Tatsuya Yamaguchi

Person

Hino, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 12,196,492
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Kazuteru Obara
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Method of manufacturing semiconductor device and film forming appar...
- Patent number 12,191,193
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,104,251
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,051,571
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Kazuya Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing antibody-drug conjugate
- Patent number 11,945,882
- Issue date Apr 2, 2024
- Daiichi Sankyo Company, Limited
- Tatsuya Yamaguchi
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 11,927,394
- Issue date Mar 12, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Control method, measurement method, control device, and heat treatm...
- Patent number 11,929,269
- Issue date Mar 12, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,923,242
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,843,027
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermocouple structure, heat treatment apparatus, and method of man...
- Patent number 11,815,407
- Issue date Nov 14, 2023
- Tokyo Electron Limited
- Hisashi Inoue
- G01 - MEASURING TESTING
Information Patent Grant
Heat treatment apparatus, heat treatment method, and film forming m...
- Patent number 11,784,070
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,694,891
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Syuji Nozawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,674,224
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Yasuaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and film deposition method
- Patent number 11,581,201
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus
- Patent number 11,569,098
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 11,495,490
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Koichi Yatsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,456,184
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Ryuichi Asako
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Heat insulation structure at lower end of vertical heat treatment a...
- Patent number 11,424,143
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Koji Yoshii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,387,139
- Issue date Jul 12, 2022
- Tokyo Electron Limited
- Syuji Nozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and apparatus
- Patent number 11,373,874
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 11,367,633
- Issue date Jun 21, 2022
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and substrate processing...
- Patent number 11,342,223
- Issue date May 24, 2022
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,282,699
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Syuji Nozawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resistive change elements using passivating interface gaps and meth...
- Patent number 11,258,023
- Issue date Feb 22, 2022
- Nantero, Inc.
- Mark Ramsbey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature monitoring apparatus, heat treatment apparatus, and tem...
- Patent number 11,257,697
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing semiconductor memory
- Patent number 11,139,313
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Sunghil Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 11,136,668
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 11,114,319
- Issue date Sep 7, 2021
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,081,321
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Syuji Nozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device manufacturing method
- Patent number 11,069,536
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Sunghil Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250051922
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Hisashi INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING ANTIBODY-DRUG CONJUGATE
- Publication number 20240376147
- Publication date Nov 14, 2024
- DAIICHI SANKYO COMPANY, LIMITED
- Tatsuya YAMAGUCHI
- C07 - ORGANIC CHEMISTRY
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240316592
- Publication date Sep 26, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PATTERN FORMING METHOD AND PLASMA PROCESSING METHOD
- Publication number 20240318014
- Publication date Sep 26, 2024
- TOKYO ELECTRON LIMITED
- Shin OOWADA
- C07 - ORGANIC CHEMISTRY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240301555
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240295024
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Makoto TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AN...
- Publication number 20240169123
- Publication date May 23, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240150500
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240021419
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230422348
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki KIKUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230416920
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATION METHOD OF HEAT...
- Publication number 20230417488
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Makoto TAKAHASHI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230383407
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Naoki UMEHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20230326739
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20230317475
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Koji YOSHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING SYSTEM AND FILM FORMING METHOD
- Publication number 20230070274
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Syuji NOZAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230067094
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230051822
- Publication date Feb 16, 2023
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20230010649
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20230009720
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL METHOD AND CONTROL APPARATUS
- Publication number 20220392813
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Akira HIRATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20220373260
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Kazuteru OBARA
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20220307770
- Publication date Sep 29, 2022
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
BLAST FURNACE FAULT DETERMINATION APPARATUS, METHOD FOR DETERMINING...
- Publication number 20220163260
- Publication date May 26, 2022
- JFE STEEL CORPORATION
- Hiroyuki SHIMAMOTO
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220139682
- Publication date May 5, 2022
- TOKYO ELECTRON LIMITED
- Kazuya ICHIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND FILM FORMING APPAR...
- Publication number 20220059396
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESISTIVE CHANGE ELEMENTS USING PASSIVATING INTERFACE GAPS AND METH...
- Publication number 20220045290
- Publication date Feb 10, 2022
- Nantero, Inc.
- Mark RAMSBEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210336000
- Publication date Oct 28, 2021
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210320033
- Publication date Oct 14, 2021
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFFECTIVE METHOD FOR MANUFACTURING ANTIBODY-DRUG CONJUGATE
- Publication number 20210283269
- Publication date Sep 16, 2021
- DAIICHI SANKYO COMPANY, LIMITED
- Tatsuya YAMAGUCHI
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Tatsuya Yamaguchi

Person

Patents Grantslast 30 patents

Heat treatment apparatus and heat treatment method

Method of manufacturing semiconductor device and film forming appar...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing system

Method for producing antibody-drug conjugate

Heat treatment apparatus and heat treatment method

Control method, measurement method, control device, and heat treatm...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Thermocouple structure, heat treatment apparatus, and method of man...

Heat treatment apparatus, heat treatment method, and film forming m...

Film forming apparatus and film forming method

Film forming method and film forming apparatus

Heat treatment apparatus and film deposition method

Heat treatment apparatus

Semiconductor device manufacturing method

Substrate processing method and substrate processing system

Heat insulation structure at lower end of vertical heat treatment a...

Method of manufacturing semiconductor device

Etching method and apparatus

Heat treatment apparatus and heat treatment method

Semiconductor device manufacturing method and substrate processing...

Substrate processing apparatus

Resistive change elements using passivating interface gaps and meth...

Temperature monitoring apparatus, heat treatment apparatus, and tem...

Method of manufacturing semiconductor memory

Film-forming apparatus and film-forming method

Heat treatment apparatus and heat treatment method

Substrate processing apparatus

Device manufacturing method

Patents Applicationslast 30 patents

TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR PRODUCING ANTIBODY-DRUG CONJUGATE

FILM FORMING APPARATUS

PATTERN FORMING METHOD AND PLASMA PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AN...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATION METHOD OF HEAT...

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD

FILM FORMING SYSTEM AND FILM FORMING METHOD

SUBSTRATE PROCESSING APPARATUS

FILM FORMING APPARATUS

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

FILM FORMING METHOD AND HEAT TREATMENT APPARATUS

CONTROL METHOD AND CONTROL APPARATUS

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

BLAST FURNACE FAULT DETERMINATION APPARATUS, METHOD FOR DETERMINING...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND FILM FORMING APPAR...

RESISTIVE CHANGE ELEMENTS USING PASSIVATING INTERFACE GAPS AND METH...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

EFFECTIVE METHOD FOR MANUFACTURING ANTIBODY-DRUG CONJUGATE