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Takeshi Ohfuji
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Post exposure modification of critical dimensions in mask fabrication
Patent number
7,045,259
Issue date
May 16, 2006
Intel Corporation
Takeshi Ohfuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Post exposure modification of critical dimensions in mask fabrication
Patent number
7,045,260
Issue date
May 16, 2006
Intel Corporation
Takeshi Ohfuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Post exposure modification of critical dimensions in mask fabrication
Patent number
6,801,295
Issue date
Oct 5, 2004
Intel Corporation
Hiroyuki Inomata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist, compounds for composing the photoresist, and method of...
Patent number
5,994,025
Issue date
Nov 30, 1999
NEC Corporation
Shigeyuki Iwasa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist and compounds for composing the photoresist
Patent number
5,985,522
Issue date
Nov 16, 1999
NEC Corporation
Shigeyuki Iwasa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Photoresist and compounds for composing the photoresist
Patent number
5,770,346
Issue date
Jun 23, 1998
NEC Corporation
Shigeyuki Iwasa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Photoresist and monomer and polymer for composing the photoresist
Patent number
5,665,518
Issue date
Sep 9, 1997
NEC Corporation
Katsumi Maeda
C07 - ORGANIC CHEMISTRY
Patents Applications
last 30 patents
Information
Patent Application
Post exposure modification of critical dimensions in mask fabrication
Publication number
20040197713
Publication date
Oct 7, 2004
Takeshi Ohfuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Post exposure modification of critical dimensions in mask fabrication
Publication number
20030059688
Publication date
Mar 27, 2003
Hiroyuki Inomata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Post exposure modification of critical dimensions in mask fabrication
Publication number
20030059719
Publication date
Mar 27, 2003
Takeshi Ohfuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY