Thomas A. Walsh

Person

San Luis Obispo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for use in grind spindle alignment
- Patent number 9,610,669
- Issue date Apr 4, 2017
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods of processing substrates
- Patent number 9,393,669
- Issue date Jul 19, 2016
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Grant
Method of grinding wafer stacks to provide uniform residual silicon...
- Patent number 9,082,713
- Issue date Jul 14, 2015
- Strasbaugh
- Thomas Brake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of wafer grinding
- Patent number 8,968,052
- Issue date Mar 3, 2015
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Method, apparatus and system for use in processing wafers
- Patent number 8,565,919
- Issue date Oct 22, 2013
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Grant
Grinding apparatus having an extendable wheel mount
- Patent number 8,133,093
- Issue date Mar 13, 2012
- Strasbaugh, Inc.
- Michael Vogtmann
- B24 - GRINDING POLISHING
Information Patent Grant
Method, apparatus and system for use in processing wafers
- Patent number 8,052,504
- Issue date Nov 8, 2011
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Grant
Grinding apparatus and method
- Patent number 7,458,878
- Issue date Dec 2, 2008
- Strasbaugh, A California Corporation
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Method, apparatus and system for use in processing wafers
- Patent number 7,249,992
- Issue date Jul 31, 2007
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer carrier pivot mechanism
- Patent number 7,156,946
- Issue date Jan 2, 2007
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Grinding apparatus and method
- Patent number 7,118,446
- Issue date Oct 10, 2006
- Strasbaugh, A California Corporation
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical-mechanical planarization tool force calibration method and...
- Patent number 7,040,955
- Issue date May 9, 2006
- Strasbaugh
- William Kalenian
- B24 - GRINDING POLISHING
Information Patent Grant
Parallel alignment method and apparatus for chemical mechanical pol...
- Patent number 6,935,934
- Issue date Aug 30, 2005
- Lam Research Corporation
- Thomas Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Parallel alignment method and apparatus for chemical mechanical pol...
- Patent number 6,354,926
- Issue date Mar 12, 2002
- Lam Research Corporation
- Thomas Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus and method
- Patent number 6,045,716
- Issue date Apr 4, 2000
- Strasbaugh
- Thomas Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Grinding process and apparatus for planarizing sawed wafers
- Patent number 5,964,646
- Issue date Oct 12, 1999
- Strasbaugh
- Salman M Kassir
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor wafer polishing appartus and method
- Patent number 5,605,487
- Issue date Feb 25, 1997
- MEMC Electric Materials, Inc.
- Harold J. Hileman
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF GRINDING WAFER STACKS TO PROVIDE UNIFORM RESIDUAL SILICON...
- Publication number 20150118826
- Publication date Apr 30, 2015
- Strasbaugh
- William J. Kalenian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR USE IN GRIND SPINDLE ALIGNMENT
- Publication number 20140134927
- Publication date May 15, 2014
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS OF PROCESSING SUBSTRATES
- Publication number 20130130593
- Publication date May 23, 2013
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS OF WAFER GRINDING
- Publication number 20130102227
- Publication date Apr 25, 2013
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Application
METHOD, APPARATUS AND SYSTEM FOR USE IN PROCESSING WAFERS
- Publication number 20120046781
- Publication date Feb 23, 2012
- Strasbaugh, a California corporation
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Application
Grinding apparatus having an extendable wheel mount
- Publication number 20100093264
- Publication date Apr 15, 2010
- Strasbaugh, Inc.
- Michael Vogtmann
- B24 - GRINDING POLISHING
Information Patent Application
METHOD, APPARATUS AND SYSTEM FOR USE IN PROCESSING WAFERS
- Publication number 20070269986
- Publication date Nov 22, 2007
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Application
Grinding apparatus and method
- Publication number 20070128983
- Publication date Jun 7, 2007
- Strasbaugh, a California corporation
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Application
Wafer Carrier Pivot Mechanism
- Publication number 20070105491
- Publication date May 10, 2007
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Application
Chemical-mechanical planarization tool force calibration method and...
- Publication number 20060205322
- Publication date Sep 14, 2006
- Strasbaugh
- William Kalenian
- B24 - GRINDING POLISHING
Information Patent Application
Method, apparatus and system for use in processing wafers
- Publication number 20060035563
- Publication date Feb 16, 2006
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Application
Wafer carrier pivot mechanism
- Publication number 20040226656
- Publication date Nov 18, 2004
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Application
Grinding apparatus and method
- Publication number 20040198196
- Publication date Oct 7, 2004
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Application
Parallel alignment method and apparatus for chemical mechanical pol...
- Publication number 20020055326
- Publication date May 9, 2002
- LAM RESEARCH CORPORATION
- Thomas Walsh
- B24 - GRINDING POLISHING

Thomas A. Walsh

Person

Patents Grantslast 30 patents

Methods and systems for use in grind spindle alignment

Systems and methods of processing substrates

Method of grinding wafer stacks to provide uniform residual silicon...

Systems and methods of wafer grinding

Method, apparatus and system for use in processing wafers

Grinding apparatus having an extendable wheel mount

Method, apparatus and system for use in processing wafers

Grinding apparatus and method

Method, apparatus and system for use in processing wafers

Wafer carrier pivot mechanism

Grinding apparatus and method

Chemical-mechanical planarization tool force calibration method and...

Parallel alignment method and apparatus for chemical mechanical pol...

Parallel alignment method and apparatus for chemical mechanical pol...

Chemical mechanical polishing apparatus and method

Grinding process and apparatus for planarizing sawed wafers

Semiconductor wafer polishing appartus and method

Patents Applicationslast 30 patents

METHOD OF GRINDING WAFER STACKS TO PROVIDE UNIFORM RESIDUAL SILICON...

METHODS AND SYSTEMS FOR USE IN GRIND SPINDLE ALIGNMENT

SYSTEMS AND METHODS OF PROCESSING SUBSTRATES

SYSTEMS AND METHODS OF WAFER GRINDING

METHOD, APPARATUS AND SYSTEM FOR USE IN PROCESSING WAFERS

Grinding apparatus having an extendable wheel mount

METHOD, APPARATUS AND SYSTEM FOR USE IN PROCESSING WAFERS

Grinding apparatus and method

Wafer Carrier Pivot Mechanism

Chemical-mechanical planarization tool force calibration method and...

Method, apparatus and system for use in processing wafers

Wafer carrier pivot mechanism

Grinding apparatus and method

Parallel alignment method and apparatus for chemical mechanical pol...