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Scanning electron microscope
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Patent number 9,040,911
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Issue date May 26, 2015
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Hitachi High-Technologies Corporation
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Takeshi Ogashiwa
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H01 - BASIC ELECTRIC ELEMENTS
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Electron microscope
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Patent number 8,853,647
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Issue date Oct 7, 2014
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Hitachi High-Technologies Corporation
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Takeshi Ogashiwa
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 8,455,823
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Issue date Jun 4, 2013
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Hitachi High-Technologies Corporation
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Takashi Ichimura
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam apparatus
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Patent number 8,124,940
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Issue date Feb 28, 2012
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Hitachi High-Technologies Corporation
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Kunji Shigeto
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H01 - BASIC ELECTRIC ELEMENTS
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