Tatsuya Kohama

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Adjustment method and electron beam device
- Patent number 11,217,421
- Issue date Jan 4, 2022
- Ebara Corporation
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro-optical inspection apparatus and method with dust or partic...
- Patent number 9,105,444
- Issue date Aug 11, 2015
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample observing device and sample observing method
- Patent number 8,884,225
- Issue date Nov 11, 2014
- Ebara Corporation
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro-optical inspection apparatus and method with dust or partic...
- Patent number 8,624,182
- Issue date Jan 7, 2014
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 8,497,476
- Issue date Jul 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Polishing method
- Patent number 7,960,188
- Issue date Jun 14, 2011
- Ebara Corporation
- Shinrou Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for polishing a workpiece
- Patent number 7,077,730
- Issue date Jul 18, 2006
- Ebara Corporation
- Tatsuya Kohama
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and apparatus
- Patent number 6,663,469
- Issue date Dec 16, 2003
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
ADJUSTMENT METHOD AND ELECTRON BEAM DEVICE
- Publication number 20210012997
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Takehide HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20160307726
- Publication date Oct 20, 2016
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...
- Publication number 20140091215
- Publication date Apr 3, 2014
- EBARA CORPORATION
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD
- Publication number 20130161511
- Publication date Jun 27, 2013
- EBARA CORPORATION
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20120235036
- Publication date Sep 20, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...
- Publication number 20120074316
- Publication date Mar 29, 2012
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING METHOD
- Publication number 20090286332
- Publication date Nov 19, 2009
- Shinrou OHTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR POLISHING A WORKPIECE
- Publication number 20090142990
- Publication date Jun 4, 2009
- Tatsuya Kohama
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus and substrate polishing method
- Publication number 20070238395
- Publication date Oct 11, 2007
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Application
Polishing pad and polishing apparatus
- Publication number 20070135024
- Publication date Jun 14, 2007
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20060105678
- Publication date May 18, 2006
- Tatsuya Kohama
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for polishing a workpiece
- Publication number 20050020194
- Publication date Jan 27, 2005
- Tatsuya Kohama
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing apparatus and substrate polishing mehod
- Publication number 20020023715
- Publication date Feb 28, 2002
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and apparatus
- Publication number 20020002029
- Publication date Jan 3, 2002
- Norio Kimura
- B24 - GRINDING POLISHING

Tatsuya Kohama

Person

Patents Grantslast 30 patents

Adjustment method and electron beam device

Inspection device

Electro-optical inspection apparatus and method with dust or partic...

Sample observing device and sample observing method

Electro-optical inspection apparatus and method with dust or partic...

Inspection device

Polishing method

Method and apparatus for polishing a workpiece

Polishing method and apparatus

Patents Applicationslast 30 patents

ADJUSTMENT METHOD AND ELECTRON BEAM DEVICE

INSPECTION DEVICE

ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...

INSPECTION DEVICE

SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD

INSPECTION DEVICE

ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...

POLISHING METHOD

METHOD FOR POLISHING A WORKPIECE

Substrate polishing apparatus and substrate polishing method

Polishing pad and polishing apparatus

Polishing apparatus and polishing method

Method and apparatus for polishing a workpiece

Substrate polishing apparatus and substrate polishing mehod

Polishing method and apparatus