Tatsuya Iwasaki

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Interlock apparatus for a transfer machine
- Patent number 6,336,054
- Issue date Jan 1, 2002
- Tokyo Electron Limited
- Yoshiharu Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveying unit and substrate processing unit
- Patent number 6,203,617
- Issue date Mar 20, 2001
- Tokyo Electron Limited
- Shinya Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveying device and substrate conveying method
- Patent number 6,193,807
- Issue date Feb 27, 2001
- Tokyo Electron Limited
- Kiyohisa Tateyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate treatment device and substrate transporting method
- Patent number 6,187,132
- Issue date Feb 13, 2001
- Tokyo Electron Ltd.
- Tatsuya Iwasaki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate transferring apparatus and substrate processing apparatus...
- Patent number 6,146,083
- Issue date Nov 14, 2000
- Tokyo Electron Limited
- Tatsuya Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring apparatus and substrate processing apparatus...
- Patent number 6,116,841
- Issue date Sep 12, 2000
- Tokyo Electron Limited
- Tatsuya Iwasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveying device and substrate conveying method
- Patent number 6,062,241
- Issue date May 16, 2000
- Tokyo Electron Limited
- Kiyohisa Tateyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Interlock apparatus for a transfer machine
- Patent number 5,963,449
- Issue date Oct 5, 1999
- Tokyo Electron Limited
- Yoshiharu Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist processing method and apparatus
- Patent number 5,853,803
- Issue date Dec 29, 1998
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing apparatus for a rectangular substrate
- Patent number 5,718,763
- Issue date Feb 17, 1998
- Tokyo Electron Limited
- Kiyohisa Tateyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for scrubbing and cleaning substrate
- Patent number 5,518,552
- Issue date May 21, 1996
- Tokyo Electron Limited
- Kouichi Tanoue
- G02 - OPTICS
Information Patent Grant
Device and method for scrubbing and cleaning substrate
- Patent number 5,345,639
- Issue date Sep 13, 1994
- Tokyo Electron Limited
- Kouichi Tanoue
- G02 - OPTICS

Tatsuya Iwasaki

Person

Patents Grantslast 30 patents

Interlock apparatus for a transfer machine

Conveying unit and substrate processing unit

Substrate conveying device and substrate conveying method

Substrate treatment device and substrate transporting method

Substrate transferring apparatus and substrate processing apparatus...

Substrate transferring apparatus and substrate processing apparatus...

Substrate conveying device and substrate conveying method

Interlock apparatus for a transfer machine

Resist processing method and apparatus

Resist processing apparatus for a rectangular substrate

Method for scrubbing and cleaning substrate

Device and method for scrubbing and cleaning substrate