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Tatsuya KUNO

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  • Nagoya -City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Member for semiconductor manufacturing apparatus
    • Patent number 12,340,990
    • Issue date Jun 24, 2025
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,308,220
    • Issue date May 20, 2025
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus
    • Patent number 12,283,511
    • Issue date Apr 22, 2025
    • NGK Insulators, Ltd.
    • Masaki Ishikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ceramic heater with shaft
    • Patent number 12,284,729
    • Issue date Apr 22, 2025
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,266,557
    • Issue date Apr 1, 2025
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,266,515
    • Issue date Apr 1, 2025
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,237,156
    • Issue date Feb 25, 2025
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Grant

    Electrostatic chuck heater
    • Patent number 12,230,526
    • Issue date Feb 18, 2025
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus
    • Patent number 12,211,729
    • Issue date Jan 28, 2025
    • NGK Insulators, Ltd.
    • Natsuki Hirata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,211,671
    • Issue date Jan 28, 2025
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus
    • Patent number 12,211,726
    • Issue date Jan 28, 2025
    • NGK Insulators, Ltd.
    • Seiya Inoue
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,191,123
    • Issue date Jan 7, 2025
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,176,186
    • Issue date Dec 24, 2024
    • NGK Insulators, Ltd.
    • Seiya Inoue
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,131,891
    • Issue date Oct 29, 2024
    • NGK Insulators, Ltd.
    • Seiya Inoue
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ceramic heater with shaft
    • Patent number 12,108,499
    • Issue date Oct 1, 2024
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 12,106,994
    • Issue date Oct 1, 2024
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table and method of manufacturing the same
    • Patent number 12,087,613
    • Issue date Sep 10, 2024
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,087,609
    • Issue date Sep 10, 2024
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus
    • Patent number 12,087,610
    • Issue date Sep 10, 2024
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer placement table
    • Patent number 12,040,165
    • Issue date Jul 16, 2024
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrostatic chuck with high insulation performance and electrosta...
    • Patent number 11,951,583
    • Issue date Apr 9, 2024
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer placement table
    • Patent number 11,948,825
    • Issue date Apr 2, 2024
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck assembly, electrostatic chuck, and focus ring
    • Patent number 11,610,798
    • Issue date Mar 21, 2023
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck and method for manufacturing the same
    • Patent number 11,282,734
    • Issue date Mar 22, 2022
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    • Publication number 20250210394
    • Publication date Jun 26, 2025
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    • Publication number 20250210397
    • Publication date Jun 26, 2025
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250149368
    • Publication date May 8, 2025
    • NGK Insulators, Ltd.
    • Taro USAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250149369
    • Publication date May 8, 2025
    • NGK Insulators, Ltd.
    • Taro USAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250132184
    • Publication date Apr 24, 2025
    • NGK Insulators, Ltd.
    • Taro USAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250125125
    • Publication date Apr 17, 2025
    • NGK Insulators, Ltd.
    • Taro USAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250105043
    • Publication date Mar 27, 2025
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20250079229
    • Publication date Mar 6, 2025
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250079134
    • Publication date Mar 6, 2025
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250069865
    • Publication date Feb 27, 2025
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250069929
    • Publication date Feb 27, 2025
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20250014875
    • Publication date Jan 9, 2025
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20250014939
    • Publication date Jan 9, 2025
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FEEDER MEMBER AND WAFER PLACEMENT TABLE
    • Publication number 20240364241
    • Publication date Oct 31, 2024
    • NGK Insulators, Ltd.
    • Taro USAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240355656
    • Publication date Oct 24, 2024
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240297062
    • Publication date Sep 5, 2024
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240290646
    • Publication date Aug 29, 2024
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240234199
    • Publication date Jul 11, 2024
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20240186170
    • Publication date Jun 6, 2024
    • NGK Insulators, Ltd.
    • Natsuki HIRATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20240153809
    • Publication date May 9, 2024
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240136219
    • Publication date Apr 25, 2024
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240128063
    • Publication date Apr 18, 2024
    • NGK Insulators, Ltd.
    • Masaki ISHIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240105428
    • Publication date Mar 28, 2024
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240079217
    • Publication date Mar 7, 2024
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20240079218
    • Publication date Mar 7, 2024
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    • Publication number 20240038567
    • Publication date Feb 1, 2024
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230420230
    • Publication date Dec 28, 2023
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230420282
    • Publication date Dec 28, 2023
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230343564
    • Publication date Oct 26, 2023
    • NGK Insulators, Ltd.
    • Seiya INOUE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20230343566
    • Publication date Oct 26, 2023
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS