Claims
- 1. A gas processing apparatus for an object to be processed, comprising:
a processing chamber; a susceptor provided within said processing chamber, for supporting an object to be processed; means for supplying a processing gas into said processing chamber to perform a predetermined process on the object; a resistance heater embedded in said susceptor for heating the object; a power line with one end thereof being led out from a surface of said susceptor that is connected to said resistance heater and the another being extended to exterior of said processing chamber; a metal sheath interposed between said surface of said susceptor and a wall of said processing chamber, for surrounding said power line so as to house said power line in an insulated state; an annular end piece provided at an end portion of said metal sheath adjacent to said surface of the susceptor, said annular end piece being in a line contact with said surface of said susceptor; and means for connecting said annular end piece with said surface of the susceptor.
- 2. The gas processing apparatus for an object to be processed as defined in claim 1, wherein:
said annular end piece has an annular edge which is in said line contact with said surface of said susceptor.
- 3. The gas processing apparatus for an object to be processed as defined in claim 1, wherein:
said means for connecting said annular end piece with said surface of said susceptor comprises a screw shaft.
- 4. The gas processing apparatus for an object to be processed as defined in claim 1, wherein:
said annular end piece includes a cylindrical portion extending toward said surface of said susceptor and a seating portion in the form of a flange extending outward from said cylindrical portion, said flange having a hole through which said screw shaft is passed.
- 5. The gas processing apparatus for an object to be processed as defined in claim 4, wherein:
said hole has dimensions such that said screw shaft passes loosely therethrough.
- 6. The gas processing apparatus for an object to be processed as defined in claim 1, wherein:
at least a portion of said sheath includes a bellows.
- 7. The gas processing apparatus for an object to be processed as defined in claim 1, further comprising:
a corrosion-resistant tube made of a non-metallic material interposed between said surface of said susceptor and said wall of said processing chamber, and surrounding said sheath with a space therebetween.
- 8. The gas processing apparatus for an object to be processed as defined in claim 1, further comprising:
an inert gas supply means for supplying an inert gas into said sheath.
- 9. The gas processing apparatus for an object to be processed as defined in claim 8, wherein:
said inert gas supply means comprises a gas supply pipeline that passes through said wall of said processing chamber.
- 10. The gas processing apparatus for an object to be processed as defined in claim 1, further having:
a corrosion-resistant tube made of a non-metallic material interposed between said surface of said susceptor and said wall of said processing chamber, and surrounding said sheath with a space therebetween; an inert gas supply means for supplying an inert gas into said sheath; a blow hole provided in said sheath in such a manner that an inert gas supplied into said sheath is permitted to flow out through said space between said sheath and said corrosion-resistant tube; and a blow hole provided in said corrosion-resistant tube in such a manner that said inert gas in said space is permitted to flow out into said processing chamber.
- 11. The gas processing apparatus for an object to be processed as defined in claim 1, wherein:
said processing chamber includes an upper casing and a base plate portion attached in a freely removable manner to a lower edge portion of said upper casing, said susceptor is mounted by support means on an inner side of said base plate portion, and said base plate is capable of being raised and lowered by an elevator means.
- 12. A gas processing apparatus for an object to be processed, comprising:
a processing chamber; a susceptor, provided within said processing chamber, for supporting an object to be processed; means for supplying a processing gas into said processing chamber to perform a predetermined process on said object; a resistance heater embedded in said susceptor for heating said object; a power line with one end thereof being led out from a surface of said susceptor that is connected to said resistance heater and another end being extended to exterior of said processing chamber; a metal sheath interposed between said surface of said susceptor and a wall of said processing chamber, for surrounding said power line so as to house said power line in an insulated state; an annular end piece provided at an end portion of said metal sheath adjacent to said surface of said susceptor, said annular end piece being in a spot contact with said surface of said susceptor; and means for connecting said annular end piece with said surface of said susceptor.
- 13. The gas processing apparatus for an object to be processed as defined in claim 12, wherein:
said annular end piece has local protrusions on an edge thereof facing said surface of said susceptor, said protrusions being in contact with said surface of said susceptor, thus providing said spot contact.
- 14. The gas processing apparatus for an object to be processed as defined in claim 12, wherein:
said means for connecting said annular end piece with said surface of said susceptor includes a screw shaft.
- 15. The gas processing apparatus for an object to be processed as defined in claim 14, wherein:
said end piece includes a cylindrical portion extending toward said surface of said susceptor and a seating portion in the form of a flange extending outward from said cylindrical portion, said flange having a hole through which said screw shaft is passed.
- 16. The gas processing apparatus for an object to be processed as defined in claim 15, wherein:
said hole has dimensions such that said screw shaft passes loosely therethrough.
- 17. The gas processing apparatus for an object to be processed as defined in claim 12, wherein:
at least a portion of said sheath comprises a bellows.
- 18. The gas processing apparatus for an object to be processed as defined in claim 12, further comprising:
a corrosion-resistant tube made of a non-metallic material interposed between said surface of the susceptor and said wall of the processing chamber, and surrounding said sheath with a space therebetween
- 19. The gas processing apparatus for an object to be processed as defined in claim 12, further comprising:
an inert gas supply means for supplying an inert gas into said sheath.
- 20. The gas processing apparatus for an object to be processed as defined in claim 19, wherein:
said inert gas supply means includes a gas supply pipeline that passes through said wall of said processing chamber.
- 21. The gas processing apparatus for an object to be processed as defined in claim 12, further having:
a corrosion-resistant tube made of a non-metallic material interposed between said surface of said susceptor and said wall of said processing chamber, and surrounding said sheath with a space therebetween; an inert gas supply means for supplying an inert gas into said sheath; a blow hole provided in said sheath in such a manner that an inert gas supplied into said sheath is permitted to flow out through said space between said sheath and said corrosion-resistant tube; and a blow hole provided in said corrosion-resistant tube in such a manner that said inert gas in said space is permitted to flow out into said processing chamber.
- 22. The gas processing apparatus for an object to be processed as defined in claim 12, wherein:
said processing chamber comprises an upper casing and a base plate portion attached in a freely removable manner to a lower edge portion of said upper casing, said susceptor is mounted by support means on an inner side of said base plate portion, and said base plate is capable of being raised and lowered by an elevator means.
- 23. A gas processing apparatus for an object to be processed, comprising:
a processing chamber; a susceptor, provided within said processing chamber, for supporting an object to be processed; means for supplying a processing gas into said processing chamber to perform a predetermined process on said object; a resistance heater embedded in said susceptor for heating said object; a power line with one end thereof being led out from a surface of said susceptor that is connected to said resistance heater and another end being extended to exterior of said processing chamber; a metal sheath interposed between said surface of said susceptor and a wall of said processing chamber, for surrounding said power line so as to house said power line in an insulated state, said sheath having an annular end piece provided at an end portion thereof adjacent to said surface of said susceptor; and means for connecting said annular end piece with said surface of said susceptor in such a manner that said end piece is not in contact with said surface of said susceptor and a space is formed between said end piece and said surface of said susceptor.
- 24. The gas processing apparatus for an object to be processed as defined in claim 23, wherein:
said means for connecting said annular end piece with said surface of said susceptor includes a screw shaft passed through said end piece and screwed partially into said surface of said susceptor.
- 25. The gas processing apparatus for an object to be processed as defined in claim 23, wherein:
said annular end piece includes a cylindrical portion extending toward said surface of said susceptor and a seating portion in the form of a flange extending outward from said cylindrical portion, said flange having a hole through which said screw shaft is passed.
- 26. The gas processing apparatus for an object to be processed as defined in claim 25, wherein:
said hole has dimensions such that said screw shaft passes loosely therethrough.
- 27. The gas processing apparatus for an object to be processed as defined in claim 23, wherein:
at least a portion of said sheath includes a bellows.
- 28. The gas processing apparatus for an object to be processed as defined in claim 23, further comprising:
a corrosion-resistant tube made to a non-metallic material interposed between said surface of said susceptor and said wall of said processing chamber, and surrounding said sheath with a space therebetween.
- 29. The gas processing apparatus for an object to be processed as defined in claim 23, further comprising:
an inert gas supply means for supplying an inert gas into said sheath.
- 30. The gas processing apparatus for an object to be processed as defined in claim 29, wherein:
said inert gas supply means includes a gas supply pipeline that passes through said wall of said processing chamber.
- 31. The gas processing apparatus for an object to be processed as defined in claim 23, further having:
a corrosion-resistant tube made of a nonmetallic material interposed between said surface of said susceptor and said wall of the processing chamber, and surrounding said sheath with a space therebetween; an inert gas supply means for supplying an inert gas into said sheath; a blow hole provided in said sheath in such a manner that an inert gas supplied into said sheath is permitted to flow through said space between said sheath and said corrosion-resistant tube; and a blow hole provided in said corrosion-resistant tube in such a manner that said inert gas in said space is permitted to flow out into said processing chamber.
- 32. The gas processing apparatus for an object to be processed as defined in claim 23, wherein:
said processing chamber includes an upper casing and a base plate portion attached in a freely removable manner to a lower edge portion of said upper casing, said susceptor is mounted by support means on an inner side of said base plate portion, and said base plate is capable of being raised and lowered by an elevator means.
Priority Claims (1)
Number |
Date |
Country |
Kind |
164878/1997 |
Jun 1997 |
JP |
|
Parent Case Info
[0001] This application is a continuation-in-part of U.S. patent application Ser. No. 09/092,981 filed on Jun. 8, 1998 and claims priority therefrom under 35 U.S.C. §120.
Divisions (1)
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Number |
Date |
Country |
Parent |
09436624 |
Nov 1999 |
US |
Child |
10060171 |
Feb 2002 |
US |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09092981 |
Jun 1998 |
US |
Child |
09436624 |
Nov 1999 |
US |