Tetsuya Tahara

Person

Hikari, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Operating method of vacuum processing system and vacuum processing...
- Patent number 6,941,185
- Issue date Sep 6, 2005
- Hitachi, Ltd.
- Kouji Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum process apparatus and method of operating the same
- Patent number 6,917,844
- Issue date Jul 12, 2005
- Hitachi, Ltd.
- Tomoyuki Kawano
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Operating method of vacuum processing system and vacuum processing...
- Patent number 6,885,906
- Issue date Apr 26, 2005
- Hitachi, Ltd.
- Kouji Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating method of vacuum processing system and vacuum processing...
- Patent number 6,853,872
- Issue date Feb 8, 2005
- Hitachi, Ltd.
- Kouji Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum process apparatus and method of operating the same
- Patent number 6,745,093
- Issue date Jun 1, 2004
- Hitachi, Ltd.
- Tomoyuki Kawano
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Operating method of vacuum processing system and vacuum processing...
- Patent number 6,714,832
- Issue date Mar 30, 2004
- Hitachi, Ltd.
- Kouji Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating method of vacuum processing system and vacuum processing...
- Patent number 6,069,096
- Issue date May 30, 2000
- Hitachi, Ltd.
- Kouji Nishihata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Vacuum process apparatus and method of operating the same
- Publication number 20040225393
- Publication date Nov 11, 2004
- Tomoyuki Kawano
- G05 - CONTROLLING REGULATING
Information Patent Application
Operating method of vacuum processing system and vacuum processing...
- Publication number 20020133257
- Publication date Sep 19, 2002
- Kouji Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Operating method of vacuum processing system and vacuum processing...
- Publication number 20020133260
- Publication date Sep 19, 2002
- Kouji Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Operating method of vacuum processing system and vacuum processing...
- Publication number 20020133256
- Publication date Sep 19, 2002
- Kouji Nishihata
- H01 - BASIC ELECTRIC ELEMENTS

Tetsuya Tahara

Person

Patents Grantslast 30 patents

Operating method of vacuum processing system and vacuum processing...

Vacuum process apparatus and method of operating the same

Operating method of vacuum processing system and vacuum processing...

Operating method of vacuum processing system and vacuum processing...

Vacuum process apparatus and method of operating the same

Operating method of vacuum processing system and vacuum processing...

Operating method of vacuum processing system and vacuum processing...

Patents Applicationslast 30 patents

Vacuum process apparatus and method of operating the same

Operating method of vacuum processing system and vacuum processing...

Operating method of vacuum processing system and vacuum processing...

Operating method of vacuum processing system and vacuum processing...