Tetsuro NISHIYAMA

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum apparatus and charged particle beam writing apparatus
- Patent number 10,867,769
- Issue date Dec 15, 2020
- NuFlare Technology, Inc.
- Keita Ideno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus, aperture unit, and charged...
- Patent number 9,449,792
- Issue date Sep 20, 2016
- NuFlare Technology, Inc.
- Tetsuro Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflector for equipment of electron beam lithography and equipment...
- Patent number 7,521,689
- Issue date Apr 21, 2009
- Nuflare Technology, Inc.
- Yoshimasa Sanmiya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM APPARATUS AND CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20190371567
- Publication date Dec 5, 2019
- NuFlare Technology, Inc.
- Keita IDENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, APERTURE UNIT, AND CHARGED...
- Publication number 20140273536
- Publication date Sep 18, 2014
- NuFlare Technology, Inc.
- Tetsuro NISHIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFLECTOR FOR EQUIPMENT OF ELECTRON BEAM LITHOGRAPHY AND EQUIPMENT...
- Publication number 20070181819
- Publication date Aug 9, 2007
- NuFlare Technology, Inc.
- Yoshimasa SANMIYA
- B82 - NANO-TECHNOLOGY