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Theo Rijks
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Spring structure for MEMS device
Patent number
8,098,120
Issue date
Jan 17, 2012
EPCOS AG
Peter G. Steeneken
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Reduction of Air Damping in MEMS Device
Publication number
20100001615
Publication date
Jan 7, 2010
EPCOS AG
Peter G. Steeneken
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Spring Structure For Mems Device
Publication number
20080135385
Publication date
Jun 12, 2008
Koninklijke Philips Electronics N.V.
Peter G. Steeneken
H01 - BASIC ELECTRIC ELEMENTS