Teruaki HOMBO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Carrier device, work processing apparatus, control method of carrie...
- Patent number 11,380,559
- Issue date Jul 5, 2022
- Ebara Corporation
- Yohei Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 11,056,359
- Issue date Jul 6, 2021
- Ebara Corporation
- Teruaki Hombo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and pipe cleaning method for substra...
- Patent number 10,438,818
- Issue date Oct 8, 2019
- Ebara Corporation
- Junji Kunisawa
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and method executed in the same
- Patent number 10,018,545
- Issue date Jul 10, 2018
- Ebara Corporation
- Teruaki Hombo
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and processed substrate manufacturin...
- Patent number 9,673,067
- Issue date Jun 6, 2017
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,362,129
- Issue date Jun 7, 2016
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for cleaning substrate
- Patent number 9,089,881
- Issue date Jul 28, 2015
- Ebara Corporation
- Xinming Wang
- B08 - CLEANING
Information Patent Grant
Roller shaft for semiconductor cleaning
- Patent number D710062
- Issue date Jul 29, 2014
- Ebara Corporation
- Tomoatsu Ishibashi
- D32 - Washing, cleaning, or drying machine

Patents Applicationslast 30 patents

Information Patent Application
CARRIER DEVICE, WORK PROCESSING APPARATUS, CONTROL METHOD OF CARRIE...
- Publication number 20200328096
- Publication date Oct 15, 2020
- EBARA CORPORATION
- Yohei ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190157118
- Publication date May 23, 2019
- EBARA CORPORATION
- Teruaki HOMBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PIPE CLEANING METHOD FOR SUBSTRA...
- Publication number 20170117165
- Publication date Apr 27, 2017
- EBARA CORPORATION
- Junji KUNISAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND METHOD EXECUTED IN THE SAME
- Publication number 20150338328
- Publication date Nov 26, 2015
- EBARA CORPORATION
- Teruaki HOMBO
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATE
- Publication number 20150287617
- Publication date Oct 8, 2015
- EBARA CORPORATION
- Xinming WANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSED SUBSTRATE MANUFACTURIN...
- Publication number 20140311532
- Publication date Oct 23, 2014
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20140120725
- Publication date May 1, 2014
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140083468
- Publication date Mar 27, 2014
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATE
- Publication number 20110209727
- Publication date Sep 1, 2011
- Xinming WANG
- B08 - CLEANING

Teruaki HOMBO

Person

Patents Grantslast 30 patents

Carrier device, work processing apparatus, control method of carrie...

Cleaning apparatus and substrate processing apparatus

Substrate processing apparatus and pipe cleaning method for substra...

Substrate cleaning apparatus and method executed in the same

Substrate processing apparatus and processed substrate manufacturin...

Polishing apparatus and polishing method

Method and apparatus for cleaning substrate

Roller shaft for semiconductor cleaning

Patents Applicationslast 30 patents

CARRIER DEVICE, WORK PROCESSING APPARATUS, CONTROL METHOD OF CARRIE...

CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PIPE CLEANING METHOD FOR SUBSTRA...

SUBSTRATE CLEANING APPARATUS AND METHOD EXECUTED IN THE SAME

METHOD AND APPARATUS FOR CLEANING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND PROCESSED SUBSTRATE MANUFACTURIN...

POLISHING APPARATUS AND POLISHING METHOD

SUBSTRATE PROCESSING APPARATUS

METHOD AND APPARATUS FOR CLEANING SUBSTRATE