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Nirasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plane heater
Patent number
8,143,557
Issue date
Mar 27, 2012
Covalent Materials Corporation
Kazuo Shibata
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Shower head and film-forming device using the same
Patent number
7,931,749
Issue date
Apr 26, 2011
Tokyo Electron Limited
Manabu Amikura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gasification monitor, method for detecting mist, film forming metho...
Patent number
7,887,873
Issue date
Feb 15, 2011
Tokyo Electron Limited
Teruo Iwata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Loading table and heat treating apparatus having the loading table
Patent number
7,718,930
Issue date
May 18, 2010
Tokyo Electron Limited
Hiroo Kawasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gasification monitor, method for detecting mist, film forming metho...
Patent number
7,238,238
Issue date
Jul 3, 2007
Tokyo Electron Limited
Teruo Iwata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Valve and vacuum processing device with the valve
Patent number
6,719,272
Issue date
Apr 13, 2004
Tokyo Electron Limited
Teruo Iwata
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Gas processing apparatus for object to be processed
Patent number
6,669,784
Issue date
Dec 30, 2003
Tokyo Electron Limited
Munehisa Futamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas processing apparatus baffle member, and gas processing method
Patent number
6,436,193
Issue date
Aug 20, 2002
Tokyo Electron Limited
Shigeru Kasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas processing apparatus for object to be processed
Patent number
6,372,048
Issue date
Apr 16, 2002
Tokyo Electron Limited
Munehisa Futamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing apparatus
Patent number
6,253,029
Issue date
Jun 26, 2001
Tokyo Electron Limited
Kazuichi Hayashi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Film forming apparatus and method
Patent number
6,149,729
Issue date
Nov 21, 2000
Tokyo Electron Limited
Teruo Iwata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum pump with gas heating
Patent number
5,879,139
Issue date
Mar 9, 1999
Tokyo Electron Limited
Kazuichi Hayashi
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information
Patent Grant
Plasma processing method, plasma processing apparatus, and plasma g...
Patent number
5,783,492
Issue date
Jul 21, 1998
Tokyo Electron Limited
Kimihiro Higuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Treatment apparatus
Patent number
5,753,891
Issue date
May 19, 1998
Tokyo Electron Limited
Teruo Iwata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced pressure processing system and reduced pressure processing...
Patent number
5,455,082
Issue date
Oct 3, 1995
Tokyo Electron Limited
Masasi Saito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing apparatus and exhaust system that prevents partic...
Patent number
5,433,780
Issue date
Jul 18, 1995
Tokyo Electron Limited
Towl Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum creating method and apparatus
Patent number
5,426,865
Issue date
Jun 27, 1995
Tokyo Electron Limited
Towl Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Stage having electrostatic chuck and plasma processing apparatus us...
Patent number
5,382,311
Issue date
Jan 17, 1995
Tokyo Electron Limited
Kenji Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reduced pressure processing system and reduced pressure processing...
Patent number
5,314,541
Issue date
May 24, 1994
Tokyo Electron Limited
Masasi Saito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface-heating apparatus and surface-treating method
Patent number
5,240,556
Issue date
Aug 31, 1993
Tokyo Electron Limited
Yoshio Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Probe apparatus
Patent number
5,198,755
Issue date
Mar 30, 1993
Tokyo Electron Limited
Towl Ikeda
G01 - MEASURING TESTING
Information
Patent Grant
Sealing device
Patent number
5,133,561
Issue date
Jul 28, 1992
Tokyo Electron Limited
Hisashi Hattori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCESSI...
Publication number
20120118231
Publication date
May 17, 2012
TOKYO ELECTRON LIMITED
Toshio TAKAGI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND GAS INJECTION MEMBER
Publication number
20110283942
Publication date
Nov 24, 2011
TOKYO ELECTRON LIMITED
Teruo IWATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLANE HEATER
Publication number
20100224620
Publication date
Sep 9, 2010
COVALENT MATERIALS CORPORATION
Kazuo Shibata
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF SUBSTRATE TREATMENT, RECORDING MEDIUM AND SUBSTRATE TREAT...
Publication number
20090220692
Publication date
Sep 3, 2009
TOKYO ELECTRON LIMITED
Toshio Takagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Shower Head and Film-Forming Device Using the Same
Publication number
20070272154
Publication date
Nov 29, 2007
Manabu Amikura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gasification monitor, method for detecting mist, film forming metho...
Publication number
20070212485
Publication date
Sep 13, 2007
Teruo Iwata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Loading table and heat treating apparatus having the loading table
Publication number
20060199131
Publication date
Sep 7, 2006
Hiroo Kawasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film forming apparatus
Publication number
20050223987
Publication date
Oct 13, 2005
Teruo Iwata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gasification monitor, method for detecting mist, film forming metho...
Publication number
20050011448
Publication date
Jan 20, 2005
Teruo Iwata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas processing apparatus for object to be processed
Publication number
20020096117
Publication date
Jul 25, 2002
Munehisa Futamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...