Takuya Joda

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,148,614
- Issue date Nov 19, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,087,598
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 12,000,045
- Issue date Jun 4, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and recording medium
- Patent number 11,168,396
- Issue date Nov 9, 2021
- Kokusai Electric Corporation
- Toru Kakuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and metal member
- Patent number 11,035,037
- Issue date Jun 15, 2021
- Kokusai Electric Corporation
- Tetsuaki Inada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 10,985,017
- Issue date Apr 20, 2021
- Kokusai Electric Corporation
- Katsuhiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 9,793,112
- Issue date Oct 17, 2017
- Hitachi Kokusai Electric Inc.
- Takuya Joda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,646,862
- Issue date May 9, 2017
- Hitachi Kokusai Electric, Inc.
- Katsuyoshi Hamano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, method...
- Patent number 9,502,239
- Issue date Nov 22, 2016
- Hitachi Kokusai Electric Inc.
- Masahisa Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for substrate processing apparatus
- Patent number D741823
- Issue date Oct 27, 2015
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022708
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...
- Publication number 20240279807
- Publication date Aug 22, 2024
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220093392
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Non-transitory Comput...
- Publication number 20210395891
- Publication date Dec 23, 2021
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
- Publication number 20200002816
- Publication date Jan 2, 2020
- Kokusai Electric Corporation
- Toru KAKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-Transitory Com...
- Publication number 20190304778
- Publication date Oct 3, 2019
- Kokusai Electric Corporation
- Katsuhiko YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METAL MEMBER
- Publication number 20190186000
- Publication date Jun 20, 2019
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizer and Substrate Processing Apparatus
- Publication number 20190003047
- Publication date Jan 3, 2019
- Kokusai Electric Corporation
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180204742
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Hideto TATENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...
- Publication number 20160203976
- Publication date Jul 14, 2016
- Hitachi Kokusai Electric Inc.
- Takuya JODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD...
- Publication number 20150262817
- Publication date Sep 17, 2015
- Hitachi Kokusai Electric Inc.
- Masahisa OKUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150147894
- Publication date May 28, 2015
- Hitachi Kokusai Electric Inc.
- Katsuyoshi HAMANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110217852
- Publication date Sep 8, 2011
- Hitachi Kokusai Electric Inc.
- Kenichi SUZAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Takuya Joda

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus

Method of manufacturing semiconductor device, non-transitory comput...

Method of manufacturing semiconductor device and recording medium

Substrate processing apparatus and metal member

Method of manufacturing semiconductor device and non-transitory com...

Method of manufacturing semiconductor device and non-transitory com...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing method, substrate processing apparatus, method...

Vaporizer for substrate processing apparatus

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device, Non-transitory Comput...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM

Method of Manufacturing Semiconductor Device and Non-Transitory Com...

SUBSTRATE PROCESSING APPARATUS AND METAL MEMBER

Vaporizer and Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...