Takehide HAYASHI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for evaluating secondary optical system of electron beam ins...
- Patent number 11,251,017
- Issue date Feb 15, 2022
- Ebara Corporation
- Takehide Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Adjustment method and electron beam device
- Patent number 11,217,421
- Issue date Jan 4, 2022
- Ebara Corporation
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,728,374
- Issue date Aug 8, 2017
- Ebara Corporation
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,368,322
- Issue date Jun 14, 2016
- Ebara Corporation
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro-optical inspection apparatus and method with dust or partic...
- Patent number 9,105,444
- Issue date Aug 11, 2015
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro-optical inspection apparatus and method with dust or partic...
- Patent number 8,624,182
- Issue date Jan 7, 2014
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 8,497,476
- Issue date Jul 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ADJUSTMENT METHOD AND ELECTRON BEAM DEVICE
- Publication number 20210012997
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Takehide HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EVALUATING SECONDARY OPTICAL SYSTEM OF ELECTRON BEAM INS...
- Publication number 20200411279
- Publication date Dec 31, 2020
- EBARA CORPORATION
- Takehide HAYASHI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20160322192
- Publication date Nov 3, 2016
- EBARA CORPORATION
- Takehide HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20160307726
- Publication date Oct 20, 2016
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS
- Publication number 20150287570
- Publication date Oct 8, 2015
- EBARA CORPORATION
- Takehide HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...
- Publication number 20140091215
- Publication date Apr 3, 2014
- EBARA CORPORATION
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20120235036
- Publication date Sep 20, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...
- Publication number 20120074316
- Publication date Mar 29, 2012
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System for conveying and transferring semiconductor or liquid cryst...
- Publication number 20040234360
- Publication date Nov 25, 2004
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Takehide HAYASHI

Person

Patents Grantslast 30 patents

Method for evaluating secondary optical system of electron beam ins...

Adjustment method and electron beam device

Inspection device

Inspection apparatus

Inspection apparatus

Electro-optical inspection apparatus and method with dust or partic...

Electro-optical inspection apparatus and method with dust or partic...

Inspection device

Patents Applicationslast 30 patents

ADJUSTMENT METHOD AND ELECTRON BEAM DEVICE

METHOD FOR EVALUATING SECONDARY OPTICAL SYSTEM OF ELECTRON BEAM INS...

INSPECTION APPARATUS

INSPECTION DEVICE

INSPECTION APPARATUS

ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...

INSPECTION DEVICE

INSPECTION DEVICE

ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...

System for conveying and transferring semiconductor or liquid cryst...