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Terry Richard Turner
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
RF power delivery diagnostic system
Patent number
8,010,084
Issue date
Aug 30, 2011
Turner Enterprises & Associates
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF sensor clamp assembly
Patent number
7,821,250
Issue date
Oct 26, 2010
Inficon, Inc.
Terry A. Turner
G01 - MEASURING TESTING
Information
Patent Grant
RF sensor clamp assembly
Patent number
7,728,250
Issue date
Jun 1, 2010
Inficon, Inc.
Terry R. Turner
G01 - MEASURING TESTING
Information
Patent Grant
RF power delivery diagnostic system
Patent number
7,403,764
Issue date
Jul 22, 2008
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transducer package for process control
Patent number
7,345,428
Issue date
Mar 18, 2008
Terry R. Turner
G01 - MEASURING TESTING
Information
Patent Grant
Wafer thinning using magnetic mirror plasma
Patent number
7,118,992
Issue date
Oct 10, 2006
iFire Technologies, Inc.
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer thinning using magnetic mirror plasma
Patent number
6,794,272
Issue date
Sep 21, 2004
iFire Technologies, Inc.
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma monitoring and control method and system
Patent number
5,939,886
Issue date
Aug 17, 1999
Advanced Energy Industries, Inc.
Terry Richard Turner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Retractable probe system with in situ fabrication environment proce...
Patent number
5,746,835
Issue date
May 5, 1998
Texas Instruments Incorporated
Terry R. Turner
G01 - MEASURING TESTING
Information
Patent Grant
Retractable probe system with in situ fabrication environment proce...
Patent number
5,716,878
Issue date
Feb 10, 1998
Texas Instruments Incorporated
Terry R. Turner
G01 - MEASURING TESTING
Information
Patent Grant
Plasma monitoring and control method and system
Patent number
5,576,629
Issue date
Nov 19, 1996
Fourth State Technology, Inc.
Terry R. Turner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING ENDPOINT IN PLASMA PROCESSING
Publication number
20230352283
Publication date
Nov 2, 2023
FORTH-RITE TECHNOLOGIES, LLC
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING EXCURSION IN PLASMA PROCESSING
Publication number
20230352284
Publication date
Nov 2, 2023
FORTH-RITE TECHNOLOGIES, LLC
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EFFLUENT IMPEDANCE BASED ENDPOINT DETECTION
Publication number
20190043700
Publication date
Feb 7, 2019
Forth-Rite Technologies
Terry R. Turner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EFFLUENT IMPEDANCE BASED ENDPOINT DETECTION
Publication number
20090261839
Publication date
Oct 22, 2009
Terry R. Turner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RF POWER DELIVERY DIAGNOSTIC SYSTEM
Publication number
20090048792
Publication date
Feb 19, 2009
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF sensor clamp assembly
Publication number
20080024158
Publication date
Jan 31, 2008
Inficon, Inc.
Terry A. Turner
G01 - MEASURING TESTING
Information
Patent Application
RF power delivery diagnostic system
Publication number
20060116106
Publication date
Jun 1, 2006
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Shielding assembly for an RF sensor current transducer
Publication number
20060084397
Publication date
Apr 20, 2006
Terry R. Turner
G01 - MEASURING TESTING
Information
Patent Application
RF sensor clamp assembly
Publication number
20050211381
Publication date
Sep 29, 2005
Terry R. Turner
G01 - MEASURING TESTING
Information
Patent Application
Wafer thinning using magnetic mirror plasma
Publication number
20050032333
Publication date
Feb 10, 2005
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transducer package for process control
Publication number
20040253921
Publication date
Dec 16, 2004
Terry R. Turner
G01 - MEASURING TESTING
Information
Patent Application
Wafer thinning using magnetic mirror plasma
Publication number
20030186513
Publication date
Oct 2, 2003
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for wafer thinning
Publication number
20030082847
Publication date
May 1, 2003
i-Fire Technologies, Inc.
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS