Talex Sajoto

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck having reduced arcing
- Patent number 9,218,997
- Issue date Dec 22, 2015
- Applied Materials, Inc.
- Seok Yul Jun
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Universal mid-frequency matching network
- Patent number 7,094,313
- Issue date Aug 22, 2006
- Applied Materials, Inc.
- Eller Y. Juco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature ceramic heater assembly with RF capability
- Patent number 6,616,767
- Issue date Sep 9, 2003
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled gas feedthrough
- Patent number 6,527,865
- Issue date Mar 4, 2003
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support member for a processing chamber
- Patent number 6,464,795
- Issue date Oct 15, 2002
- Applied Materials, Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment of titanium nitride formed by chemical vapor depos...
- Patent number 6,270,859
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporization and deposition apparatus
- Patent number 6,258,170
- Issue date Jul 10, 2001
- Applied Materials, Inc.
- Sasson Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature, high flow rate chemical vapor deposition apparatu...
- Patent number 6,189,482
- Issue date Feb 20, 2001
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater for use in substrate processing apparatus to deposit tungsten
- Patent number 6,179,924
- Issue date Jan 30, 2001
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled process and chamber lid
- Patent number 6,165,271
- Issue date Dec 26, 2000
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for substrate processing with improved throughput and yield
- Patent number 6,129,044
- Issue date Oct 10, 2000
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas manifold
- Patent number 6,123,773
- Issue date Sep 26, 2000
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-aligning lift mechanism
- Patent number 6,120,609
- Issue date Sep 19, 2000
- Applied Materials, Inc.
- Leonid Selyutin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled chamber liner
- Patent number 6,099,651
- Issue date Aug 8, 2000
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporization apparatus and process
- Patent number 6,082,714
- Issue date Jul 4, 2000
- Applied Materials, Inc.
- Charles Dornfest
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing barium strontium titanate
- Patent number 6,077,562
- Issue date Jun 20, 2000
- Applied Materials, Inc.
- Charles Dornfest
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold trap
- Patent number 6,066,209
- Issue date May 23, 2000
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled liner
- Patent number 6,063,199
- Issue date May 16, 2000
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled gas feedthrough
- Patent number 6,056,823
- Issue date May 2, 2000
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature, high deposition rate process and apparatus for de...
- Patent number 6,051,286
- Issue date Apr 18, 2000
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature multi-layered alloy heater assembly and related me...
- Patent number 6,035,101
- Issue date Mar 7, 2000
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for ceramic pedestal and metal shaft assembly
- Patent number 5,994,678
- Issue date Nov 30, 1999
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for a cleaning process in a high temperature,...
- Patent number 5,983,906
- Issue date Nov 16, 1999
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature ceramic heater assembly with RF capability and rel...
- Patent number 5,968,379
- Issue date Oct 19, 1999
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Removable pumping channel liners within a chemical vapor deposition...
- Patent number 5,964,947
- Issue date Oct 12, 1999
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermally floating pedestal collar in a chemical vapor deposition c...
- Patent number 5,846,332
- Issue date Dec 8, 1998
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK HAVING REDUCED ARCING
- Publication number 20100109263
- Publication date May 6, 2010
- Seok Yul Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Universal mid-frquency matching network
- Publication number 20050235916
- Publication date Oct 27, 2005
- Applied Materials, Inc.
- Eller Y. Juco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE CERAMIC HEATER ASSEMBLY WITH RF CAPABILITY
- Publication number 20030051665
- Publication date Mar 20, 2003
- JUN ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Iridium and iridium oxide electrodes used in ferroelectric capacitors
- Publication number 20020075631
- Publication date Jun 20, 2002
- APPLIED MATERIALS, INC.
- Kaushal Kishore Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for depositing high dielectric constant materials...
- Publication number 20020015855
- Publication date Feb 7, 2002
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT OF TITANIUM NITRIDE FORMED BY CHEMICAL VAPOR DEPOS...
- Publication number 20010004478
- Publication date Jun 21, 2001
- JUN ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Talex Sajoto

Person

Patents Grantslast 30 patents

Electrostatic chuck having reduced arcing

Universal mid-frequency matching network

High temperature ceramic heater assembly with RF capability

Temperature controlled gas feedthrough

Substrate support member for a processing chamber

Plasma treatment of titanium nitride formed by chemical vapor depos...

Vaporization and deposition apparatus

High temperature, high flow rate chemical vapor deposition apparatu...

Heater for use in substrate processing apparatus to deposit tungsten

Temperature controlled process and chamber lid

Apparatus for substrate processing with improved throughput and yield

Gas manifold

Self-aligning lift mechanism

Temperature controlled chamber liner

Vaporization apparatus and process

Method for depositing barium strontium titanate

Cold trap

Temperature controlled liner

Temperature controlled gas feedthrough

High temperature, high deposition rate process and apparatus for de...

High temperature multi-layered alloy heater assembly and related me...

Apparatus for ceramic pedestal and metal shaft assembly

Methods and apparatus for a cleaning process in a high temperature,...

High temperature ceramic heater assembly with RF capability and rel...

Removable pumping channel liners within a chemical vapor deposition...

Thermally floating pedestal collar in a chemical vapor deposition c...

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK HAVING REDUCED ARCING

Universal mid-frquency matching network

HIGH TEMPERATURE CERAMIC HEATER ASSEMBLY WITH RF CAPABILITY

Iridium and iridium oxide electrodes used in ferroelectric capacitors

System and method for depositing high dielectric constant materials...

PLASMA TREATMENT OF TITANIUM NITRIDE FORMED BY CHEMICAL VAPOR DEPOS...