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Takeshi Tsukamoto

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  • Kikuchi-gun, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method and apparatus for cleaning treatment
    • Patent number 6,770,149
    • Issue date Aug 3, 2004
    • Tokyo Electron Limited
    • Fumio Satou
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Method and apparatus for cleaning treatment
    • Patent number 6,398,879
    • Issue date Jun 4, 2002
    • Tokyo Electron Limited
    • Fumio Satou
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Method and apparatus for cleaning treatment
    • Patent number 6,391,110
    • Issue date May 21, 2002
    • Tokyo Electron Limited
    • Fumio Satou
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Method and apparatus for processing substrate
    • Patent number 6,238,511
    • Issue date May 29, 2001
    • Tokyo Electron Limited
    • Tetsuya Sada
    • B32 - LAYERED PRODUCTS
  • Information Patent Grant

    Method and apparatus for cleaning treatment
    • Patent number 6,159,288
    • Issue date Dec 12, 2000
    • Tokyo Electron Limited
    • Fumio Satou
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Processing apparatus
    • Patent number 5,993,552
    • Issue date Nov 30, 1999
    • Takeshi Tsukamoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents