Takuya Fukuda

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor integrated circuit device hav...
- Patent number 6,833,331
- Issue date Dec 21, 2004
- Hitachi Ltd.
- Masayoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic random access memory including a logic circuit and an impro...
- Patent number 6,700,152
- Issue date Mar 2, 2004
- Hitachi, Ltd.
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor integrated circuit device h...
- Patent number 6,638,811
- Issue date Oct 28, 2003
- Hitachi, Ltd.
- Masayoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device comprising capacitor cells, bit lines, word li...
- Patent number 6,576,946
- Issue date Jun 10, 2003
- Hitachi, Ltd.
- Misuzu Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor integrated circuit device hav...
- Patent number 6,509,277
- Issue date Jan 21, 2003
- Hitachi, Ltd.
- Masayoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit device and process for manufacturi...
- Patent number 6,479,899
- Issue date Nov 12, 2002
- Hitachi, Ltd.
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit device and process for manufacture...
- Patent number 6,432,769
- Issue date Aug 13, 2002
- Hitachi, Ltd.
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit device
- Patent number 6,423,992
- Issue date Jul 23, 2002
- Hitachi, Ltd.
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor integrated circuit device hav...
- Patent number 6,399,438
- Issue date Jun 4, 2002
- Hitachi, Ltd.
- Masayoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit device and method for fabricating...
- Patent number 6,303,478
- Issue date Oct 16, 2001
- Hiatchi, Ltd.
- Yoshitaka Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a shielding conductor
- Patent number 6,278,148
- Issue date Aug 21, 2001
- Hitachi, Ltd.
- Takao Watanabe
- G11 - INFORMATION STORAGE
Information Patent Grant
Semiconductor integrated circuit device and method of manufacturing...
- Patent number 6,258,649
- Issue date Jul 10, 2001
- Hitachi, Ltd.
- Yoshitaka Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit device and method of manufacturing...
- Patent number 6,255,151
- Issue date Jul 3, 2001
- Hitachi, Ltd.
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit device, and method of manufacturin...
- Patent number 6,215,144
- Issue date Apr 10, 2001
- Hitachi, Ltd.
- Masayoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit device having multi-level wiring c...
- Patent number 5,986,299
- Issue date Nov 16, 1999
- Hitachi, Ltd.
- Yoshitaka Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitor for semiconductor integrated circuit
- Patent number 5,745,336
- Issue date Apr 28, 1998
- Hitachi, Ltd.
- Katsuaki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a semi-insulating layer
- Patent number 5,552,625
- Issue date Sep 3, 1996
- Hitachi, Ltd.
- Susumu Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of processing substrates by...
- Patent number 5,496,410
- Issue date Mar 5, 1996
- Hitachi, Ltd.
- Takuya Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma processing apparatus
- Patent number 5,449,411
- Issue date Sep 12, 1995
- Hitachi, Ltd.
- Takuya Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitor for semiconductor integrated circuit and method of manufa...
- Patent number 5,434,742
- Issue date Jul 18, 1995
- Hitachi, Ltd.
- Katsuaki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for plasma treatment using electron cyclotron resonance
- Patent number 5,433,788
- Issue date Jul 18, 1995
- Hitachi, Ltd.
- Yasuhiro Mochizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, process for the production thereof and appara...
- Patent number 5,347,100
- Issue date Sep 13, 1994
- Hitachi, Ltd.
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing apparatus
- Patent number 5,243,259
- Issue date Sep 7, 1993
- Hitachi, Ltd.
- Junji Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and the method of the same
- Patent number 5,211,825
- Issue date May 18, 1993
- Hitachi, Ltd.
- Katsuaki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and apparatus using electron cyclotron res...
- Patent number 5,182,495
- Issue date Jan 26, 1993
- Hitachi, Ltd.
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave-excited plasma processing apparatus
- Patent number 5,162,633
- Issue date Nov 10, 1992
- Hitachi, Ltd.
- Tadasi Sonobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminar structure comprising organic material and inorganic material
- Patent number 5,084,355
- Issue date Jan 28, 1992
- Hitachi, Ltd.
- Shigeru Takahashi
- G11 - INFORMATION STORAGE
Information Patent Grant
Plasma operation apparatus
- Patent number 4,876,983
- Issue date Oct 31, 1989
- Hitachi, Ltd.
- Takuya Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor integrated circuit device and method of manufacturing...
- Publication number 20030132479
- Publication date Jul 17, 2003
- Yoshitaka Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing semiconductor integrated circuit device hav...
- Publication number 20030077896
- Publication date Apr 24, 2003
- Masayoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor integrated circuit device and process for manufacturi...
- Publication number 20020195641
- Publication date Dec 26, 2002
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor integrated circuit device, and method of manufacturin...
- Publication number 20020182798
- Publication date Dec 5, 2002
- Masayoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor integrated circuit device and method of manufacturing...
- Publication number 20010028082
- Publication date Oct 11, 2001
- Yoshitaka Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor integrated circuit device
- Publication number 20010022369
- Publication date Sep 20, 2001
- Takuya Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor integrated circuit device, and method of manufacturin...
- Publication number 20010023099
- Publication date Sep 20, 2001
- Masayoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS

Takuya Fukuda

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor integrated circuit device hav...

Dynamic random access memory including a logic circuit and an impro...

Method of manufacturing a semiconductor integrated circuit device h...

Semiconductor device comprising capacitor cells, bit lines, word li...

Method of manufacturing semiconductor integrated circuit device hav...

Semiconductor integrated circuit device and process for manufacturi...

Semiconductor integrated circuit device and process for manufacture...

Semiconductor integrated circuit device

Method of manufacturing semiconductor integrated circuit device hav...

Semiconductor integrated circuit device and method for fabricating...

Semiconductor device having a shielding conductor

Semiconductor integrated circuit device and method of manufacturing...

Semiconductor integrated circuit device and method of manufacturing...

Semiconductor integrated circuit device, and method of manufacturin...

Semiconductor integrated circuit device having multi-level wiring c...

Capacitor for semiconductor integrated circuit

Semiconductor device having a semi-insulating layer

Plasma processing apparatus and method of processing substrates by...

Microwave plasma processing apparatus

Capacitor for semiconductor integrated circuit and method of manufa...

Apparatus for plasma treatment using electron cyclotron resonance

Semiconductor device, process for the production thereof and appara...

Microwave plasma processing apparatus

Plasma processing apparatus and the method of the same

Plasma processing method and apparatus using electron cyclotron res...

Microwave-excited plasma processing apparatus

Laminar structure comprising organic material and inorganic material

Plasma operation apparatus

Patents Applicationslast 30 patents

Semiconductor integrated circuit device and method of manufacturing...

Method of manufacturing semiconductor integrated circuit device hav...

Semiconductor integrated circuit device and process for manufacturi...

Semiconductor integrated circuit device, and method of manufacturin...

Semiconductor integrated circuit device and method of manufacturing...

Semiconductor integrated circuit device

Semiconductor integrated circuit device, and method of manufacturin...