Takeshi Ohse

Person

Sendai City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,388,544
- Issue date Aug 20, 2019
- Kabushiki Kaisha Toshiba
- Akio Ui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connection control method
- Patent number 10,032,611
- Issue date Jul 24, 2018
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 9,564,287
- Issue date Feb 7, 2017
- Tokyo Electron Limited
- Takeshi Ohse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and shower head
- Patent number 8,852,387
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Hachishiro Iizuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate plasma processing apparatus and plasma processing method
- Patent number 8,821,684
- Issue date Sep 2, 2014
- Kabushiki Kaisha Toshiba
- Akio Ui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, plasma processing method and storage m...
- Patent number 8,703,002
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Tatsuo Matsudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 8,568,606
- Issue date Oct 29, 2013
- Tokyo Electron Limited
- Takeshi Ohse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High frequency power source and its control method, and plasma proc...
- Patent number 8,286,581
- Issue date Oct 16, 2012
- Tokyo Electron Limited
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONNECTION CONTROL METHOD
- Publication number 20170110296
- Publication date Apr 20, 2017
- TOKYO ELECTRON LIMITED
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20150162223
- Publication date Jun 11, 2015
- Kabushiki Kaisha Toshiba
- Akio UI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20140020832
- Publication date Jan 23, 2014
- TOKYO ELECTRON LIMITED
- Takeshi OHSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20130122714
- Publication date May 16, 2013
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20120247677
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SHOWER HEAD
- Publication number 20110214814
- Publication date Sep 8, 2011
- TOKYO ELECTRON LIMITED
- Hachishiro Iizuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20100243607
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Takeshi Ohse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100072172
- Publication date Mar 25, 2010
- Akio Ui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20090194508
- Publication date Aug 6, 2009
- Akio UI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...
- Publication number 20090047795
- Publication date Feb 19, 2009
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High frequency power source and its control method, and plasma proc...
- Publication number 20040222184
- Publication date Nov 11, 2004
- TOKYO ELECTRON LIMITED
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS

Takeshi Ohse

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Connection control method

Substrate processing apparatus and substrate processing method usin...

Plasma processing apparatus and shower head

Substrate plasma processing apparatus and plasma processing method

Plasma processing apparatus, plasma processing method and storage m...

Substrate processing apparatus and substrate processing method usin...

High frequency power source and its control method, and plasma proc...

Patents Applicationslast 30 patents

CONNECTION CONTROL METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...

SUBSTRATE PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND SHOWER HEAD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND STORAGE M...

High frequency power source and its control method, and plasma proc...