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Patents Grants
last 30 patents
Information
Patent Grant
Fluorescent X-ray analysis apparatus
Patent number
6,885,726
Issue date
Apr 26, 2005
Mitsubishi Denki Kabushiki Kaisha
Yasushi Uehara
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method of manufacturing semiconductor device which includes a capac...
Patent number
6,420,191
Issue date
Jul 16, 2002
Mitsubishi Denki Kabushiki Kaisha
Takeharu Kuroiwa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device which includes a capacitor having a lower elec...
Patent number
6,239,460
Issue date
May 29, 2001
Mitsubishi Denki Kabushiki Kaisha
Takeharu Kuroiwa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High dielectric constant thin film structure, method for forming hi...
Patent number
6,165,556
Issue date
Dec 26, 2000
Mitsubishi Denki Kabushiki Kaisha
Takaaki Kawahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High dielectric constant thin film structure, method for forming hi...
Patent number
6,101,085
Issue date
Aug 8, 2000
Mitsubishi Denki Kabushiki Kaisha
Takaaki Kawahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device having a capacitor electrode formed of iridum...
Patent number
6,015,989
Issue date
Jan 18, 2000
Mitsubishi Denki Kabushiki Kaisha
Tsuyosi Horikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High dielectric constant thin film structure, method for forming hi...
Patent number
5,989,635
Issue date
Nov 23, 1999
Mitsubishi Denki Kabushiki Kaisha
Takaaki Kawahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High dielectric constant thin film structure, method for forming hi...
Patent number
5,882,410
Issue date
Mar 16, 1999
Mitsubishi Denki Kabushiki Kaisha
Takaaki Kawahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High dielectric constant thin film structure method for forming hig...
Patent number
5,834,060
Issue date
Nov 10, 1998
Mitsubishi Denki Kabushiki Kaisha
Takaaki Kawahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of etching a wafer having high anisotropy with a plasma gas...
Patent number
5,304,775
Issue date
Apr 19, 1994
Mitsubishi Denki Kabushiki Kaisha
Nobuo Fujiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer treating device utilizing a plasma
Patent number
4,982,138
Issue date
Jan 1, 1991
Mitsubishi Denki Kabushiki Kaisha
Nobuo Fujiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer treating device utilizing ECR plasma
Patent number
4,915,979
Issue date
Apr 10, 1990
Mitsubishi Denki Kabushiki Kaisha
Tomoaki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer treating apparatus utilizing a plasma
Patent number
4,877,509
Issue date
Oct 31, 1989
Mitsubishi Denki Kabushiki Kaisha
Toshiaki Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Fluorescent X-ray analysis apparatus
Publication number
20040109534
Publication date
Jun 10, 2004
Mitsubishi Denki Kabushiki Kaisha
Yasushi Uehara
G01 - MEASURING TESTING
Information
Patent Application
Semiconductor device which includes a capacitor having a lower elec...
Publication number
20010009282
Publication date
Jul 26, 2001
Mitsubishi Denki Kabushiki Kaisha
Takeharu Kuroiwa
H01 - BASIC ELECTRIC ELEMENTS