Tamio MATSUMURA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser processing apparatus, laser processing method, and method for...
- Patent number 11,389,898
- Issue date Jul 19, 2022
- Mitsubishi Electric Corporation
- Keigo Fukunaga
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate suction stage, substrate treatment apparatus, and substra...
- Patent number 10,882,141
- Issue date Jan 5, 2021
- Mitsubishi Electric Corporation
- Tamio Matsumura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 10,134,598
- Issue date Nov 20, 2018
- Mitsubishi Electric Corporation
- Kazunari Nakata
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor-element manufacturing method and wafer mounting devic...
- Patent number 9,659,808
- Issue date May 23, 2017
- Mitsubishi Electric Corporation
- Tamio Matsumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 8,987,122
- Issue date Mar 24, 2015
- Mitsubishi Electric Corporation
- Kazunari Nakata
- B24 - GRINDING POLISHING
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 8,183,144
- Issue date May 22, 2012
- Mitsubishi Electric Corporation
- Tamio Matsumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 8,097,533
- Issue date Jan 17, 2012
- Mitsubishi Electric Corporation
- Tamio Matsumura
Information Patent Grant
Plasma apparatus
- Patent number 5,679,204
- Issue date Oct 21, 1997
- Shikoku Instrumentation Co., Ltd.
- Masayuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LASER PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTO...
- Publication number 20240253158
- Publication date Aug 1, 2024
- Mitsubishi Electric Corporation
- Ryo KAMOSHIDA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Processing Apparatus, Laser Processing Method, and Method for...
- Publication number 20200061742
- Publication date Feb 27, 2020
- MITSUBISHI ELECTRIC CORPORATION
- Keigo FUKUNAGA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE SUCTION STAGE, SUBSTRATE TREATMENT APPARATUS, AND SUBSTRA...
- Publication number 20180304408
- Publication date Oct 25, 2018
- Mitsubishi Electric Corporation
- Tamio MATSUMURA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170200613
- Publication date Jul 13, 2017
- Mitsubishi Electric Corporation
- Kazunari NAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR-ELEMENT MANUFACTURING METHOD AND WAFER MOUNTING DEVICE
- Publication number 20160155656
- Publication date Jun 2, 2016
- Mitsubishi Electric Corporation
- Tamio MATSUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130052812
- Publication date Feb 28, 2013
- MITSUBISHI ELECTRIC CORPORATION
- Kazunari Nakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20070173045
- Publication date Jul 26, 2007
- MITSUBISHI ELECTRIC CORPORATION
- Tamio MATSUMURA
- H01 - BASIC ELECTRIC ELEMENTS

Tamio MATSUMURA

Person

Patents Grantslast 30 patents

Laser processing apparatus, laser processing method, and method for...

Substrate suction stage, substrate treatment apparatus, and substra...

Method for manufacturing semiconductor device

Semiconductor-element manufacturing method and wafer mounting devic...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Plasma apparatus

Patents Applicationslast 30 patents

LASER PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTO...

Laser Processing Apparatus, Laser Processing Method, and Method for...

SUBSTRATE SUCTION STAGE, SUBSTRATE TREATMENT APPARATUS, AND SUBSTRA...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR-ELEMENT MANUFACTURING METHOD AND WAFER MOUNTING DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE