Thai-Cheng Chua

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Monolithic modular microwave source with integrated temperature con...
- Patent number 12,144,090
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- James Carducci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Modular high-frequency source
- Patent number 12,002,654
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming silicon nitride films using microwave plasma
- Patent number 11,955,331
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic modular microwave source with integrated process gas dis...
- Patent number 11,881,384
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- James Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular microwave source with local lorentz force
- Patent number 11,721,532
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular microwave source with embedded ground surface
- Patent number 11,670,489
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic modular microwave source with integrated temperature con...
- Patent number 11,564,292
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- James Carducci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Modular high-frequency source with integrated gas distribution
- Patent number 11,501,955
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Hanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal break for high-frequency antennae
- Patent number 11,488,796
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave plasma source
- Patent number 11,404,248
- Issue date Aug 2, 2022
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote modular high-frequency source
- Patent number 11,393,661
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- Hanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequential deposition and high frequency plasma treatment of deposi...
- Patent number 11,217,443
- Issue date Jan 4, 2022
- Applied Materials, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phased array modular high-frequency source
- Patent number 11,114,282
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Philip Allan Kraus
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Modular high-frequency source
- Patent number 11,081,317
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave source with embedded ground surface
- Patent number 11,049,694
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave source with local Lorentz force
- Patent number 11,037,764
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular high-frequency source with integrated gas distribution
- Patent number 10,943,768
- Issue date Mar 9, 2021
- Applied Materials, Inc.
- Hanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with multiple embedded electrodes
- Patent number 10,937,678
- Issue date Mar 2, 2021
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for coupling a voltage to spatially segmented portions of th...
- Patent number 10,763,150
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Roger Alan Lindley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave plasma source
- Patent number 10,748,745
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phased array modular high-frequency source
- Patent number 10,720,311
- Issue date Jul 21, 2020
- Applied Materials, Inc.
- Philip Allan Kraus
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
System for coupling a voltage to portions of a substrate
- Patent number 10,714,372
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Thai Cheng Chua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Symmetric and irregular shaped plasmas using modular microwave sources
- Patent number 10,707,058
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with multiple embedded electrodes
- Patent number 10,510,575
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses, systems and methods for three-dimensional printing
- Patent number 10,507,549
- Issue date Dec 17, 2019
- VELO3D, INC.
- Benyamin Buller
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Phased array modular high-frequency source
- Patent number 10,504,699
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses, systems and methods for three-dimensional printing
- Patent number 10,493,564
- Issue date Dec 3, 2019
- VELO3D, INC.
- Benyamin Buller
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Apparatuses, systems and methods for three-dimensional printing
- Patent number 9,821,411
- Issue date Nov 21, 2017
- VELO3D, INC.
- Benyamin Buller
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatuses, systems and methods for three-dimensional printing
- Patent number 9,399,256
- Issue date Jul 26, 2016
- VELO3D, INC.
- Benyamin Buller
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrochromic device with improved transparent conductor and metho...
- Patent number 9,081,245
- Issue date Jul 14, 2015
- Intermolecular, Inc.
- Minh Huu Le
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
HIGH EFFICIENCY MICROWAVE PLASMA APPLICATOR
- Publication number 20240379329
- Publication date Nov 14, 2024
- Applied Materials, Inc,
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA APPLICATOR WITH REPLACEABLE DIELECTRIC PLATE
- Publication number 20240379331
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOCRYSTALLINE DIAMOND WITH AMORPHOUS INTERFACIAL LAYER
- Publication number 20240352621
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Sze Chieh Tan
- C30 - CRYSTAL GROWTH
Information Patent Application
MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20240282554
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Thai Cheng CHUA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL REDUCTION OF SURFACE METAL OXIDES
- Publication number 20240191353
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Yoon Ah Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...
- Publication number 20240186118
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- JAMES CARDUCCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR MICROWAVE SOURCE WITH INTEGRATED OPTICAL SENSORS
- Publication number 20240153795
- Publication date May 9, 2024
- Applied Materials, Inc.
- Adam Fischbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOTROPIC SILICON NITRIDE REMOVAL
- Publication number 20240120210
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Mikhail Korolik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CON...
- Publication number 20230135935
- Publication date May 4, 2023
- Applied Materials, Inc.
- James Carducci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOW TEMPERATURE SELECTIVE ETCHING OF SILICON NITRIDE USING MICROWAV...
- Publication number 20230109912
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL PRINTING
- Publication number 20230040341
- Publication date Feb 9, 2023
- Velo3D, Inc.
- Benyamin Buller
- B22 - CASTING POWDER METALLURGY
Information Patent Application
MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE
- Publication number 20230026546
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED METHODS FOR GRAPHENE FORMATION
- Publication number 20230017035
- Publication date Jan 19, 2023
- Applied Materials, Inc.
- Bencherki Mebarki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus For Single Chamber Deposition And Etch
- Publication number 20220389571
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR MICROWAVE PLASMA SOURCE
- Publication number 20220344131
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Philip Allan KRAUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20220319812
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Hanh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES, SYSTEMS AND METHODS FOR THREE-DIMENSIONAL PRINTING
- Publication number 20220297186
- Publication date Sep 22, 2022
- Velo3D, Inc.
- Benyamin Buller
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHOD AND APPARATUS OF LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VA...
- Publication number 20220254641
- Publication date Aug 11, 2022
- Applied Materials, Inc.
- Thai Cheng Chua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEAN UNIT FOR CHAMBER EXHAUST CLEANING
- Publication number 20210391156
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Kelvin Chan
- B08 - CLEANING
Information Patent Application
MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20210327685
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Thai Cheng CHUA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MODULAR MICROWAVE SOURCE WITH EMBEDDED GROUND SURFACE
- Publication number 20210313153
- Publication date Oct 7, 2021
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES
- Publication number 20210313213
- Publication date Oct 7, 2021
- Applied Materials, Inc.
- Philip Allan KRAUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MICROWAVE SOURCE WITH LOCAL LORENTZ FORCE
- Publication number 20210287882
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES
- Publication number 20210183681
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Philip Allan KRAUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR HIGH-FREQUENCY SOURCE WITH INTEGRATED GAS DISTRIBUTION
- Publication number 20210183621
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Hanh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE
- Publication number 20210098230
- Publication date Apr 1, 2021
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...
- Publication number 20210098231
- Publication date Apr 1, 2021
- Applied Materials, Inc.
- James Carducci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MICROWAVE SOURCE WITH EMBEDDED GROUND SURFACE
- Publication number 20210098236
- Publication date Apr 1, 2021
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CON...
- Publication number 20210100076
- Publication date Apr 1, 2021
- Applied Materials, Inc.
- James Carducci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYMMETRIC AND IRREGULAR SHAPED PLASMAS USING MODULAR MICROWAVE SOURCES
- Publication number 20200402769
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS

Thai-Cheng Chua

Person

Patents Grantslast 30 patents

Monolithic modular microwave source with integrated temperature con...

Modular high-frequency source

Method of forming silicon nitride films using microwave plasma

Monolithic modular microwave source with integrated process gas dis...

Modular microwave source with local lorentz force

Modular microwave source with embedded ground surface

Monolithic modular microwave source with integrated temperature con...

Modular high-frequency source with integrated gas distribution

Thermal break for high-frequency antennae

Modular microwave plasma source

Remote modular high-frequency source

Sequential deposition and high frequency plasma treatment of deposi...

Phased array modular high-frequency source

Modular high-frequency source

Modular microwave source with embedded ground surface

Modular microwave source with local Lorentz force

Modular high-frequency source with integrated gas distribution

Substrate support with multiple embedded electrodes

System for coupling a voltage to spatially segmented portions of th...

Modular microwave plasma source

Phased array modular high-frequency source

System for coupling a voltage to portions of a substrate

Symmetric and irregular shaped plasmas using modular microwave sources

Substrate support with multiple embedded electrodes

Apparatuses, systems and methods for three-dimensional printing

Phased array modular high-frequency source

Apparatuses, systems and methods for three-dimensional printing

Apparatuses, systems and methods for three-dimensional printing

Apparatuses, systems and methods for three-dimensional printing

Electrochromic device with improved transparent conductor and metho...

Patents Applicationslast 30 patents

HIGH EFFICIENCY MICROWAVE PLASMA APPLICATOR

MICROWAVE PLASMA APPLICATOR WITH REPLACEABLE DIELECTRIC PLATE

NANOCRYSTALLINE DIAMOND WITH AMORPHOUS INTERFACIAL LAYER

MODULAR HIGH-FREQUENCY SOURCE

ELECTROCHEMICAL REDUCTION OF SURFACE METAL OXIDES

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...

MODULAR MICROWAVE SOURCE WITH INTEGRATED OPTICAL SENSORS

ISOTROPIC SILICON NITRIDE REMOVAL

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CON...

LOW TEMPERATURE SELECTIVE ETCHING OF SILICON NITRIDE USING MICROWAV...

THREE-DIMENSIONAL PRINTING

MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE

INTEGRATED METHODS FOR GRAPHENE FORMATION

Apparatus For Single Chamber Deposition And Etch

MODULAR MICROWAVE PLASMA SOURCE

REMOTE MODULAR HIGH-FREQUENCY SOURCE

APPARATUSES, SYSTEMS AND METHODS FOR THREE-DIMENSIONAL PRINTING

METHOD AND APPARATUS OF LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VA...

CLEAN UNIT FOR CHAMBER EXHAUST CLEANING

MODULAR HIGH-FREQUENCY SOURCE

MODULAR MICROWAVE SOURCE WITH EMBEDDED GROUND SURFACE

SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES

MODULAR MICROWAVE SOURCE WITH LOCAL LORENTZ FORCE

SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES

MODULAR HIGH-FREQUENCY SOURCE WITH INTEGRATED GAS DISTRIBUTION

MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...

MODULAR MICROWAVE SOURCE WITH EMBEDDED GROUND SURFACE

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CON...

SYMMETRIC AND IRREGULAR SHAPED PLASMAS USING MODULAR MICROWAVE SOURCES