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Tean-Mu Shen

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  • Hsinchu, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma generator, surface treatment method using the same and surfa...
    • Patent number 9,204,950
    • Issue date Dec 8, 2015
    • Industrial Technology Research Institute
    • Chih-Hung Liu
    • A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
  • Information Patent Grant

    Cathode discharge apparatus
    • Patent number 8,198,793
    • Issue date Jun 12, 2012
    • Industrial Technology Research Institute
    • Fu-Ching Tung
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum apparatus of rotary motion entry
    • Patent number 8,146,923
    • Issue date Apr 3, 2012
    • Industrial Technology Research Institute
    • Kuan-Chou Chen
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Hollow cathode discharging apparatus
    • Patent number 7,721,673
    • Issue date May 25, 2010
    • Industrial Technology Research Institute
    • Chen-Chung Du
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Anode layer particle beam device
    • Patent number 7,425,710
    • Issue date Sep 16, 2008
    • Industrial Technology Research Institute
    • Ping-Chun Liu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Multi-stage vacuum pump
    • Patent number 7,278,839
    • Issue date Oct 9, 2007
    • Industrial Technology Research Institute
    • Ming-Hsin Liu
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Combination double screw rotor assembly
    • Patent number 6,508,639
    • Issue date Jan 21, 2003
    • Industrial Technology Research Institute
    • Chun-chien Chen
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Combination double screw rotor assembly
    • Patent number 6,341,951
    • Issue date Jan 29, 2002
    • Industrial Technology Research Institute
    • Chun-chien Chen
    • F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
  • Information Patent Grant

    Nozzle device for purging a vacuum pump
    • Patent number 6,155,502
    • Issue date Dec 5, 2000
    • Industrial Technology Research Institute
    • Ming-Shinn Liou
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Multistage pump and method for assembling the pump
    • Patent number 6,123,526
    • Issue date Sep 26, 2000
    • Industrial Technology Research Institute
    • Chun-Chien Chen
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA GENERATOR, SURFACE TREATMENT METHOD USING THE SAME AND SURFA...
    • Publication number 20150050614
    • Publication date Feb 19, 2015
    • Industrial Technology Research Institute
    • Chih-Hung LIU
    • A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
  • Information Patent Application

    TRANSMISSION MECHANISM AND THE DEPOSITION APPARATUS USING THE SAME
    • Publication number 20120240855
    • Publication date Sep 27, 2012
    • Industrial Technology Research Institute
    • Chen-Chung Du
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20120132366
    • Publication date May 31, 2012
    • Industrial Technology Research Institute
    • Pei-Shan Wu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ENHANCED ATOMIC LAYER DEPOSITION APPARATUS AND THE CONTROLLI...
    • Publication number 20120070590
    • Publication date Mar 22, 2012
    • Industrial Technology Research Institute
    • Jen-Rong Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM APPARATUS OF ROTARY MOTION ENTRY
    • Publication number 20110079963
    • Publication date Apr 7, 2011
    • Industrial Technology Research Institute
    • Kuan-Chou Chen
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    GAS DISTRIBUTION PLATE AND APPARATUS USING THE SAME
    • Publication number 20110073038
    • Publication date Mar 31, 2011
    • Industrial Technology Research Institute
    • Jung-Chen CHIEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CATHODE DISCHARGE APPARATUS
    • Publication number 20100123381
    • Publication date May 20, 2010
    • Industrial Technology Research Institute
    • FU-CHING TUNG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MICROWAVE-EXCITED PLASMA SOURCE USING RIDGED WAVE-GUIDE LINE-TYPE M...
    • Publication number 20090151637
    • Publication date Jun 18, 2009
    • Industrial Technology Research Institute
    • CHIH-CHEN CHANG
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Hollow cathode discharging apparatus
    • Publication number 20080106202
    • Publication date May 8, 2008
    • INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    • Chen-Chung Du
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Anode layer particle beam device
    • Publication number 20060138342
    • Publication date Jun 29, 2006
    • INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    • Ping-Chun Liu
    • G02 - OPTICS
  • Information Patent Application

    Multi-stage vacuum pump
    • Publication number 20050089424
    • Publication date Apr 28, 2005
    • Ming-Hsin Liu
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Combination double screw rotor assembly
    • Publication number 20020031439
    • Publication date Mar 14, 2002
    • Chun-Chien Chen
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...