Thomas D. Chen

Person

Malden, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical microphone with differential capacitive sensing
- Patent number 10,123,131
- Issue date Nov 6, 2018
- Invensense, Inc.
- Fang Liu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Microelectromechanical microphone having a stationary inner region
- Patent number 10,045,126
- Issue date Aug 7, 2018
- Invensense, Inc.
- Renata Melamud Berger
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Microphone system with a stop member
- Patent number 9,338,559
- Issue date May 10, 2016
- Invensense, Inc.
- Jicheng Yang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Dual single-crystal backplate microphone system and method of fabri...
- Patent number 9,219,963
- Issue date Dec 22, 2015
- Invensense, Inc.
- Kuang L. Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone with aligned apertures
- Patent number 9,078,068
- Issue date Jul 7, 2015
- Invensense, Inc.
- Eric Langlois
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
MEMS microphone with springs and interior support
- Patent number 9,078,069
- Issue date Jul 7, 2015
- Invensense, Inc.
- Sushil Bharatan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method of fabricating a dual single-crystal backplate microphone
- Patent number 8,590,136
- Issue date Nov 26, 2013
- Analog Devices, Inc.
- Kuang L. Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for etching material longitudinally spaced from etch mask
- Patent number 8,455,288
- Issue date Jun 4, 2013
- Analog Devices, Inc.
- Kuang L. Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with roughened surface and method of producing the same
- Patent number 8,389,314
- Issue date Mar 5, 2013
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone with backside cavity that impedes bubble formation
- Patent number 8,208,671
- Issue date Jun 26, 2012
- Analog Devices, Inc.
- Thomas Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone with reduced parasitic capacitance
- Patent number 8,103,027
- Issue date Jan 24, 2012
- Analog Devices, Inc.
- Xin Zhang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method for producing a MEMS device
- Patent number 7,718,457
- Issue date May 18, 2010
- Analog Devices, Inc.
- Thomas Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL MICROPHONE HAVING A STATIONARY INNER REGION
- Publication number 20170013363
- Publication date Jan 12, 2017
- InvenSense, Inc.
- Renata Melamud BERGER
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH DIFFERENTIAL CAPACITIVE SENSING
- Publication number 20160360322
- Publication date Dec 8, 2016
- InvenSense, Inc.
- Fang Liu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MICROPHONE WITH ALIGNED APERTURES
- Publication number 20150271617
- Publication date Sep 24, 2015
- InvenSense, Inc.
- Eric Langlois
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MEMS MICROPHONE WITH SPRINGS AND INTERIOR SUPPORT
- Publication number 20150264465
- Publication date Sep 17, 2015
- InvenSense, Inc.
- Sushil Bharatan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Microphone System with a Stop Member
- Publication number 20140307909
- Publication date Oct 16, 2014
- InvenSense, Inc.
- Jicheng Yang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Dual Single-Crystal Backplate Microphone System and Method Of Fabri...
- Publication number 20140072152
- Publication date Mar 13, 2014
- InvenSense, Inc.
- Kuang L. Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Microphone with Springs and Interior Support
- Publication number 20130177180
- Publication date Jul 11, 2013
- Analog Devices, Inc.
- Sushil Bharatan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
METHOD FOR ETCHING MATERIAL LONGITUDINALLY SPACED FROM ETCH MASK
- Publication number 20130065343
- Publication date Mar 14, 2013
- Analog Devices, Inc.
- Kuang L. Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual Single-Crystal Backplate Microphone System and Method Of Fabri...
- Publication number 20110075865
- Publication date Mar 31, 2011
- Analog Devices, Inc.
- Kuang L. Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microphone with Reduced Parasitic Capacitance
- Publication number 20090202089
- Publication date Aug 13, 2009
- Analog Devices, Inc.
- Xin Zhang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Microphone with Backside Cavity that Impedes Bubble Formation
- Publication number 20090180647
- Publication date Jul 16, 2009
- Analog Devices, Inc.
- Thomas Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microphone with Aligned Apertures
- Publication number 20080304681
- Publication date Dec 11, 2008
- Analog Devices, Inc.
- Eric Langlois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with Roughened Surface and Method of Producing the Same
- Publication number 20080081391
- Publication date Apr 3, 2008
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for producing a MEMS device
- Publication number 20060223291
- Publication date Oct 5, 2006
- Analog Devices, Inc.
- Thomas Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for forming buried oxygen precipitate layers i...
- Publication number 20060115958
- Publication date Jun 1, 2006
- Jason W. Weigold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated circuit with impurity barrier
- Publication number 20050255677
- Publication date Nov 17, 2005
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS device with alternative electrical connections
- Publication number 20040104444
- Publication date Jun 3, 2004
- Bruce K. Wachtmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Thomas D. Chen

Person

Patents Grantslast 30 patents

Microelectromechanical microphone with differential capacitive sensing

Microelectromechanical microphone having a stationary inner region

Microphone system with a stop member

Dual single-crystal backplate microphone system and method of fabri...

Microphone with aligned apertures

MEMS microphone with springs and interior support

Method of fabricating a dual single-crystal backplate microphone

Method for etching material longitudinally spaced from etch mask

MEMS device with roughened surface and method of producing the same

Microphone with backside cavity that impedes bubble formation

Microphone with reduced parasitic capacitance

Method for producing a MEMS device

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL MICROPHONE HAVING A STATIONARY INNER REGION

MICROELECTROMECHANICAL MICROPHONE WITH DIFFERENTIAL CAPACITIVE SENSING

MICROPHONE WITH ALIGNED APERTURES

MEMS MICROPHONE WITH SPRINGS AND INTERIOR SUPPORT

Microphone System with a Stop Member

Dual Single-Crystal Backplate Microphone System and Method Of Fabri...

MEMS Microphone with Springs and Interior Support

METHOD FOR ETCHING MATERIAL LONGITUDINALLY SPACED FROM ETCH MASK

Dual Single-Crystal Backplate Microphone System and Method Of Fabri...

Microphone with Reduced Parasitic Capacitance

Microphone with Backside Cavity that Impedes Bubble Formation

Microphone with Aligned Apertures

MEMS Device with Roughened Surface and Method of Producing the Same

Method and apparatus for producing a MEMS device

Method and apparatus for forming buried oxygen precipitate layers i...

Integrated circuit with impurity barrier

MEMS device with alternative electrical connections