Tatsuya Maeda

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for measuring displacement between patterns an...
- Patent number 9,000,366
- Issue date Apr 7, 2015
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measuring apparatus
- Patent number 8,872,106
- Issue date Oct 28, 2014
- Hitachi High-Technologies Corporation
- Hiroshi Nishihama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,666,165
- Issue date Mar 4, 2014
- Hitachi, Ltd.
- Satoru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measuring apparatus
- Patent number 8,618,517
- Issue date Dec 31, 2013
- Hitachi High-Technologies Corporation
- Hiroshi Nishihama
Information Patent Grant
Tool-to-tool matching control method and its system for scanning el...
- Patent number 8,502,144
- Issue date Aug 6, 2013
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for setting sample observation condition, and...
- Patent number 8,384,030
- Issue date Feb 26, 2013
- Hitachi High-Technologies Corporation
- Kazuhiro Ueda
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and methods for capturing images us...
- Patent number 8,207,512
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image processing apparatus for analysis of pattern matching failure
- Patent number 8,200,006
- Issue date Jun 12, 2012
- Hitachi High-Technologies Corporation
- Mitsuji Ikeda
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope alignment method and scanning electron...
- Patent number 8,188,427
- Issue date May 29, 2012
- Hitachi High-Technologies Corporation
- Junichi Kakuta
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,124,934
- Issue date Feb 28, 2012
- Hitachi High-Technologies Corporation
- Tatsuya Maeda
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Tool-to-tool matching control method and its system for scanning el...
- Patent number 8,003,940
- Issue date Aug 23, 2011
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and methods for capturing images us...
- Patent number 7,807,980
- Issue date Oct 5, 2010
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evaluation method of fine pattern feature, its equipment, and metho...
- Patent number 7,684,937
- Issue date Mar 23, 2010
- Hitachi, Ltd.
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Image processing apparatus for analysis of pattern matching failure
- Patent number 7,545,977
- Issue date Jun 9, 2009
- Hitachi High-Technologies Corporation
- Mitsuji Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Tool-to-tool matching control method and its system for scanning el...
- Patent number 7,476,857
- Issue date Jan 13, 2009
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,446,313
- Issue date Nov 4, 2008
- Hitachi High-Technologies Corporation
- Tatsuya Maeda
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Scanning electron microscope
- Patent number 7,439,505
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring line and space pattern using scanning electron...
- Patent number 7,433,542
- Issue date Oct 7, 2008
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope, method for measuring a dimension of a...
- Patent number 7,408,154
- Issue date Aug 5, 2008
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle system and a method for measuring image magnification
- Patent number 7,372,047
- Issue date May 13, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evaluation method of fine pattern feature, its equipment, and metho...
- Patent number 7,366,620
- Issue date Apr 29, 2008
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 7,002,151
- Issue date Feb 21, 2006
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 6,803,573
- Issue date Oct 12, 2004
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 6,627,888
- Issue date Sep 30, 2003
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 5,614,713
- Issue date Mar 25, 1997
- Hitachi, Ltd.
- Atsushi Kobaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus
- Patent number 5,598,002
- Issue date Jan 28, 1997
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto focusing apparatus of scanning electron microscopes
- Patent number 5,512,747
- Issue date Apr 30, 1996
- Hitachi, Ltd.
- Tatsuya Maeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
POWER SUPPLY AND DEMAND PLANNING DEVICE
- Publication number 20220376500
- Publication date Nov 24, 2022
- Hitachi, Ltd
- Yoshihito KINOSHITA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PATTERN MEASURING APPARATUS
- Publication number 20140021350
- Publication date Jan 23, 2014
- Hitachi High-Technologies Corporation
- Hiroshi Nishihama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN MEASURING APPARATUS
- Publication number 20140021349
- Publication date Jan 23, 2014
- Hitachi High-Technologies Corporation
- Hiroshi Nishihama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...
- Publication number 20130264479
- Publication date Oct 10, 2013
- Atsuko YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tool-To-Tool Matching Control Method And Its System For Scanning El...
- Publication number 20110278453
- Publication date Nov 17, 2011
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICEL BEAM APPARATUS AND METHODS FOR CAPTURING IMAGES US...
- Publication number 20110133080
- Publication date Jun 9, 2011
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090242765
- Publication date Oct 1, 2009
- Tatsuya Maeda
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Image processing apparatus for analysis of pattern matching failure
- Publication number 20090214122
- Publication date Aug 27, 2009
- Hitachi High-Technologies Corporation
- Mitsuji Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Tool-To-Tool Matching Control Method And its System For Scanning El...
- Publication number 20090121134
- Publication date May 14, 2009
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOUDSPEAKER DIAPHRAGM AND LOUDSPEAKER USING THE SAME
- Publication number 20090060251
- Publication date Mar 5, 2009
- Tatsuya MAEDA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090041333
- Publication date Feb 12, 2009
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning Electron Microscope Alignment Method and Scanning Electron...
- Publication number 20090032693
- Publication date Feb 5, 2009
- Hitachi High-Technologies Corporation
- Junichi Kakuta
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR SETTING SAMPLE OBSERVATION CONDITION, AND...
- Publication number 20080217532
- Publication date Sep 11, 2008
- Hitachi High-Technologies Corporation
- Kazuhiro Ueda
- G01 - MEASURING TESTING
Information Patent Application
Evaluation method of fine pattern feature, its equipment, and metho...
- Publication number 20080215274
- Publication date Sep 4, 2008
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus and methods for capturing images us...
- Publication number 20070164219
- Publication date Jul 19, 2007
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tool-to-tool matching control method and its system for scanning el...
- Publication number 20070114405
- Publication date May 24, 2007
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image processing apparatus for analysis of pattern matching failure
- Publication number 20070045538
- Publication date Mar 1, 2007
- Hitachi High-Technologies Corporation
- Mitsuji Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope
- Publication number 20060188216
- Publication date Aug 24, 2006
- Tatsuya Maeda
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Scanning electron microscope
- Publication number 20060097158
- Publication date May 11, 2006
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope, method for measuring a dimension of a...
- Publication number 20060091309
- Publication date May 4, 2006
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Evaluation method of fine pattern feature, its equipment, and metho...
- Publication number 20060036409
- Publication date Feb 16, 2006
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Method for measuring line and space pattern using scanning electron...
- Publication number 20050207673
- Publication date Sep 22, 2005
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Application
Charged particle system and a method for measuring image magnification
- Publication number 20050189501
- Publication date Sep 1, 2005
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20050109937
- Publication date May 26, 2005
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope
- Publication number 20040016882
- Publication date Jan 29, 2004
- Hitachi, Ltd,
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope
- Publication number 20010019109
- Publication date Sep 6, 2001
- Hitachi, Ltd.
- Satoru Yamaguchi
- G01 - MEASURING TESTING

Tatsuya Maeda

Person

Patents Grantslast 30 patents

Method and apparatus for measuring displacement between patterns an...

Pattern measuring apparatus

Scanning electron microscope

Pattern measuring apparatus

Tool-to-tool matching control method and its system for scanning el...

Method and apparatus for setting sample observation condition, and...

Charged particle beam apparatus and methods for capturing images us...

Image processing apparatus for analysis of pattern matching failure

Scanning electron microscope alignment method and scanning electron...

Scanning electron microscope

Tool-to-tool matching control method and its system for scanning el...

Charged particle beam apparatus and methods for capturing images us...

Evaluation method of fine pattern feature, its equipment, and metho...

Image processing apparatus for analysis of pattern matching failure

Tool-to-tool matching control method and its system for scanning el...

Scanning electron microscope

Scanning electron microscope

Method for measuring line and space pattern using scanning electron...

Scanning electron microscope, method for measuring a dimension of a...

Charged particle system and a method for measuring image magnification

Evaluation method of fine pattern feature, its equipment, and metho...

Scanning electron microscope

Scanning electron microscope

Scanning electron microscope

Scanning electron microscope

Electron beam apparatus

Auto focusing apparatus of scanning electron microscopes

Patents Applicationslast 30 patents

POWER SUPPLY AND DEMAND PLANNING DEVICE

PATTERN MEASURING APPARATUS

PATTERN MEASURING APPARATUS

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...

Tool-To-Tool Matching Control Method And Its System For Scanning El...

CHARGED PARTICEL BEAM APPARATUS AND METHODS FOR CAPTURING IMAGES US...

SCANNING ELECTRON MICROSCOPE

Image processing apparatus for analysis of pattern matching failure

Tool-To-Tool Matching Control Method And its System For Scanning El...

LOUDSPEAKER DIAPHRAGM AND LOUDSPEAKER USING THE SAME

SCANNING ELECTRON MICROSCOPE

Scanning Electron Microscope Alignment Method and Scanning Electron...

METHOD AND APPARATUS FOR SETTING SAMPLE OBSERVATION CONDITION, AND...

Evaluation method of fine pattern feature, its equipment, and metho...

Charged particle beam apparatus and methods for capturing images us...

Tool-to-tool matching control method and its system for scanning el...

Image processing apparatus for analysis of pattern matching failure

Scanning electron microscope

Scanning electron microscope

Scanning electron microscope, method for measuring a dimension of a...

Evaluation method of fine pattern feature, its equipment, and metho...

Method for measuring line and space pattern using scanning electron...

Charged particle system and a method for measuring image magnification

Scanning electron microscope

Scanning electron microscope

Scanning electron microscope