,244
- Issue date Apr 21, 2009
- ASM Japan K.K.
- Takayuki Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor-manufacturing apparatus equipped with cooling stage a...
- Patent number 7,467,916
- Issue date Dec 23, 2008
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor-processing apparatus provided with susceptor and plac...
- Patent number 7,276,123
- Issue date Oct 2, 2007
- ASM Japan K.K.
- Akira Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus comprising chamber partitioned i...
- Patent number 7,021,881
- Issue date Apr 4, 2006
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor-processing reaction chamber
- Patent number 6,955,741
- Issue date Oct 18, 2005
- ASM Japan K.K.
- Takayuki Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing equipment and maintenance method
- Patent number 6,945,746
- Issue date Sep 20, 2005
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus comprising chamber partitioned i...
- Patent number 6,899,507
- Issue date May 31, 2005
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor-manufacturing device having buffer mechanism and meth...
- Patent number 6,860,711
- Issue date Mar 1, 2005
- ASM Japan K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...
- Publication number 20250046645
- Publication date Feb 6, 2025
- Tokyo Electron Limited
- Tamihiro KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR PROCESSING SUBSTRATE AND MAINTENANCE METHOD THEREOF
- Publication number 20230178395
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Takayuki YAMAGISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONNECTED PROCESSING CONTAINER AND SUBSTRATE PROCESSING METHOD
- Publication number 20230154771
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Takayuki YAMAGISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING MODULE AND PROCESSING METHOD
- Publication number 20220216073
- Publication date Jul 7, 2022
- TOKYO ELECTRON LIMITED
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS MODULE, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD
- Publication number 20220213594
- Publication date Jul 7, 2022
- TOKYO ELECTRON LIMITED
- Takayuki YAMAGISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND FILM FORMING SYSTEM
- Publication number 20220148980
- Publication date May 12, 2022
- Tokyo Electron Limited
- Atsushi KUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COUPLED PROCESSING CONTAINERS, SUBSTRATE PROCESSING SYSTEM, AND SUB...
- Publication number 20210366736
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Takayuki YAMAGISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum Processing Apparatus, Vacuum Processing System and Vacuum Pr...
- Publication number 20190385873
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Takayuki YAMAGISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-THROUGHPUT SEMICONDUCTOR-PROCESSING APPARATUS EQUIPPED WITH MU...
- Publication number 20160181128
- Publication date Jun 23, 2016
- ASM IP HOLDING B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20160153088
- Publication date Jun 2, 2016
- ASM IP HOLDING B.V.
- Naoto TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-SLIP END-EFFECTOR FOR TRANSPORTING WORKPIECE
- Publication number 20150217456
- Publication date Aug 6, 2015
- ASM IP HOLDING B.V.
- Naoto Tsuji
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Method for Positioning Wafers in Multiple Wafer Transport
- Publication number 20120325148
- Publication date Dec 27, 2012
- ASM JAPAN K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual Section Module Having Shared and Unshared Mass Flow Controllers
- Publication number 20120328780
- Publication date Dec 27, 2012
- ASM JAPAN K.K.
- Takayuki Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-Throughput Semiconductor-Processing Apparatus Equipped with Mu...
- Publication number 20120305196
- Publication date Dec 6, 2012
- ASM JAPAN K.K.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple-Substrate Transfer Apparatus and Multiple-Substrate Proces...
- Publication number 20100147396
- Publication date Jun 17, 2010
- ASM JAPAN K.K.
- Takayuki Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANDEM TYPE SEMICONDUCTOR-PROCESSING APPARATUS
- Publication number 20090162170
- Publication date Jun 25, 2009
- ASM JAPAN K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate-processing apparatus with buffer mechanism and substrate-...
- Publication number 20080056854
- Publication date Mar 6, 2008
- ASM JAPAN K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing apparatus with lift pin structure
- Publication number 20070160507
- Publication date Jul 12, 2007
- ASM JAPAN K.K.
- Kiyoshi Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor-manufacturing apparatus equipped with cooling stage a...
- Publication number 20060204356
- Publication date Sep 14, 2006
- ASM JAPAN K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing apparatus comprising chamber partitioned i...
- Publication number 20050118001
- Publication date Jun 2, 2005
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor-processing apparatus provided with susceptor and plac...
- Publication number 20050022737
- Publication date Feb 3, 2005
- ASM JAPAN K.K.
- Akira Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma treatment apparatus
- Publication number 20040194709
- Publication date Oct 7, 2004
- ASM JAPAN K.K.
- Takayuki Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor-processing reaction chamber
- Publication number 20040026041
- Publication date Feb 12, 2004
- Takayuki Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor manufacturing equipment and maintenance method
- Publication number 20030168948
- Publication date Sep 11, 2003
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing apparatus comprising chamber partitioned i...
- Publication number 20030152445
- Publication date Aug 14, 2003
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor-manufacturing device having buffer mechanism and meth...
- Publication number 20030021657
- Publication date Jan 30, 2003
- ASM JAPAN K.K.
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas-line system for semiconductor-manufacturing apparatus
- Publication number 20020038669
- Publication date Apr 4, 2002
- Takayuki Yamagishi
- G05 - CONTROLLING REGULATING
Information Patent Application
Semiconductor processing module and apparatus
- Publication number 20020036065
- Publication date Mar 28, 2002
- Takayuki Yamagishi
- H01 - BASIC ELECTRIC ELEMENTS

Takayuki Yamagishi

Person

Patents Grantslast 30 patents

Processing module and processing method

Coupled processing containers, substrate processing system, and sub...

Vacuum processing apparatus, vacuum processing system and vacuum pr...

High-throughput semiconductor-processing apparatus equipped with mu...

Dual section module having shared and unshared mass flow controllers

Film forming apparatus

Method for positioning wafers in multiple wafer transport

Anti-slip end-effector for transporting workpiece

High-throughput semiconductor-processing apparatus equipped with mu...

Top plate

Seal ring

Shower plate

Shower plate

Top plate

Top plate

Shower plate

Heater block

Heater block

Shower plate

Shower plate

Substrate-processing apparatus with buffer mechanism and substrate-...

Semiconductor processing apparatus with lift pin structure

Plasma treatment apparatus

Semiconductor-manufacturing apparatus equipped with cooling stage a...

Semiconductor-processing apparatus provided with susceptor and plac...

Semiconductor processing apparatus comprising chamber partitioned i...

Semiconductor-processing reaction chamber

Semiconductor manufacturing equipment and maintenance method

Semiconductor processing apparatus comprising chamber partitioned i...

Semiconductor-manufacturing device having buffer mechanism and meth...

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...

SYSTEM FOR PROCESSING SUBSTRATE AND MAINTENANCE METHOD THEREOF

CONNECTED PROCESSING CONTAINER AND SUBSTRATE PROCESSING METHOD

PROCESSING MODULE AND PROCESSING METHOD

PROCESS MODULE, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD

FILM FORMING APPARATUS, FILM FORMING METHOD, AND FILM FORMING SYSTEM

COUPLED PROCESSING CONTAINERS, SUBSTRATE PROCESSING SYSTEM, AND SUB...

Vacuum Processing Apparatus, Vacuum Processing System and Vacuum Pr...

HIGH-THROUGHPUT SEMICONDUCTOR-PROCESSING APPARATUS EQUIPPED WITH MU...

FILM FORMING APPARATUS

ANTI-SLIP END-EFFECTOR FOR TRANSPORTING WORKPIECE

Method for Positioning Wafers in Multiple Wafer Transport

Dual Section Module Having Shared and Unshared Mass Flow Controllers

High-Throughput Semiconductor-Processing Apparatus Equipped with Mu...

Multiple-Substrate Transfer Apparatus and Multiple-Substrate Proces...

TANDEM TYPE SEMICONDUCTOR-PROCESSING APPARATUS

Substrate-processing apparatus with buffer mechanism and substrate-...

Semiconductor processing apparatus with lift pin structure

Semiconductor-manufacturing apparatus equipped with cooling stage a...

Semiconductor processing apparatus comprising chamber partitioned i...

Semiconductor-processing apparatus provided with susceptor and plac...

Plasma treatment apparatus

Semiconductor-processing reaction chamber

Semiconductor manufacturing equipment and maintenance method

Semiconductor processing apparatus comprising chamber partitioned i...

Semiconductor-manufacturing device having buffer mechanism and meth...

Gas-line system for semiconductor-manufacturing apparatus

Semiconductor processing module and apparatus