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Takumichi Sutani
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Image processor, method for generating pattern using self-organizin...
Patent number
10,732,512
Issue date
Aug 4, 2020
HITACHI HIGH-TECH CORPORATION
Takumichi Sutani
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for creating imaging recipe
Patent number
RE45224
Issue date
Oct 28, 2014
Hitachi High-Technologies Corporation
Atsushi Miyamoto
716 - Computer-aided design and analysis of circuits and semiconductor masks
Information
Patent Grant
Method and apparatus for creating imaging recipe
Patent number
RE45204
Issue date
Oct 21, 2014
Hitachi High-Technologies Corporation
Atsushi Miyamoto
716 - Computer-aided design and analysis of circuits and semiconductor masks
Information
Patent Grant
Method of OPC model building, information-processing apparatus, and...
Patent number
8,788,981
Issue date
Jul 22, 2014
Hitachi High-Technologies Corporation
Mihoko Kijima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus of pattern inspection and semiconductor inspec...
Patent number
8,577,124
Issue date
Nov 5, 2013
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern measuring method and pattern measuring device
Patent number
8,507,856
Issue date
Aug 13, 2013
Hitachi High-Technologies Corporation
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample dimension inspecting/measuring method and sample dimension i...
Patent number
8,338,804
Issue date
Dec 25, 2012
Hitachi High-Technologies Corporation
Hidetoshi Morokuma
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for inspecting defect of pattern formed on sem...
Patent number
8,331,651
Issue date
Dec 11, 2012
Hitachi High-Technologies Corporatiopn
Tomofumi Nishiura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern matching method and computer program for executing pattern...
Patent number
8,244,042
Issue date
Aug 14, 2012
Hitachi High-Technologies Corporation
Akiyuki Sugiyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron microscope for inspecting dimension and shape of a pattern...
Patent number
8,199,191
Issue date
Jun 12, 2012
Hitachi High-Technologies Corporation
Hidetoshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern displacement measuring method and pattern measuring device
Patent number
8,173,962
Issue date
May 8, 2012
Hitachi High-Technologies Corporation
Takumichi Sutani
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Defect inspection device and defect inspection method for inspectin...
Patent number
8,131,059
Issue date
Mar 6, 2012
Hitachi High-Technologies Corporation
Junichi Taguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus of pattern inspection and semiconductor inspec...
Patent number
8,115,169
Issue date
Feb 14, 2012
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for inspecting defect of pattern formed on sem...
Patent number
8,045,789
Issue date
Oct 25, 2011
Hitachi High-Technologies Corporaiton
Tomofumi Nishiura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method, device and computer program of length measurement
Patent number
8,019,161
Issue date
Sep 13, 2011
Hitachi High-Technologies Corporation
Hidetoshi Morokuma
G01 - MEASURING TESTING
Information
Patent Grant
Pattern matching apparatus and semiconductor inspection system usin...
Patent number
7,991,218
Issue date
Aug 2, 2011
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection apparatus and semiconductor inspection system
Patent number
7,978,904
Issue date
Jul 12, 2011
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Sample dimension inspecting/measuring method and sample dimension i...
Patent number
7,923,703
Issue date
Apr 12, 2011
Hitachi High-Technologies Corporation
Hidetoshi Morokuma
G01 - MEASURING TESTING
Information
Patent Grant
Pattern matching method and computer program for executing pattern...
Patent number
7,925,095
Issue date
Apr 12, 2011
Hitachi High-Technologies Corporation
Akiyuki Sugiyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern matching method and pattern matching program
Patent number
7,889,909
Issue date
Feb 15, 2011
Hitachi High-Technologies Corporation
Hiroyuki Shindo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern measurement method and pattern measurement system
Patent number
7,800,060
Issue date
Sep 21, 2010
Hitachi High-Technologies Corporation
Hidetoshi Sato
G01 - MEASURING TESTING
Information
Patent Grant
Pattern displacement measuring method and pattern measuring device
Patent number
7,679,055
Issue date
Mar 16, 2010
Hitachi High-Technologies Corporation
Takumichi Sutani
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for detecting defects in a semiconductor during m...
Patent number
7,681,159
Issue date
Mar 16, 2010
Hitachi High-Technologies Corporation
Ryoichi Matsuoka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for creating imaging recipe
Patent number
7,559,047
Issue date
Jul 7, 2009
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern measuring method and pattern measuring device
Patent number
7,518,110
Issue date
Apr 14, 2009
Hitachi High-Technologies Corporation
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus of pattern inspection and semiconductor inspec...
Patent number
7,507,961
Issue date
Mar 24, 2009
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Dimension measuring SEM system, method of evaluating shape of circu...
Patent number
7,449,689
Issue date
Nov 11, 2008
Hitachi High-Technologies Corporation
Wataru Nagatomo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for arranging recipe of scanning electron micr...
Patent number
7,365,322
Issue date
Apr 29, 2008
Hitachi, Ltd.
Atsushi Miyamoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Image Processor, Method for Generating Pattern Using Self-Organizin...
Publication number
20180181009
Publication date
Jun 28, 2018
Hitachi High-Technologies Corporation
Takumichi SUTANI
B82 - NANO-TECHNOLOGY
Information
Patent Application
IMAGE PROCESSOR, METHOD FOR GENERATING PATTERN USING SELF- ORGANIZI...
Publication number
20150277237
Publication date
Oct 1, 2015
Hitachi High-Technologies Corporation
Takumichi Sutani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE
Publication number
20120211653
Publication date
Aug 23, 2012
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPEC...
Publication number
20120099781
Publication date
Apr 26, 2012
Hitachi High-Technologies Corporation
Yasutaka TOYODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and Apparatus For Inspecting Defect Of Pattern Formed On Sem...
Publication number
20120002861
Publication date
Jan 5, 2012
Tomofumi NISHIURA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SAMPLE DIMENSION INSPECTING/MEASURING METHOD AND SAMPLE DIMENSION I...
Publication number
20110158543
Publication date
Jun 30, 2011
Hitachi High-Technologies Corporation
Hidetoshi Morokuma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN MATCHING METHOD AND COMPUTER PROGRAM FOR EXECUTING PATTERN...
Publication number
20110150345
Publication date
Jun 23, 2011
Hitachi High-Technologies Corporation
Akiyuki SUGIYAMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN DISPLACEMENT MEASURING METHOD AND PATTERN MEASURING DEVICE
Publication number
20100140472
Publication date
Jun 10, 2010
Hitachi High-Technologies Corporation
Takumichi SUTANI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
System and Method for Detecting a Defect
Publication number
20100138801
Publication date
Jun 3, 2010
Hitachi High-Technologies Corp.
Ryoichi MATSUOKA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SAMPLE DIMENSION INSPECTING/MEASURING METHOD AND SAMPLE DIMENSION I...
Publication number
20090218491
Publication date
Sep 3, 2009
Hidetoshi Morokuma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTING DEFECT OF PATTERN FORMED ON SEM...
Publication number
20090208090
Publication date
Aug 20, 2009
Tomofumi NISHIURA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE
Publication number
20090200465
Publication date
Aug 13, 2009
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPEC...
Publication number
20090152463
Publication date
Jun 18, 2009
Hitachi High-Technologies Corporation
Yasutaka TOYODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN MEASUREMENT METHOD AND PATTERN MEASUREMENT SYSTEM
Publication number
20090032707
Publication date
Feb 5, 2009
Hitachi High-Technologies Corporation
Hidetoshi SATO
G01 - MEASURING TESTING
Information
Patent Application
Defect inspection device and defect inspection method
Publication number
20080310702
Publication date
Dec 18, 2008
Junichi Taguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method of OPC Model Building, Information-Processing Apparatus, and...
Publication number
20080250380
Publication date
Oct 9, 2008
Hitachi High-Technologies Corporation
Mihoko Kijima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pattern displacement measuring method and pattern measuring device
Publication number
20080224035
Publication date
Sep 18, 2008
Takumichi Sutani
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern Inspection Apparatus and Semiconductor Inspection System
Publication number
20080175469
Publication date
Jul 24, 2008
Hitachi High-Technologies Corporation
Yasutaka TOYODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern matching method and computer program for executing pattern...
Publication number
20080037830
Publication date
Feb 14, 2008
Akiyuki Sugiyama
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Electron microscope
Publication number
20080024601
Publication date
Jan 31, 2008
Hidetoshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for detecting a defect
Publication number
20080016481
Publication date
Jan 17, 2008
Hitachi High-Technologies Corp.
Ryoichi Matsuoka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Workpiece size measurement method and apparatus
Publication number
20070221842
Publication date
Sep 27, 2007
Hidetoshi Morokuma
G01 - MEASURING TESTING
Information
Patent Application
Pattern matching method and pattern matching program
Publication number
20070223803
Publication date
Sep 27, 2007
Hitachi High-Technologies Corporation
Hiroyuki Shindo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Pattern matching apparatus and semiconductor inspection system usin...
Publication number
20070098248
Publication date
May 3, 2007
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus of pattern inspection and semiconductor inspec...
Publication number
20070023653
Publication date
Feb 1, 2007
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus for arranging recipe of scanning electron micr...
Publication number
20060284081
Publication date
Dec 21, 2006
Atsushi Miyamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for measuring dimension of a pattern formed on...
Publication number
20060288325
Publication date
Dec 21, 2006
Atsushi Miyamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pattern measuring method and pattern measuring device
Publication number
20060193508
Publication date
Aug 31, 2006
Takumichi Sutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dimension measuring SEM system, method of evaluating shape of circu...
Publication number
20060108524
Publication date
May 25, 2006
Wataru Nagatomo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY