Tatsuya Yanagida

Person

Hiratsuka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser apparatus for generating extreme ultraviolet light
- Patent number 11,477,877
- Issue date Oct 18, 2022
- Gigaphoton Inc.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet light generating system and electronic device m...
- Patent number 11,226,565
- Issue date Jan 18, 2022
- Gigaphoton Inc.
- Tatsuya Yanagida
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 10,932,350
- Issue date Feb 23, 2021
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation method
- Patent number 10,667,375
- Issue date May 26, 2020
- Gigaphoton Inc.
- Tatsuya Yanagida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thomson scattering measurement system and EUV light generation system
- Patent number 10,627,287
- Issue date Apr 21, 2020
- Gigaphoton Inc.
- Kouichiro Kouge
- G01 - MEASURING TESTING
Information Patent Grant
System and method for generating extreme ultraviolet light, and las...
- Patent number 10,630,042
- Issue date Apr 21, 2020
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generating apparatus using differing lase...
- Patent number 10,582,601
- Issue date Mar 3, 2020
- Gigaphoton Inc.
- Tatsuya Yanagida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 10,555,408
- Issue date Feb 4, 2020
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light employin...
- Patent number 10,512,148
- Issue date Dec 17, 2019
- Gigaphoton Inc.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,306,743
- Issue date May 28, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,251,255
- Issue date Apr 2, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,172,225
- Issue date Jan 1, 2019
- Gigaphoton Inc.
- Toru Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,117,317
- Issue date Oct 30, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light, and las...
- Patent number 10,074,956
- Issue date Sep 11, 2018
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,986,629
- Issue date May 29, 2018
- Gigaphoton Inc.
- Toru Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 9,980,360
- Issue date May 22, 2018
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,877,378
- Issue date Jan 23, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light, and las...
- Patent number 9,509,115
- Issue date Nov 29, 2016
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 9,497,841
- Issue date Nov 15, 2016
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,497,842
- Issue date Nov 15, 2016
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 9,402,297
- Issue date Jul 26, 2016
- Gigaphoton Inc.
- Osamu Wakabayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,265,136
- Issue date Feb 16, 2016
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,167,678
- Issue date Oct 20, 2015
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light, and las...
- Patent number 9,130,345
- Issue date Sep 8, 2015
- Gigaphoton Inc.
- Tatsuya Yanagida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,113,540
- Issue date Aug 18, 2015
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation system utilizing a pre-pulse t...
- Patent number 9,072,153
- Issue date Jun 30, 2015
- Gigaphoton Inc.
- Osamu Wakabayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation system utilizing a variation v...
- Patent number 9,072,152
- Issue date Jun 30, 2015
- Gigaphoton Inc.
- Osamu Wakabayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source device
- Patent number 8,853,656
- Issue date Oct 7, 2014
- Gigaphoton Inc.
- Tatsuya Yanagida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,841,641
- Issue date Sep 23, 2014
- Gigaphoton Inc.
- Kouji Kakizaki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device, extreme ultraviolet light generation apparatu...
- Patent number 8,742,380
- Issue date Jun 3, 2014
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM AND ELECTRONIC DEVICE M...
- Publication number 20200363729
- Publication date Nov 19, 2020
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20200150543
- Publication date May 14, 2020
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20200068695
- Publication date Feb 27, 2020
- Gigaphoton Inc.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
THOMSON SCATTERING MEASUREMENT SYSTEM AND EUV LIGHT GENERATION SYSTEM
- Publication number 20190293488
- Publication date Sep 26, 2019
- Gigaphoton Inc.
- Kouichiro KOUGE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20190239329
- Publication date Aug 1, 2019
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION METHOD
- Publication number 20190159327
- Publication date May 23, 2019
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET DETECTOR AND EUV LIGHT GENERATION DEVICE
- Publication number 20190150260
- Publication date May 16, 2019
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190141826
- Publication date May 9, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190037677
- Publication date Jan 31, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LAS...
- Publication number 20180351320
- Publication date Dec 6, 2018
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
- Publication number 20180255631
- Publication date Sep 6, 2018
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20180242441
- Publication date Aug 23, 2018
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20180146536
- Publication date May 24, 2018
- Gigaphoton Inc.
- Toru SUZUKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20180110116
- Publication date Apr 19, 2018
- GIGAPHOTON INC.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM, EXTREME ULTRAVIOLET LI...
- Publication number 20170280545
- Publication date Sep 28, 2017
- Kyushu University, National University Corporation
- Kentaro TOMITA
- G01 - MEASURING TESTING
Information Patent Application
LASER APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20170196072
- Publication date Jul 6, 2017
- GIGAPHOTON INC.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LAS...
- Publication number 20170063020
- Publication date Mar 2, 2017
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20170027047
- Publication date Jan 26, 2017
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20170019983
- Publication date Jan 19, 2017
- GIGAPHOTON INC.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160234920
- Publication date Aug 11, 2016
- GIGAPHOTON INC.
- Toru SUZUKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20160128172
- Publication date May 5, 2016
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20160073487
- Publication date Mar 10, 2016
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20150351209
- Publication date Dec 3, 2015
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LAS...
- Publication number 20150351210
- Publication date Dec 3, 2015
- GIGAPHOTON, INC.
- Tatsuya YANAGIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20150264793
- Publication date Sep 17, 2015
- GIGAPHOTON INC.
- Osamu WAKABAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20150123019
- Publication date May 7, 2015
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20150102239
- Publication date Apr 16, 2015
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20150043599
- Publication date Feb 12, 2015
- GIGAPHOTON INC.
- Tatsuya YANAGIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FARADAY ROTATOR, OPTICAL ISOLATOR, LASER APPARATUS, AND EXTREME ULT...
- Publication number 20140346374
- Publication date Nov 27, 2014
- Tatsuya YANAGIDA
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRA VIOLET LIGHT
- Publication number 20140203194
- Publication date Jul 24, 2014
- GIGAPHOTON INC.
- Hitoshi Nagano
- H01 - BASIC ELECTRIC ELEMENTS

Tatsuya Yanagida

Person

Patents Grantslast 30 patents

Laser apparatus for generating extreme ultraviolet light

Extreme ultraviolet light generating system and electronic device m...

Extreme ultraviolet light generation system

Extreme ultraviolet light generation method

Thomson scattering measurement system and EUV light generation system

System and method for generating extreme ultraviolet light, and las...

Extreme ultraviolet light generating apparatus using differing lase...

Extreme ultraviolet light generation system

System and method for generating extreme ultraviolet light employin...

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

Extreme ultraviolet light generation apparatus

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light, and las...

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light generation system

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light, and las...

Extreme ultraviolet light generation system

System and method for generating extreme ultraviolet light

Extreme ultraviolet light generation system

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light, and las...

System and method for generating extreme ultraviolet light

Extreme ultraviolet light generation system utilizing a pre-pulse t...

Extreme ultraviolet light generation system utilizing a variation v...

Extreme ultraviolet light source device

Extreme ultraviolet light source apparatus

Target supply device, extreme ultraviolet light generation apparatu...

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM AND ELECTRONIC DEVICE M...

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

LASER APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT

THOMSON SCATTERING MEASUREMENT SYSTEM AND EUV LIGHT GENERATION SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION METHOD

DROPLET DETECTOR AND EUV LIGHT GENERATION DEVICE

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LAS...

EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM, EXTREME ULTRAVIOLET LI...

LASER APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LAS...

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LAS...

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

LASER SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

FARADAY ROTATOR, OPTICAL ISOLATOR, LASER APPARATUS, AND EXTREME ULT...

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRA VIOLET LIGHT