Tejas ULAVI

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for cleaning a process chamber
- Patent number 12,087,555
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Kalyanjit Ghosh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for motor shaft and heater leveling
- Patent number 12,018,376
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Ashutosh Agarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater assembly with process gap control for batch processing chambers
- Patent number 12,020,957
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Akshay Gunaji
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Dynamic electrical and fluid delivery system with indexing motion f...
- Patent number 11,950,384
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Akshay Gunaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-function wafer backside pressure control and edge purge
- Patent number 11,923,233
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for real-time wafer chucking detection
- Patent number 11,791,190
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer heater with backside and integrated bevel purge
- Patent number 11,769,684
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal heater for spatial multi-wafer processing tool
- Patent number 11,682,576
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ DC plasma for cleaning pedestal heater
- Patent number 11,623,253
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- B08 - CLEANING
Information Patent Grant
Dynamic electrical and fluid delivery system with indexing motion f...
- Patent number 11,602,064
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Akshay Gunaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for cleaning a process chamber
- Patent number 11,532,462
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Kalyanjit Ghosh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spatial wafer processing with improved temperature uniformity
- Patent number 11,479,855
- Issue date Oct 25, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ground path systems for providing a shorter and symmetrical ground...
- Patent number 11,434,569
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Tuan Anh Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal heater for spatial multi-wafer processing tool
- Patent number 11,430,686
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ DC plasma for cleaning pedestal heater
- Patent number 11,260,432
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Tejas Ulavi
- B08 - CLEANING
Information Patent Grant
Gas input system for a substrate processing chamber
- Patent number 11,107,704
- Issue date Aug 31, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas box for CVD chamber
- Patent number 11,049,699
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater pedestal assembly for wide range temperature control
- Patent number 10,910,238
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Kaushik Alayavalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal management system
- Patent number 10,910,243
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Spatial wafer processing with improved temperature uniformity
- Patent number 10,787,739
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning a process chamber
- Patent number 10,636,628
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Kalyanjit Ghosh
- B08 - CLEANING
Information Patent Grant
System and method for substrate processing chambers
- Patent number 10,600,624
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DYNAMIC ELECTRICAL AND FLUID DELIVERY SYSTEM WITH INDEXING MOTION F...
- Publication number 20230175131
- Publication date Jun 8, 2023
- Applied Materials, Inc.
- Akshay Gunaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR CLEANING A PROCESS CHAMBER
- Publication number 20230128297
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Kalyanjit GHOSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Heater With Backside And Integrated Bevel Purge
- Publication number 20230113057
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND...
- Publication number 20220403520
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Tuan Anh NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pedestal heater for Spatial Multi-Wafer Processing Tool
- Publication number 20220319899
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-Situ DC Plasma For Cleaning Pedestal Heater
- Publication number 20220152668
- Publication date May 19, 2022
- Applied Materials, Inc.
- Tejas Ulavi
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPAT...
- Publication number 20220106683
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dynamic Electrical and Fluid Delivery System with Indexing Motion f...
- Publication number 20220071037
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Akshay Gunaji
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Heater Assembly with Process Gap Control for Batch Processing Chambers
- Publication number 20220068674
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Akshay Gunaji
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
Apparatus and Methods for Real-Time Wafer Chucking Detection
- Publication number 20210351060
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal Geometry for Fast Gas Exchange
- Publication number 20210292898
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIVERSAL ADJUSTABLE BLOCKER PLATE FOR FLOW DISTRIBUTION TUNING
- Publication number 20210159094
- Publication date May 27, 2021
- Applied Materials, Inc.
- Yuxing ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal Heater for Spatial Multi-Wafer Processing Tool
- Publication number 20210111058
- Publication date Apr 15, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Heater With Backside And Integrated Bevel Purge
- Publication number 20210111059
- Publication date Apr 15, 2021
- Applies Materials, Inc.
- Tejas Ulavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Methods for Motor Shaft and Heater Leveling
- Publication number 20210087689
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Ashutosh Agarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-Situ DC Plasma For Cleaning Pedestal Heater
- Publication number 20210086239
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Tejas Ulavi
- B08 - CLEANING
Information Patent Application
DUAL-FUNCTION WAFER BACKSIDE PRESSURE CONTROL AND EDGE PURGE
- Publication number 20200411359
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spatial Wafer Processing With Improved Temperature Uniformity
- Publication number 20200392621
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR CLEANING A PROCESS CHAMBER
- Publication number 20200251311
- Publication date Aug 6, 2020
- Applied Materials, Inc.
- Kalyanjit GHOSH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spatial Wafer Processing With Improved Temperature Uniformity
- Publication number 20200131635
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INPUT SYSTEM FOR A SUBSTRATE PROCESSING CHAMBER
- Publication number 20200075353
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Tejas ULAVI
- G05 - CONTROLLING REGULATING
Information Patent Application
Thermal Management System
- Publication number 20200075366
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Tejas Ulavi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
GAS BOX FOR CVD CHAMBER
- Publication number 20200043704
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Tejas ULAVI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND...
- Publication number 20190360100
- Publication date Nov 28, 2019
- Applied Materials, Inc.
- Tuan Anh NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20190122872
- Publication date Apr 25, 2019
- Applied Materials, Inc.
- Kalyanjit GHOSH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method And System For Cleaning A Process Chamber
- Publication number 20190080889
- Publication date Mar 14, 2019
- Applied Materials, Inc.
- Kalyanjit GHOSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL
- Publication number 20180082866
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kaushik ALAYAVALLI
- H01 - BASIC ELECTRIC ELEMENTS

Tejas ULAVI

Person

Patents Grantslast 30 patents

Method and system for cleaning a process chamber

Apparatus and methods for motor shaft and heater leveling

Heater assembly with process gap control for batch processing chambers

Dynamic electrical and fluid delivery system with indexing motion f...

Dual-function wafer backside pressure control and edge purge

Apparatus and methods for real-time wafer chucking detection

Wafer heater with backside and integrated bevel purge

Pedestal heater for spatial multi-wafer processing tool

In-situ DC plasma for cleaning pedestal heater

Dynamic electrical and fluid delivery system with indexing motion f...

Method and system for cleaning a process chamber

Spatial wafer processing with improved temperature uniformity

Ground path systems for providing a shorter and symmetrical ground...

Pedestal heater for spatial multi-wafer processing tool

In-situ DC plasma for cleaning pedestal heater

Gas input system for a substrate processing chamber

Gas box for CVD chamber

Heater pedestal assembly for wide range temperature control

Thermal management system

Spatial wafer processing with improved temperature uniformity

Method for cleaning a process chamber

System and method for substrate processing chambers

Patents Applicationslast 30 patents

DYNAMIC ELECTRICAL AND FLUID DELIVERY SYSTEM WITH INDEXING MOTION F...

METHOD AND SYSTEM FOR CLEANING A PROCESS CHAMBER

Wafer Heater With Backside And Integrated Bevel Purge

GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND...

Pedestal heater for Spatial Multi-Wafer Processing Tool

In-Situ DC Plasma For Cleaning Pedestal Heater

APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPAT...

Dynamic Electrical and Fluid Delivery System with Indexing Motion f...

Heater Assembly with Process Gap Control for Batch Processing Chambers

Apparatus and Methods for Real-Time Wafer Chucking Detection

Pedestal Geometry for Fast Gas Exchange

UNIVERSAL ADJUSTABLE BLOCKER PLATE FOR FLOW DISTRIBUTION TUNING

Pedestal Heater for Spatial Multi-Wafer Processing Tool

Wafer Heater With Backside And Integrated Bevel Purge

Apparatus and Methods for Motor Shaft and Heater Leveling

In-Situ DC Plasma For Cleaning Pedestal Heater

DUAL-FUNCTION WAFER BACKSIDE PRESSURE CONTROL AND EDGE PURGE

Spatial Wafer Processing With Improved Temperature Uniformity

METHOD AND SYSTEM FOR CLEANING A PROCESS CHAMBER

Spatial Wafer Processing With Improved Temperature Uniformity

GAS INPUT SYSTEM FOR A SUBSTRATE PROCESSING CHAMBER

Thermal Management System

GAS BOX FOR CVD CHAMBER

GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND...

SYSTEM AND METHOD FOR SUBSTRATE PROCESSING CHAMBERS

Method And System For Cleaning A Process Chamber

HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL