Tetsuaki Inada

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 11,926,893
- Issue date Mar 12, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate mounting plate for substrate processing apparatus
- Patent number D981970
- Issue date Mar 28, 2023
- Kokusai Electric Corporation
- Tetsuaki Inada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,499,224
- Issue date Nov 15, 2022
- Kokusai Electric Corporation
- Tetsuaki Inada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,473,196
- Issue date Oct 18, 2022
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and metal member
- Patent number 11,035,037
- Issue date Jun 15, 2021
- Kokusai Electric Corporation
- Tetsuaki Inada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,685,832
- Issue date Jun 16, 2020
- Kokusai Electric Corporation
- Tetsuaki Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,604,839
- Issue date Mar 31, 2020
- Kokusai Electric Corporation
- Tetsuaki Inada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and substrate processing...
- Patent number 9,546,422
- Issue date Jan 17, 2017
- Hitachi Kokusai Electric Inc.
- Yoshihiko Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment of semiconductor wafers where upper heater directly...
- Patent number 5,960,159
- Issue date Sep 28, 1999
- Kokusai Electric Co., Ltd.
- Fumihide Ikeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEAL STRUCTURE, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFA...
- Publication number 20230274916
- Publication date Aug 31, 2023
- Kokusai Electric Corporation
- Takayuki SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230245869
- Publication date Aug 3, 2023
- Kokusai Electric Corporation
- Tetsuaki INADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230230818
- Publication date Jul 20, 2023
- Kokusai Electric Corporation
- Tetsuaki Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUC...
- Publication number 20230212753
- Publication date Jul 6, 2023
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230207277
- Publication date Jun 29, 2023
- Kokusai Electric Corporation
- Tetsuaki INADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230041284
- Publication date Feb 9, 2023
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20230002892
- Publication date Jan 5, 2023
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220230846
- Publication date Jul 21, 2022
- Kokusai Electric Corporation
- Takeshi YASUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUSCEPTOR COVER, METHOD OF MANUFACT...
- Publication number 20220139760
- Publication date May 5, 2022
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, REFLECTOR AND METHOD OF MANUFACTURI...
- Publication number 20220005678
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20210301397
- Publication date Sep 30, 2021
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200347498
- Publication date Nov 5, 2020
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METAL MEMBER
- Publication number 20190186000
- Publication date Jun 20, 2019
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20160053373
- Publication date Feb 25, 2016
- Hitachi Kokusai Electric Inc.
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150252474
- Publication date Sep 10, 2015
- Hitachi Kokusai Electric Inc.
- Hideharu ITATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150087160
- Publication date Mar 26, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING MET...
- Publication number 20150050815
- Publication date Feb 19, 2015
- Hitachi Kokusai Electric Inc.
- Yoshihiko Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20140087567
- Publication date Mar 27, 2014
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INJECTION MEMBER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA...
- Publication number 20130276983
- Publication date Oct 24, 2013
- Hitachi Kokusai Electric Inc.
- Yong Sung Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tetsuaki Inada

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing method and non...

Substrate mounting plate for substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus

Substrate processing apparatus and metal member

Substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Semiconductor device manufacturing method and substrate processing...

Heat treatment of semiconductor wafers where upper heater directly...

Patents Applicationslast 30 patents

SEAL STRUCTURE, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFA...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, SUSCEPTOR COVER, METHOD OF MANUFACT...

SUBSTRATE PROCESSING APPARATUS, REFLECTOR AND METHOD OF MANUFACTURI...

Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND METAL MEMBER

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING MET...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

INJECTION MEMBER FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PLASMA...