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Takeshi Nogami
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Atsugi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing method and electropolishing apparatus
Patent number
7,255,784
Issue date
Aug 14, 2007
Sony Corporation
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Method for producing semiconductor device, polishing apparatus, and...
Patent number
7,232,760
Issue date
Jun 19, 2007
Sony Corporation
Takeshi Nogami
B24 - GRINDING POLISHING
Information
Patent Grant
Methods of producing and polishing semiconductor device and polishi...
Patent number
7,186,322
Issue date
Mar 6, 2007
Sony Corporation
Shuzo Sato
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Polishing method and electropolishing apparatus
Patent number
7,156,975
Issue date
Jan 2, 2007
Sony Corporation
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method, polishing apparatus, and method of manufacturing...
Patent number
7,141,501
Issue date
Nov 28, 2006
Sony Corporation
Hiroshi Horikoshi
B24 - GRINDING POLISHING
Information
Patent Grant
Method of producing a semiconductor device having copper wiring
Patent number
6,979,645
Issue date
Dec 27, 2005
Sony Corporation
Hiroshi Horikoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing metallic film
Patent number
6,911,396
Issue date
Jun 28, 2005
Sony Corporation
Shuzo Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having a conductive layer with a cobalt tungst...
Patent number
6,878,632
Issue date
Apr 12, 2005
Sony Corporation
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing method and polishing apparatus
Patent number
6,855,634
Issue date
Feb 15, 2005
Sony Corporation
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Electro-chemical machining appartus
Patent number
6,846,227
Issue date
Jan 25, 2005
Sony Corporation
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Electrochemical thin film polishing method and polishing apparatus
Patent number
6,835,292
Issue date
Dec 28, 2004
Sony Corporation
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor production device and production method for semicondu...
Patent number
6,809,029
Issue date
Oct 26, 2004
Sony Corporation
Takeshi Nogami
B24 - GRINDING POLISHING
Information
Patent Grant
Electrolytic polishing method
Patent number
6,808,617
Issue date
Oct 26, 2004
Sony Corporation
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Grant
Methods of producing and polishing semiconductor device and polishi...
Patent number
6,797,623
Issue date
Sep 28, 2004
Sony Corporation
Shuzo Sato
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of forming buried wiring
Patent number
6,777,321
Issue date
Aug 17, 2004
Sony Corporation
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrolytic polishing apparatus, electrolytic polishing method and...
Patent number
6,736,699
Issue date
May 18, 2004
Sony Corporation
Takeshi Nogami
B24 - GRINDING POLISHING
Information
Patent Grant
Self-aligned semiconductor interconnect barrier and manufacturing m...
Patent number
6,734,559
Issue date
May 11, 2004
Advanced Micro Devices, Inc.
Kai Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit chip with high-aspect ratio vias
Patent number
6,710,447
Issue date
Mar 23, 2004
Advanced Micro Devices, Inc.
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
6,709,979
Issue date
Mar 23, 2004
Sony Corporation
Naoki Komai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for producing semiconductor device polishing apparatus, and...
Patent number
6,693,036
Issue date
Feb 17, 2004
Sony Corporation
Takeshi Nogami
B24 - GRINDING POLISHING
Information
Patent Grant
Method for fabricating semiconductor devices
Patent number
6,602,787
Issue date
Aug 5, 2003
Sony Corporation
Naoki Komai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for reducing electromigration in semiconductor...
Patent number
6,563,222
Issue date
May 13, 2003
Advanced Micro Devices, Inc.
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of copper interconnect formation using atomic layer copper d...
Patent number
6,538,327
Issue date
Mar 25, 2003
Advanced Micro Devices, Inc.
Sergey D. Lopatin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming buried wiring, and apparatus for processing subst...
Patent number
6,524,429
Issue date
Feb 25, 2003
Sony Corporation
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for fabricating a semiconductor device
Patent number
6,479,384
Issue date
Nov 12, 2002
Sony Corporation
Naoki Komai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device comprising copper interconnects with reduced i...
Patent number
6,472,755
Issue date
Oct 29, 2002
Advanced Micro Devices, Inc.
Minh Van Ngo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Prevention of inter-channel current leakage in semiconductors
Patent number
6,465,345
Issue date
Oct 15, 2002
Advanced Micro Devices, Inc.
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device a burried wiring structure and process for fab...
Patent number
6,395,627
Issue date
May 28, 2002
Sony Corporation
Kazuhiro Hoshino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of copper interconnect formation using atomic layer copper d...
Patent number
6,368,954
Issue date
Apr 9, 2002
Advanced Micro Devices, Inc.
Sergey D. Lopatin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing electromigration in semiconductor interconnect...
Patent number
6,346,470
Issue date
Feb 12, 2002
Advanced Micro Devices, Inc.
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Polishing method, polishing apparatus, plating method, and plating...
Publication number
20070051632
Publication date
Mar 8, 2007
Sony Corporation
Shuzo Sato
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electropolishing liquid, electropolishing method, and method for fa...
Publication number
20070051638
Publication date
Mar 8, 2007
Sony Corporation
Shuzo Sato
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Polishing method, polishing apparatus, and method of manufacturing...
Publication number
20050239283
Publication date
Oct 27, 2005
Hiroshi Horikoshi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Polishing system and polishing method
Publication number
20050224368
Publication date
Oct 13, 2005
Shuzo Sato
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Polishing method, polishing device, and method of manufacturing sem...
Publication number
20050178672
Publication date
Aug 18, 2005
Shuzo Sato
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electropolishing apparatus, electropolishing method, and method of...
Publication number
20050121335
Publication date
Jun 9, 2005
SONY CORPORATION
Takeshi Nogami
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electro-chemical machining apparatus
Publication number
20050082165
Publication date
Apr 21, 2005
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Application
Method for producing semiconductor device, polishing apparatus, and...
Publication number
20050016960
Publication date
Jan 27, 2005
Takeshi Nogami
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor device manufacturing method
Publication number
20050014359
Publication date
Jan 20, 2005
Yuji Segawa
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of producing semiconductor device
Publication number
20050003654
Publication date
Jan 6, 2005
Hiroshi Horikoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polishing method polishing system and method for fabricating semico...
Publication number
20040259365
Publication date
Dec 23, 2004
Naoki Komai
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrolytic polishing apparatus, electrolytic polishing method, an...
Publication number
20040188273
Publication date
Sep 30, 2004
Takeshi Nogami
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electro-chemical machining apparatus
Publication number
20040188244
Publication date
Sep 30, 2004
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Application
Polishing method, polishing apparatus, plating method, and plating...
Publication number
20040182720
Publication date
Sep 23, 2004
Shuzo Sato
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor manufacturing apparatus and method for manufacturing...
Publication number
20040159553
Publication date
Aug 19, 2004
Takeshi Nogami
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic polishing liquid, electrolytic polishing method and me...
Publication number
20040159557
Publication date
Aug 19, 2004
Shuzo Sato
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Device and method for electroless plating
Publication number
20040137161
Publication date
Jul 15, 2004
Yuji Segawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Polishing method and electropolishing apparatus
Publication number
20040104128
Publication date
Jun 3, 2004
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Application
Method of producing metal film
Publication number
20040097070
Publication date
May 20, 2004
Shuzo Sato
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Polishing method and polishing apparatus
Publication number
20040092110
Publication date
May 13, 2004
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor device and production method therefor
Publication number
20030119317
Publication date
Jun 26, 2003
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor production device and production method for semicondu...
Publication number
20030113996
Publication date
Jun 19, 2003
Takeshi Nogami
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Methods of producing and polishing semiconductor device and polishi...
Publication number
20030114004
Publication date
Jun 19, 2003
Shuzo Sato
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Polishing method and electropolishing apparatus
Publication number
20030104762
Publication date
Jun 5, 2003
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Application
Method of forming buried wiring, and apparatus for processing subst...
Publication number
20030072888
Publication date
Apr 17, 2003
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electro-chemical machining apparatus
Publication number
20020160698
Publication date
Oct 31, 2002
Shuzo Sato
B24 - GRINDING POLISHING
Information
Patent Application
Electrolytic polishing apparatus, electrolytic polishing method and...
Publication number
20020090884
Publication date
Jul 11, 2002
Takeshi Nogami
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor device and manufacturing method thereof
Publication number
20020074664
Publication date
Jun 20, 2002
Takeshi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polishing method, polishing apparatus, plating method, and plating...
Publication number
20020070126
Publication date
Jun 13, 2002
Shuzo Sato
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Polishing method and polishing apparatus
Publication number
20020072309
Publication date
Jun 13, 2002
Shuzo Sato
B24 - GRINDING POLISHING