Takehiko Nakahara

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Light transmission type vacuum separating window and soft X-ray tra...
- Patent number 5,317,618
- Issue date May 31, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Takehiko Nakahara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Thin film forming apparatus
- Patent number 5,305,366
- Issue date Apr 19, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Takehiko Nakahara
- G01 - MEASURING TESTING