Thomas Kieran Nunan

Person

Carlisle, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Sensing device
- Patent number 11,614,328
- Issue date Mar 28, 2023
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Sagnik Pal
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device and method of manufacturing thereof
- Patent number 11,358,858
- Issue date Jun 14, 2022
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Amir Rahafrooz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Through silicon via (TSV) formation in integrated circuits
- Patent number 11,097,942
- Issue date Aug 24, 2021
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for shielding and biasing in MEMS devices enca...
- Patent number 10,081,535
- Issue date Sep 25, 2018
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating piezoelectric MEMS devices
- Patent number 9,917,243
- Issue date Mar 13, 2018
- Analog Devices, Inc.
- Thomas Kieran Nunan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMs device with outgassing shield
- Patent number 9,764,946
- Issue date Sep 19, 2017
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for preventing stiction of MEMS devices encaps...
- Patent number 9,556,017
- Issue date Jan 31, 2017
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method of forming a MEMS device with etch channels
- Patent number 9,446,948
- Issue date Sep 20, 2016
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microchip with blocking apparatus
- Patent number 9,242,856
- Issue date Jan 26, 2016
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for forming alignment features for back side p...
- Patent number 9,105,644
- Issue date Aug 11, 2015
- Analog Devices, Inc.
- Christine H. Tsau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microchip with blocking apparatus and method of fabricating microchip
- Patent number 8,749,036
- Issue date Jun 10, 2014
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of bonding wafers
- Patent number 8,507,913
- Issue date Aug 13, 2013
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduced stiction MEMS device with exposed silicon carbide
- Patent number 8,507,306
- Issue date Aug 13, 2013
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with roughened surface and method of producing the same
- Patent number 8,389,314
- Issue date Mar 5, 2013
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single crystal silicon sensor with additional layer and method of p...
- Patent number 8,227,286
- Issue date Jul 24, 2012
- Analog Devices, Inc.
- Thomas Kieran Nunan
- G01 - MEASURING TESTING
Information Patent Grant
Single crystal silicon sensor with additional layer and method of p...
- Patent number 8,227,876
- Issue date Jul 24, 2012
- Analog Devices, Inc.
- Thomas Kieran Nunan
- G01 - MEASURING TESTING
Information Patent Grant
Micromachined microphone and multisensor and method for producing same
- Patent number 8,129,803
- Issue date Mar 6, 2012
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined microphone and multisensor and method for producing same
- Patent number 7,825,484
- Issue date Nov 2, 2010
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polysilicon deposition and anneal process enabling thick polysilico...
- Patent number 7,754,617
- Issue date Jul 13, 2010
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single crystal silicon sensor with additional layer and method of p...
- Patent number 7,138,694
- Issue date Nov 21, 2006
- Analog Devices, Inc.
- Thomas Kieran Nunan
- G01 - MEASURING TESTING
Information Patent Grant
MEMS device with conductive path through substrate
- Patent number 6,936,918
- Issue date Aug 30, 2005
- Analog Devices, Inc.
- Kieran P. Harney
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite dielectric with improved etch selectivity for high voltag...
- Patent number 6,747,338
- Issue date Jun 8, 2004
- Analog Devices, Inc.
- Thomas K. Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SINGLE ANCHOR RESONATORS
- Publication number 20240186976
- Publication date Jun 6, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Amir RAHAFROOZ
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SYSTEMS AND METHODS FOR ACOUSTICALLY ISOLATED RESONATORS
- Publication number 20240077312
- Publication date Mar 7, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Diego EMILIO SERRANO
- G01 - MEASURING TESTING
Information Patent Application
SENSING DEVICE
- Publication number 20220349712
- Publication date Nov 3, 2022
- Panasonic Intellectual Property Management Co., Ltd.
- Sagnik PAL
- G01 - MEASURING TESTING
Information Patent Application
SENSING DEVICE
- Publication number 20220128359
- Publication date Apr 28, 2022
- Panasonic Intellectual Property Management Co., Ltd.
- Sagnik PAL
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF
- Publication number 20210229978
- Publication date Jul 29, 2021
- Panasonic Intellectual Property Management Co., Ltd.
- Amir RAHAFROOZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THROUGH SILICON VIA (TSV) FORMATION IN INTEGRATED CIRCUITS
- Publication number 20180111823
- Publication date Apr 26, 2018
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and Method of Forming a MEMS Device with Etch Channels
- Publication number 20160251214
- Publication date Sep 1, 2016
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Fabricating Piezoelectric MEMS Devices
- Publication number 20160111625
- Publication date Apr 21, 2016
- Analog Devices, Inc.
- Thomas Kieran Nunan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS Device with Outgassing Shield
- Publication number 20150115376
- Publication date Apr 30, 2015
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and Method for Forming Alignment Features for Back Side P...
- Publication number 20150028499
- Publication date Jan 29, 2015
- Analog Devices, Inc.
- Christine H. Tsau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Shielding and Biasing in MEMS Devices Enca...
- Publication number 20140374850
- Publication date Dec 25, 2014
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and Method for Preventing Stiction of MEMS Devices Encaps...
- Publication number 20140374856
- Publication date Dec 25, 2014
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microchip with Blocking Apparatus and Method of Fabricating Microchip
- Publication number 20140203422
- Publication date Jul 24, 2014
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROCHIP WITH BLOCKING APPARATUS AND METHOD OF FABRICATING MICROCHIP
- Publication number 20140131850
- Publication date May 15, 2014
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Bonding Wafers
- Publication number 20120074417
- Publication date Mar 29, 2012
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Single Crystal Silicon Sensor with Additional Layer and Method of P...
- Publication number 20110095384
- Publication date Apr 28, 2011
- Analog Devices, Inc.
- Thomas Kieran Nunan
- G01 - MEASURING TESTING
Information Patent Application
Reduced Stiction MEMS Device with Exposed Silicon Carbide
- Publication number 20110073859
- Publication date Mar 31, 2011
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS D...
- Publication number 20100320548
- Publication date Dec 23, 2010
- Analog Devices, Inc.
- Christine H. Tsau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromachined microphone and multisensor and method for producing same
- Publication number 20100285628
- Publication date Nov 11, 2010
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Polysilicon Deposition and Anneal Process Enabling Thick Polysilico...
- Publication number 20090042372
- Publication date Feb 12, 2009
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with Roughened Surface and Method of Producing the Same
- Publication number 20080081391
- Publication date Apr 3, 2008
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromachined microphone and multisensor and method for producing same
- Publication number 20060237806
- Publication date Oct 26, 2006
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Single crystal silicon sensor with additional layer and method of p...
- Publication number 20060214248
- Publication date Sep 28, 2006
- Analog Devices, Inc.
- Thomas Kieran Nunan
- G01 - MEASURING TESTING
Information Patent Application
Method of forming a MEMS device
- Publication number 20060148133
- Publication date Jul 6, 2006
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Single crystal silicon sensor with additional layer and method of p...
- Publication number 20050196933
- Publication date Sep 8, 2005
- Thomas Kieran Nunan
- G01 - MEASURING TESTING
Information Patent Application
MEMS DEVICE WITH CONDUCTIVE PATH THROUGH SUBSTRATE
- Publication number 20050127499
- Publication date Jun 16, 2005
- Kieran P. Harney
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE DIELECTRIC WITH IMPROVED ETCH SELECTIVITY FOR HIGH VOLTAG...
- Publication number 20040099928
- Publication date May 27, 2004
- Thomas K. Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Thomas Kieran Nunan

Person

Patents Grantslast 30 patents

Sensing device

Semiconductor device and method of manufacturing thereof

Through silicon via (TSV) formation in integrated circuits

Apparatus and method for shielding and biasing in MEMS devices enca...

Method of fabricating piezoelectric MEMS devices

MEMs device with outgassing shield

Apparatus and method for preventing stiction of MEMS devices encaps...

Apparatus and method of forming a MEMS device with etch channels

Microchip with blocking apparatus

Apparatus and method for forming alignment features for back side p...

Microchip with blocking apparatus and method of fabricating microchip

Method of bonding wafers

Reduced stiction MEMS device with exposed silicon carbide

MEMS device with roughened surface and method of producing the same

Single crystal silicon sensor with additional layer and method of p...

Single crystal silicon sensor with additional layer and method of p...

Micromachined microphone and multisensor and method for producing same

Micromachined microphone and multisensor and method for producing same

Polysilicon deposition and anneal process enabling thick polysilico...

Single crystal silicon sensor with additional layer and method of p...

MEMS device with conductive path through substrate

Composite dielectric with improved etch selectivity for high voltag...

Patents Applicationslast 30 patents

SINGLE ANCHOR RESONATORS

SYSTEMS AND METHODS FOR ACOUSTICALLY ISOLATED RESONATORS

SENSING DEVICE

SENSING DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF

THROUGH SILICON VIA (TSV) FORMATION IN INTEGRATED CIRCUITS

Apparatus and Method of Forming a MEMS Device with Etch Channels

Method of Fabricating Piezoelectric MEMS Devices

MEMS Device with Outgassing Shield

Apparatus and Method for Forming Alignment Features for Back Side P...

Apparatus and Method for Shielding and Biasing in MEMS Devices Enca...

Apparatus and Method for Preventing Stiction of MEMS Devices Encaps...

Microchip with Blocking Apparatus and Method of Fabricating Microchip

MICROCHIP WITH BLOCKING APPARATUS AND METHOD OF FABRICATING MICROCHIP

Method of Bonding Wafers

Single Crystal Silicon Sensor with Additional Layer and Method of P...

Reduced Stiction MEMS Device with Exposed Silicon Carbide

Silicon-Rich Nitride Etch Stop Layer for Vapor HF Etching in MEMS D...

Micromachined microphone and multisensor and method for producing same

Polysilicon Deposition and Anneal Process Enabling Thick Polysilico...

MEMS Device with Roughened Surface and Method of Producing the Same

Micromachined microphone and multisensor and method for producing same

Single crystal silicon sensor with additional layer and method of p...

Method of forming a MEMS device

Single crystal silicon sensor with additional layer and method of p...

MEMS DEVICE WITH CONDUCTIVE PATH THROUGH SUBSTRATE

COMPOSITE DIELECTRIC WITH IMPROVED ETCH SELECTIVITY FOR HIGH VOLTAG...