Tetsu Oosawa

Person

Sagamihara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Microwave plasma processing apparatus having a vacuum pump located...
- Patent number 6,358,324
- Issue date Mar 19, 2002
- Tokyo Electron Limited
- Toshiaki Hongoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer apparatus and heat treatment system using the same
- Patent number 6,032,083
- Issue date Feb 29, 2000
- Tokyo Electron Limited
- Tetsu Oosawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus, transfer method, treatment apparatus and treatm...
- Patent number 5,984,607
- Issue date Nov 16, 1999
- Tokyo Electron Limited
- Tetsu Oosawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring apparatus
- Patent number 5,445,486
- Issue date Aug 29, 1995
- Tokyo Electron Sagami Limited
- Hirofumi Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,435,683
- Issue date Jul 25, 1995
- Tokyo Electron Limited
- Tetsu Oosawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,405,230
- Issue date Apr 11, 1995
- Tokyo Electron Limited
- Hiroo Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load-lock unit and wafer transfer system
- Patent number 5,340,261
- Issue date Aug 23, 1994
- Tokyo Electron Limited
- Tetsu Oosawa
- H01 - BASIC ELECTRIC ELEMENTS

Tetsu Oosawa

Person

Patents Grantslast 30 patents

Microwave plasma processing apparatus having a vacuum pump located...

Substrate transfer apparatus and heat treatment system using the same

Transfer apparatus, transfer method, treatment apparatus and treatm...

Substrate transferring apparatus

Load-lock unit and wafer transfer system

Load-lock unit and wafer transfer system

Load-lock unit and wafer transfer system