Takumi OTA

Person

Yokohama-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Drop recipe creating method, database creating method and medium
- Patent number RE46901
- Issue date Jun 19, 2018
- TOSHIBA MEMORY CORPORATION
- Yasuo Matsuoka
Information Patent Grant
Pattern forming device and semiconductor device manufacturing method
- Patent number 9,437,414
- Issue date Sep 6, 2016
- Kabushiki Kaisha Toshiba
- Takumi Ota
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprinting apparatus, imprinting method, and manufacturing method o...
- Patent number 9,216,539
- Issue date Dec 22, 2015
- Kabushiki Kaisha Toshiba
- Takumi Ota
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Template treatment method
- Patent number 9,108,343
- Issue date Aug 18, 2015
- Kabushiki Kaisha Toshiba
- Takumi Ota
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint method, imprinting equipment, and method for manufacturing...
- Patent number 8,906,281
- Issue date Dec 9, 2014
- Kabushiki Kaisha Toshiba
- Masayuki Hatano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprinting apparatus, imprinting method, and manufacturing method o...
- Patent number 8,826,847
- Issue date Sep 9, 2014
- Kabushiki Kaisha Toshiba
- Takumi Ota
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Drop recipe creating method, database creating method and medium
- Patent number 8,560,977
- Issue date Oct 15, 2013
- Kabushiki Kaisha Toshiba
- Yasuo Matsuoka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for charged particle beam inspection
- Patent number 8,368,018
- Issue date Feb 5, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning method
- Patent number 8,221,827
- Issue date Jul 17, 2012
- Kabushiki Kaisha Toshiba
- Hiroshi Tokue
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for forming an imprint pattern
- Patent number 8,142,694
- Issue date Mar 27, 2012
- Kabushiki Kaisha Toshiba
- Hiroshi Tokue
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam drawing apparatus, deflection amplifier, deflection c...
- Patent number 7,985,958
- Issue date Jul 26, 2011
- Kabushiki Kaisha Toshiba
- Tetsuro Nakasugi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Character pattern extracting method, charged particle beam drawing...
- Patent number 7,889,910
- Issue date Feb 15, 2011
- Kabushiki Kaisha Toshiba
- Tetsuro Nakasugi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam lithography apparatus, lithography method, lithograph...
- Patent number 7,482,604
- Issue date Jan 27, 2009
- Kabushiki Kaisha Toshiba
- Tetsuro Nakasugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam exposure method of character projection syste...
- Patent number 7,459,705
- Issue date Dec 2, 2008
- Kabushiki Kaisha Toshiba
- Tetsuro Nakasugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and a program for correcting conditions for controll...
- Patent number 7,435,978
- Issue date Oct 14, 2008
- Kabushiki Kaisha Toshiba
- Tetsuro Nakasugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing equipment, method of adjusting apertu...
- Patent number 7,242,014
- Issue date Jul 10, 2007
- Kabushiki Kaisha Toshiba
- Takumi Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Correction system, method of correcting deflection distortion, prog...
- Patent number 7,202,488
- Issue date Apr 10, 2007
- Kabushiki Kaisha Toshiba
- Takumi Ota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND PATTERN FORMING METHOD
- Publication number 20170229300
- Publication date Aug 10, 2017
- Kabushiki Kaisha Toshiba
- Takumi OTA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MOLD CLEANING APPARATUS AND MOLD CLEANING METHOD
- Publication number 20150054188
- Publication date Feb 26, 2015
- Kabushiki Kaisha Toshiba
- Takumi OTA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINTING APPARATUS, IMPRINTING METHOD, AND MANUFACTURING METHOD O...
- Publication number 20140353863
- Publication date Dec 4, 2014
- Takumi OTA
- B82 - NANO-TECHNOLOGY
Information Patent Application
MOLD CLEANING APPARATUS AND MOLD CLEANING METHOD
- Publication number 20140070437
- Publication date Mar 13, 2014
- Kabushiki Kaisha Toshiba
- Takumi OTA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN FORMING DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20130221571
- Publication date Aug 29, 2013
- Kabushiki Kaisha Toshiba
- Takumi OTA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPLATE TREATMENT METHOD
- Publication number 20130127084
- Publication date May 23, 2013
- Kabushiki Kaisha Toshiba
- Takumi OTA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM INSPECTION
- Publication number 20130119251
- Publication date May 16, 2013
- Kabushiki Kaisha Toshiba
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPLATE CLEANING APPARATUS AND TEMPLATE CLEANING METHOD
- Publication number 20130064415
- Publication date Mar 14, 2013
- Takumi OTA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINT METHOD, IMPRINTING EQUIPMENT, AND METHOD FOR MANUFACTURING...
- Publication number 20120244719
- Publication date Sep 27, 2012
- Masayuki HATANO
- B82 - NANO-TECHNOLOGY
Information Patent Application
TEMPLATE SUBSTRATE PROCESSING APPARATUS AND TEMPLATE SUBSTRATE PROC...
- Publication number 20120222700
- Publication date Sep 6, 2012
- Takumi OTA
- B08 - CLEANING
Information Patent Application
IMPRINTING APPARATUS, IMPRINTING METHOD, AND MANUFACTURING METHOD O...
- Publication number 20120207931
- Publication date Aug 16, 2012
- Takumi OTA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
DROP RECIPE CREATING METHOD, DATABASE CREATING METHOD AND MEDIUM
- Publication number 20120131056
- Publication date May 24, 2012
- Yasuo MATSUOKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINTING METHOD, IMPRINTING APPARATUS AND MEDIUM
- Publication number 20120129279
- Publication date May 24, 2012
- Yasuo MATSUOKA
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT TEMPLATE AND PATTERN FORMING METHOD
- Publication number 20120013042
- Publication date Jan 19, 2012
- Takumi OTA
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN GENERATING METHOD AND PROCESS DETERMINING METHOD
- Publication number 20110143271
- Publication date Jun 16, 2011
- Takeshi KOSHIBA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR FORMING AN IMPRINT PATTERN
- Publication number 20100301508
- Publication date Dec 2, 2010
- Hiroshi TOKUE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN FORMATION METHOD AND COMPUTER PROGRAM PRODUCT
- Publication number 20100124601
- Publication date May 20, 2010
- Takumi OTA
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERNING METHOD
- Publication number 20100072647
- Publication date Mar 25, 2010
- Hiroshi TOKUE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD FOR FORMING PATTERN, AND TEMPLATE
- Publication number 20100022036
- Publication date Jan 28, 2010
- Ikuo YONEDA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM INSPECTION
- Publication number 20100019147
- Publication date Jan 28, 2010
- EBARA CORPORATION
- Masahiro Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPLATE AND PATTERN FORMING METHOD
- Publication number 20090315223
- Publication date Dec 24, 2009
- Ikuo Yoneda
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-BEAM EXPOSURE APPARATUS HAVING AN IMPROVED ALIGNMENT PRECIS...
- Publication number 20090206280
- Publication date Aug 20, 2009
- Takeshi KOSHIBA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Character pattern extracting method, charged particle beam drawing...
- Publication number 20070263921
- Publication date Nov 15, 2007
- Tetsuro Nakasugi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged particle beam exposure method of character projection syste...
- Publication number 20070114463
- Publication date May 24, 2007
- Tetsuro Nakasugi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam lithography apparatus, lithography method, lithograph...
- Publication number 20060289805
- Publication date Dec 28, 2006
- Tetsuro Nakasugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam drawing apparatus, deflection amplifier, deflection c...
- Publication number 20060151721
- Publication date Jul 13, 2006
- Tetsuro Nakasugi
- B82 - NANO-TECHNOLOGY
Information Patent Application
System, method and a program for correcting conditions for controll...
- Publication number 20060076508
- Publication date Apr 13, 2006
- Tetsuro Nakasugi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged particle beam drawing equipment, method of adjusting apertu...
- Publication number 20060017013
- Publication date Jan 26, 2006
- Takumi Ota
- B82 - NANO-TECHNOLOGY
Information Patent Application
Correction system, method of correcting deflection distortion, prog...
- Publication number 20050088099
- Publication date Apr 28, 2005
- Takumi Ota
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Drop recipe creating method, database creating method and medium

Pattern forming device and semiconductor device manufacturing method

Imprinting apparatus, imprinting method, and manufacturing method o...

Template treatment method

Imprint method, imprinting equipment, and method for manufacturing...

Imprinting apparatus, imprinting method, and manufacturing method o...

Drop recipe creating method, database creating method and medium

Method and apparatus for charged particle beam inspection

Patterning method

Method for forming an imprint pattern

Electron beam drawing apparatus, deflection amplifier, deflection c...

Character pattern extracting method, charged particle beam drawing...

Electron beam lithography apparatus, lithography method, lithograph...

Charged particle beam exposure method of character projection syste...

System, method and a program for correcting conditions for controll...

Charged particle beam drawing equipment, method of adjusting apertu...

Correction system, method of correcting deflection distortion, prog...

Patents Applicationslast 30 patents

IMPRINT APPARATUS, IMPRINT METHOD, AND PATTERN FORMING METHOD

MOLD CLEANING APPARATUS AND MOLD CLEANING METHOD

IMPRINTING APPARATUS, IMPRINTING METHOD, AND MANUFACTURING METHOD O...

MOLD CLEANING APPARATUS AND MOLD CLEANING METHOD

PATTERN FORMING DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

TEMPLATE TREATMENT METHOD

METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM INSPECTION

TEMPLATE CLEANING APPARATUS AND TEMPLATE CLEANING METHOD

IMPRINT METHOD, IMPRINTING EQUIPMENT, AND METHOD FOR MANUFACTURING...

TEMPLATE SUBSTRATE PROCESSING APPARATUS AND TEMPLATE SUBSTRATE PROC...

IMPRINTING APPARATUS, IMPRINTING METHOD, AND MANUFACTURING METHOD O...

DROP RECIPE CREATING METHOD, DATABASE CREATING METHOD AND MEDIUM

IMPRINTING METHOD, IMPRINTING APPARATUS AND MEDIUM

IMPRINT TEMPLATE AND PATTERN FORMING METHOD

PATTERN GENERATING METHOD AND PROCESS DETERMINING METHOD

METHOD FOR FORMING AN IMPRINT PATTERN

PATTERN FORMATION METHOD AND COMPUTER PROGRAM PRODUCT

PATTERNING METHOD

METHOD FOR FORMING PATTERN, AND TEMPLATE

METHOD AND APPARATUS FOR CHARGED PARTICLE BEAM INSPECTION

TEMPLATE AND PATTERN FORMING METHOD

CHARGED-BEAM EXPOSURE APPARATUS HAVING AN IMPROVED ALIGNMENT PRECIS...

Character pattern extracting method, charged particle beam drawing...

Charged particle beam exposure method of character projection syste...

Electron beam lithography apparatus, lithography method, lithograph...

Electron beam drawing apparatus, deflection amplifier, deflection c...

System, method and a program for correcting conditions for controll...

Charged particle beam drawing equipment, method of adjusting apertu...

Correction system, method of correcting deflection distortion, prog...